US5264040A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Rapid-switching rotating disk reactor
Assignee: State University of New York Polytechnic Institute
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Filing: 1992-11-17
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Granted: 1993-11-23
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Expires: 2012-11-17
Abstract
Abstract A rapid switching rotating disk reactor has an elongated injector for injecting an inert gas into the chamber of a rotating disk reactor. The nozzle of the injector is proximate to the center of the rotating wafer for the purpose of providing an inert gas flow to produce an inert gas boundary layer above the wafer. Whenever the environment of the chamber is to be changed by an introduction of another fluid medium, the injector is activated to provide an inert boundary layer atop the semiconductor wafer, wherein any processing caused by the reactive gases in the chamber is prevented from occurring. Once the chamber is filled with the subsequent fluid medium, the injector is turned off in order for the next processing to commence.
Inventors
- 👤 Franz T. Geyling
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:34
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45502; C23C16/45508; C23C16/45512; C23C16/45519; C23C16/45587; C23C16/45591; Y; Y10; Y10S; Y10S438/00; Y10S438/935; Y10S438/976
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
173 words
An apparatus for processing a semiconductor wafer, comprising: a housing for providing an enclosed environment for containing reactive processing fluid in order to process said semiconductor wafer; a rotating chuck, coupled to said housing and having said semiconductor wafer resident thereon, for rapidly rotating said semiconductor wafer; injector means, coupled to said housing and having its nozzle disposed proximate to an exposed surface of said semiconductor wafer and positioned substantially at the center of said rotating chuck, for injecting nonreacting gas under pressure in order to provide a continuous flow of said nonreacting gas to form an inert boundary layer on said exposed surface of said semiconductor wafer, such that said continuous flow of said nonreacting gas is of sufficient flow rate to form and maintain said inert boundary layer to inhibit cross-diffusion of said processing fluid to said semiconductor wafer, wherein causing said processing of said semiconductor wafer to be interrupted; said nonreacting gas being continuously injected to maintain said inert boundary layer until said processing fluid is removed from said housing.
Claim 2
Independent Claim
173 words
An apparatus for processing a semiconductor wafer, comprising: a housing for providing an enclosed environment for containing reactive processing fluid in order to process said semiconductor wafer; a rotating chuck, coupled to said housing and having said semiconductor wafer resident thereon, for rapidly rotating said semiconductor wafer; injector means, coupled to said housing and having its nozzle disposed proximate to an exposed surface of said semiconductor wafer and positioned substantially at the center of said rotating chuck, for injecting nonreacting gas under pressure in order to provide a continuous flow of said nonreacting gas to form an inert boundary layer on said exposed surface of said semiconductor wafer, such that said continuous flow of said nonreacting gas is of sufficient flow rate to form and maintain said inert boundary layer to inhibit cross-diffusion of said processing fluid to said semiconductor wafer, wherein causing said processing of said semiconductor wafer to be interrupted; said nonreacting gas being continuously injected to maintain said inert boundary layer until said processing fluid is removed from said housing.
Claim 3
Dependent Claim
13 words
The apparatus of claim 1 wherein said nonreacting fluid is an inert gas.
Claim 4
Dependent Claim
29 words
The apparatus of claim 2 wherein said injector means is an elongated tube extending perpendicularly to have its nozzle substantially adjacent to said exposed surface of said semiconductor wafer.
Claim 5
Dependent Claim
13 words
The apparatus of claim 3 wherein said injector means is made of quartz.
Claim 6
Independent Claim
196 words
An apparatus for processing a semiconductor wafer, comprising: a reactor having a chamber for providing an enclosed environment for containing reactive processing gas mixture in order to process said semiconductor wafer; a rotating disk, coupled to said chamber and having said semiconductor wafer resident thereon, for rapidly rotating said semiconductor wafer to disperse said processing gas mixture uniformly across a processing surface of said semiconductor wafer due to its rotation; an injector, coupled to said chamber and having its nozzle disposed proximate to said processing surface and positioned substantially at the center of said semiconductor wafer, for injecting nonreacting gas under pressure in order to provide a continuous flow of said nonreacting gas to form an inert gas boundary layer on said processing surface of said semiconductor wafer, such that said continuous flow of said nonreacting gas is of sufficient flow rate to form and maintain said inert gas boundary layer to inhibit cross-diffusion of said processing gas mixture to said semiconductor wafer, wherein causing said processing of said semiconductor wafer to be interrupted; said nonreacting gas being continuously injected to maintains aid inert boundary layer until said processing gas mixture is removed from said chamber.
Claim 7
Independent Claim
196 words
An apparatus for processing a semiconductor wafer, comprising: a reactor having a chamber for providing an enclosed environment for containing reactive processing gas mixture in order to process said semiconductor wafer; a rotating disk, coupled to said chamber and having said semiconductor wafer resident thereon, for rapidly rotating said semiconductor wafer to disperse said processing gas mixture uniformly across a processing surface of said semiconductor wafer due to its rotation; an injector, coupled to said chamber and having its nozzle disposed proximate to said processing surface and positioned substantially at the center of said semiconductor wafer, for injecting nonreacting gas under pressure in order to provide a continuous flow of said nonreacting gas to form an inert gas boundary layer on said processing surface of said semiconductor wafer, such that said continuous flow of said nonreacting gas is of sufficient flow rate to form and maintain said inert gas boundary layer to inhibit cross-diffusion of said processing gas mixture to said semiconductor wafer, wherein causing said processing of said semiconductor wafer to be interrupted; said nonreacting gas being continuously injected to maintains aid inert boundary layer until said processing gas mixture is removed from said chamber.
Claim 8
Dependent Claim
13 words
The apparatus of claim 5 wherein said nonreacting gas is an inert gas.
Claim 9
Dependent Claim
28 words
The apparatus of claim 6 wherein said injector is an elongated tube extending perpendicularly to have its nozzle substantially adjacent to said processing surface of said semiconductor wafer.
Claim 10
Dependent Claim
34 words
The apparatus of claim 8 wherein the rotation of said rotating disk is at least 800 revolutions per minute in order to provide for uniform flow of said inert gas over said semiconductor wafer.
Claim 11
Dependent Claim
12 words
The apparatus of claim 8 wherein said injector is made of quartz.
Claim 12
Dependent Claim
13 words
The apparatus of claim 8 wherein said injector is made of stainless steel.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-22 | 1997-05-24 | 1997-11-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-22 | 2001-05-24 | 2001-11-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-22 | 2005-05-24 | 2005-11-23 | $7700.00 | Window Closed / Lapsed |