US5261935A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Clean air apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1993-02-26
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Granted: 1993-11-16
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Expires: 2013-02-26
Abstract
Abstract A clean air apparatus includes a housing having an opening through which a carrier housing semiconductor wafers is supplied into the housing and an I/O port for supporting the carrier and a furnace for treating the wafer, provided in the upper portion of the housing. The carriers are at the same time supported by a first carrier stage provided in the upper portion of the housing and supported by a second carrier stage provided in the lower portion of the housing. The carrier or carriers are selectively moved between the I/O port and the first stage, between the I/O port and the second stage, and between the first stage and the second stage. A clean air is applied to the wafers in the carriers supported by the I/O port, the first stage and the second stage.
Inventors
- 👤 Katsumi Ishii
- 👤 Takanobu Asano
- 👤 Masaharu Abe
- 👤 Kenichi Yamaga
- 👤 Kazunari Sakata
- 👤 Takashi Tanahashi
- 👤 Syuji Moriya
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 15:51
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/33; H10P72/3312; C; C30; C30B; C30B33/00; H10P72/04; H10P72/0402; H10P72/34; H10P72/3404; H10P72/3406; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137; Y10S414/139; Y10S414/14
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
195 words
A clean air apparatus comprising: a housing having an opening through which a carrier housing a plurality of objects to be treated is supplied into the housing from the outside of the housing, and an I/O port for supporting the carrier which is supplied into the housing; means for treating the object, provided in the upper portion of the housing; first means for supporting a plurality of carriers at the same time, provided in the upper portion of the housing and the side portion of the treating means; second means for supporting at least one carrier, provided in the lower portion of the housing; means provided in the housing to be selectively movable between the I/O port and the first supporting means, between the I/O port and the second supporting means, and between the first supporting means and the second supporting means, for transporting the carrier among the I/O port, the first supporting means and the second supporting means; means for performing the selective movement of the transporting means; means for applying a clean air to the objects in the carriers supported by the I/O port, the first supporting means and the second supporting means.
Claim 2
Dependent Claim
195 words
A clean air apparatus comprising: a housing having an opening through which a carrier housing a plurality of objects to be treated is supplied into the housing from the outside of the housing, and an I/O port for supporting the carrier which is supplied into the housing; means for treating the object, provided in the upper portion of the housing; first means for supporting a plurality of carriers at the same time, provided in the upper portion of the housing and the side portion of the treating means; second means for supporting at least one carrier, provided in the lower portion of the housing; means provided in the housing to be selectively movable between the I/O port and the first supporting means, between the I/O port and the second supporting means, and between the first supporting means and the second supporting means, for transporting the carrier among the I/O port, the first supporting means and the second supporting means; means for performing the selective movement of the transporting means; means for applying a clean air to the objects in the carriers supported by the I/O port, the first supporting means and the second supporting means.
Claim 3
Dependent Claim
27 words
The clean air apparatus according to claim 1, which comprises means for supplying object in the carrier supported by the second supporting means to the treating means.
Claim 4
Dependent Claim
26 words
The clean air apparatus according to claim 1, wherein said I/O port includes means for turning the carrier supported by the I/O port by 90 degrees.
Claim 5
Dependent Claim
42 words
The clean air apparatus according to claim 3, wherein said I/O port supports the carrier thereon and is attached to the housing to be turned by 90 degrees, and said turning means includes means for turning the I/O port by 90 degrees.
Claim 6
Dependent Claim
25 words
The clean air apparatus according to claim 1, wherein said second supporting means includes means for supporting a plurality of carriers at the same time.
Claim 7
Dependent Claim
214 words
A clean air apparatus comprising; a housing having an opening through which a carrier holding a plurality of objects to be treated is applied into the housing from the outside of the housing, and an I/O port for supporting the carrier which is applied into the housing; means for preventing dusts from entering the housing from the outside through the opening; means for treating the object, provided in the upper portion of the housing; first means for supporting a plurality of carriers at the same time, provided in the upper portion of the housing and the side portion of the treating means; second means for supporting at least one carrier, provided in the lower portion of the housing; means provided in the housing to be selectively movable between the I/O port and the first supporting means, between the I/O port and the second supporting means, and between the first supporting means and the second supporting means, for transporting the carrier among the I/O port, first supporting means and the second supporting means; means for performing the selective movement of the transporting means; means for applying a clean air to the objects in the carrier or carriers supported by at least one of the I/O port, the first supporting means and the second supporting means.
