US5262029A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and system for clamping semiconductor wafers
Assignee: Lam Research Corp
•
Filing: 1989-11-21
•
Granted: 1993-11-16
•
Expires: 2009-11-21
Abstract
Abstract A wafer clamping mechanism includes a clamp ring having a central opening corresponding to the geometry of a conventional semiconductor wafer. An overhang located about the opening engages the corresponding semiconductor wafer when in place on an electrode of a plasma reactor. The clamp ring is resiliently mounted on a housing which holds a second electrode. The clamp ring is automatically engaged against the wafer as the spacing between the two electrodes is adjusted to a desired gap width. A raised annular barrier on the lower electrode circumscribes the wafer and engages a mating surface on the clamp ring in order to enhance alignment of the clamp.
Inventors
- 👤 David Erskine
- 👤 Randall S. Mundt
- 👤 Dariush Rafinejad
- 👤 Vernon W. H. Wong
- 👤 Gerald Z. Yin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 20:31
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7606; C; C23; C23C; C23C16/00; C23C16/44; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4585; H10P72/7611
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
131 words
A system for clamping a semiconductor wafer on a holder surface, said system comprising: a raised annular barrier on the surface defining a cavity for receiving the semiconductor wafer, said annular barrier including an outer peripheral rim; a ring clamp including a first surface capable of mating with the outer peripheral rim of the raised annular barrier and a second surface capable of retaining the wafer when said wafer is located within the cavity, whereby mating between the first surface of the ring clamp and the peripheral rim aligns the clamp with the cavity; and means for reciprocating the ring clamp relative to the holding surface, whereby the first surface engages the barrier to align the ring clamp and the second surface engages the wafer to hold said wafer in place.
Claim 2
Independent Claim
131 words
A system for clamping a semiconductor wafer on a holder surface, said system comprising: a raised annular barrier on the surface defining a cavity for receiving the semiconductor wafer, said annular barrier including an outer peripheral rim; a ring clamp including a first surface capable of mating with the outer peripheral rim of the raised annular barrier and a second surface capable of retaining the wafer when said wafer is located within the cavity, whereby mating between the first surface of the ring clamp and the peripheral rim aligns the clamp with the cavity; and means for reciprocating the ring clamp relative to the holding surface, whereby the first surface engages the barrier to align the ring clamp and the second surface engages the wafer to hold said wafer in place.
Claim 3
Dependent Claim
26 words
A system as in claim 1, further including a raised pedestal region on the holding surface, wherein the raised annular barrier circumscribes the raised pedestal region.
Claim 4
Dependent Claim
49 words
A system as in claim 1, wherein the outer peripheral rim of the raised annular barrier includes a chamfered periphery and wherein the first surface on the ring clamp is similarly chamfered to mate and align with the rim as the ring clamp and holding surface are brought together.
Claim 5
Dependent Claim
36 words
A system as in claim 1, wherein the raised annular barrier defines a circular cavity and the second surface on the ring clamp is shaped to conform to a semiconductor wafer having an irregular peripheral geometry.
Claim 6
Dependent Claim
43 words
A system as in claim 1, wherein the means for reciprocating the ring clamp relative to the holding surface includes a housing, means for reciprocating the housing relative to the holding surface, and means for resiliently attaching the ring clamp to the housing.
Claim 7
Dependent Claim
33 words
A system as in claim 5, wherein the holding surface is an electrode and means for reciprocating the ring clamp relative to the holding surface includes a second electrode mounted on the housing.
Claim 8
Dependent Claim
33 words
A system as in claim 5, wherein the means for resiliently attaching the ring clamp to the housing includes a plurality of spring assemblies secured about the outer periphery of the ring clamp.
Claim 9
Dependent Claim
34 words
A system as in claim 7, wherein each spring assembly comprises a lubricous cylinder, a plunger element reciprocatably mounted in the cylinder, and a spring element extending between the housing and the plunger element.
References Cited (Backward Citations)
US4282924A
Cited
US4268374A
Cited
US4340462A
Cited
US4367114A
Cited
US4397724A
Cited
US4473455A
Cited
US4508161A
Cited
US4522697A
Cited
US4603466A
Cited
US4512841A
Cited
US4657617A
Cited
US4671204A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-15 | 1997-05-17 | 1997-11-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-15 | 2001-05-17 | 2001-11-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-15 | 2005-05-17 | 2005-11-16 | $7700.00 | Window Closed / Lapsed |