Claim 8
Dependent Claim
214 words
A clean air apparatus comprising; a housing having an opening through which a carrier holding a plurality of objects to be treated is applied into the housing from the outside of the housing, and an I/O port for supporting the carrier which is applied into the housing; means for preventing dusts from entering the housing from the outside through the opening; means for treating the object, provided in the upper portion of the housing; first means for supporting a plurality of carriers at the same time, provided in the upper portion of the housing and the side portion of the treating means; second means for supporting at least one carrier, provided in the lower portion of the housing; means provided in the housing to be selectively movable between the I/O port and the first supporting means, between the I/O port and the second supporting means, and between the first supporting means and the second supporting means, for transporting the carrier among the I/O port, first supporting means and the second supporting means; means for performing the selective movement of the transporting means; means for applying a clean air to the objects in the carrier or carriers supported by at least one of the I/O port, the first supporting means and the second supporting means.
Claim 9
Dependent Claim
22 words
The clean air apparatus according to claim 6, wherein said preventing means includes a door for opening/closing the opening of the housing.
Claim 10
Dependent Claim
43 words
The clean air apparatus according to claim 7, wherein said preventing means includes means for maintaining the pressure of the inside of the door to be equal to or higher than that of the outside thereof, when the door is at least opened.
Claim 11
Dependent Claim
270 words
A clean air apparatus comprising: a housing having a supplying opening through which a carrier is supplied into the housing from the outside of the housing, the carrier including one side wall and an opposite side wall respectively having openings therethrough and holding a plurality of objects to be treated so that objects are arranged in a parallel relationship with one another and at a predetermined space between the adjacent ones, the space communicating with the openings in the one side and opposite side walls; an I/O port provided in the housing near the supplying opening for supporting the carrier which is supplied into the housing with side walls disposed horizontally; means for turning the carrier supported by the I/O port by 90 degrees so that the side walls are vertical; means for treating the object, provided in the upper portion of the housing; first means for supporting a plurality of carriers of which the side walls are vertical at the same time, provided in the upper portion of the housing and the side portion of the treating means; second means for supporting at least one carrier of which the side walls are vertical, provided in the lower portion of the housing; means for transporting the carrier between the I/O port and the first supporting means, and between the first supporting means and the second supporting means, maintaining the carrier with the side walls directed vertical; and means for applying an clean air to the objects in the at least one carrier supported by at least one of the I/O port, the first supporting means and the second supporting means.
Claim 12
Dependent Claim
270 words
A clean air apparatus comprising: a housing having a supplying opening through which a carrier is supplied into the housing from the outside of the housing, the carrier including one side wall and an opposite side wall respectively having openings therethrough and holding a plurality of objects to be treated so that objects are arranged in a parallel relationship with one another and at a predetermined space between the adjacent ones, the space communicating with the openings in the one side and opposite side walls; an I/O port provided in the housing near the supplying opening for supporting the carrier which is supplied into the housing with side walls disposed horizontally; means for turning the carrier supported by the I/O port by 90 degrees so that the side walls are vertical; means for treating the object, provided in the upper portion of the housing; first means for supporting a plurality of carriers of which the side walls are vertical at the same time, provided in the upper portion of the housing and the side portion of the treating means; second means for supporting at least one carrier of which the side walls are vertical, provided in the lower portion of the housing; means for transporting the carrier between the I/O port and the first supporting means, and between the first supporting means and the second supporting means, maintaining the carrier with the side walls directed vertical; and means for applying an clean air to the objects in the at least one carrier supported by at least one of the I/O port, the first supporting means and the second supporting means.
Claim 13
Dependent Claim
46 words
The clean air apparatus according to claim 9, wherein said clean-air applying means including means for flowing the clean air to the objects in the carrier, to the opposite side wall of the carrier from the one side wall through the space between the adjacent objects.
Claim 14
Dependent Claim
31 words
The clean air apparatus according to claim 10, wherein said treating means includes a heating tube having an opening thereunder, and a lid for opening/closing the opening of the heating tube.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-15 | 1997-05-17 | 1997-11-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-15 | 2001-05-17 | 2001-11-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-15 | 2005-05-17 | 2005-11-16 | $7700.00 | Window Closed / Lapsed |