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US5260960A Expired / Lapsed US ⏱️ 0.0 years remaining

Tunable semiconductor laser on a semi-insulating substrate

Assignee: II VI Delaware Inc
•
Filing: 1992-04-23
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Granted: 1993-11-09
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Expires: 2012-04-23
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Abstract

Abstract A tunable laser diode on a semi-insulating substrate having a stripe-shaped layer structure has an intermediate layer between an active layer and a tuning layer that is grown-over by an confinement layer that is doped for the same conductivity type as the intermediate layer. An oppositely doped, lateral region is electrically connected via an identically doped lower region to the active layer. An upper region is likewise oppositely doped and is electrically connected to the tuning layer. A contact layer is essentially planarly applied on the surface of the confinement layer and has respective portions on the appertaining regions on which the contacts provided with adequate bond areas are applied with a further contact layer for the common contact.

Inventors

  • 👤 Markus-Christian Amann
  • 👤 Stefan Illek
  • 👤 Wolfgang Thulke

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-06 15:24
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/06; H01S5/062; H01S5/06203; H01S5/06206; H01S5/20; H01S5/22; H01S5/227; H01S5/02; H01S5/0206; H01S5/0208; H01S5/2275

Claims Analysis

Total Claims: 18
Claim 1
Independent Claim 217 words
A laser diode on a semi-insulating substrate, comprising: a stripe-shaped layer structure having an intermediate layer located between two predetermined layers, at least one layer of said two predetermined layers being an active layer provided for generating a light emission; a confinement layer, that is substantially doped for electrical conduction of a first conductivity type, laterally adjoining said stripe-shaped layer structure at both sides thereof; an upper region that is doped for a second conductivity type, the second conductivity type being opposite the first conductivity type, over said stripe-shaped layer structure and a lateral region located laterally relative to said stripe-shaped layer structure and separated from said stripe-shaped layer structure by a portion of said confinement layer, said lateral region being doped for the second conductivity type and being electrically conductively connected to a side of said layer structure facing toward the substrate, said lateral region being separate from said upper region; a contact layer having respective portions electrically separated from one another on said upper region, on said lateral region and on a region of said confinement layer doped for the first conductivity type; and respective contacts separated from one another for said portions of said contact layer, so that separate current injection is provided through said intermediate layer into each of said two predetermined layers.
Claim 2
Dependent Claim 217 words
A laser diode on a semi-insulating substrate, comprising: a stripe-shaped layer structure having an intermediate layer located between two predetermined layers, at least one layer of said two predetermined layers being an active layer provided for generating a light emission; a confinement layer, that is substantially doped for electrical conduction of a first conductivity type, laterally adjoining said stripe-shaped layer structure at both sides thereof; an upper region that is doped for a second conductivity type, the second conductivity type being opposite the first conductivity type, over said stripe-shaped layer structure and a lateral region located laterally relative to said stripe-shaped layer structure and separated from said stripe-shaped layer structure by a portion of said confinement layer, said lateral region being doped for the second conductivity type and being electrically conductively connected to a side of said layer structure facing toward the substrate, said lateral region being separate from said upper region; a contact layer having respective portions electrically separated from one another on said upper region, on said lateral region and on a region of said confinement layer doped for the first conductivity type; and respective contacts separated from one another for said portions of said contact layer, so that separate current injection is provided through said intermediate layer into each of said two predetermined layers.
Claim 3
Dependent Claim 45 words
The laser diode according to claim 1, wherein the laser diode further comprises a lower region, doped for the second conductivity type, in the substrate, said lower region electrically connecting said lateral region to said side of said stripe-shaped layer structure facing toward the substrate.
Claim 4
Dependent Claim 54 words
The laser diode according to claim 1, wherein a contact of said respective contacts, that is provided for said portion of the contact layer applied on said region of said confinement layer doped for the first conductivity type, is applied on a further contact layer, that is highly doped for the first conductivity type.
Claim 5
Dependent Claim 67 words
The laser diode according to claim 1, wherein a contact of said respective contacts, that is provided for said portion of said contact layer that is not arranged on said upper region, has an omega-shaped configuration that leaves free a region for a bonding area of a contact of said respective contacts, that is provided for said portion of said contact layer arranged on said upper region.
Claim 6
Dependent Claim 26 words
The laser diode according to claim 1, wherein one of said two predetermined layers is a tuning layer provided for wavelength variation of the laser diode.
Claim 7
Dependent Claim 24 words
The laser diode according to claim 5, wherein said tuning layer is arranged on a side of said intermediate layer facing toward the substrate.
Claim 8
Dependent Claim 25 words
The laser diode according to claim 5, wherein said tuning layer is arranged on a side of said intermediate layer facing away from the substrate.
Claim 9
Dependent Claim 295 words
A laser diode on a semi-insulating substrate, comprising: a stripe-shaped layer structure having an intermediate layer located between two predetermined layers, at least one layer of said two predetermined layers being an active layer provided for generating a light emission; a confinement layer, that is substantially doped for electrical conduction of a first conductivity type, laterally adjoining said stripe-shaped layer structure at both sides thereof; an upper region that is doped for a second conductivity type, the second conductivity type being opposite the first conductivity type, over said stripe-shaped layer structure and a lateral region located laterally relative to said stripe-shaped layer structure and separated from said stripe-shaped layer structure by a portion of said confinement layer, said lateral region being doped for the second conductivity type and being electrically conductively connected to a side of said layer structure facing toward the substrate, said lateral region being separate from said upper region; a lower region, doped for the second conductivity type, in the substrate, said lower region electrically connecting said lateral region to said side of said stripe-shaped layer structure facing toward the substrate; a contact layer having respective portions electrically separated from one another on said upper region, on said lateral region and on a region of said confinement layer doped for the first conductivity type; respective contacts separated from one another for said portions of said contact layer, so that separate current injection is provided through said intermediate layer into each of said two predetermined layers; and a contact of said respective contacts, that is provided for said portion of said contact layer applied on a region of said confinement layer doped for the first conductivity type, being applied on a further contact layer, that is highly doped for the first conductivity type.
Claim 10
Dependent Claim 295 words
A laser diode on a semi-insulating substrate, comprising: a stripe-shaped layer structure having an intermediate layer located between two predetermined layers, at least one layer of said two predetermined layers being an active layer provided for generating a light emission; a confinement layer, that is substantially doped for electrical conduction of a first conductivity type, laterally adjoining said stripe-shaped layer structure at both sides thereof; an upper region that is doped for a second conductivity type, the second conductivity type being opposite the first conductivity type, over said stripe-shaped layer structure and a lateral region located laterally relative to said stripe-shaped layer structure and separated from said stripe-shaped layer structure by a portion of said confinement layer, said lateral region being doped for the second conductivity type and being electrically conductively connected to a side of said layer structure facing toward the substrate, said lateral region being separate from said upper region; a lower region, doped for the second conductivity type, in the substrate, said lower region electrically connecting said lateral region to said side of said stripe-shaped layer structure facing toward the substrate; a contact layer having respective portions electrically separated from one another on said upper region, on said lateral region and on a region of said confinement layer doped for the first conductivity type; respective contacts separated from one another for said portions of said contact layer, so that separate current injection is provided through said intermediate layer into each of said two predetermined layers; and a contact of said respective contacts, that is provided for said portion of said contact layer applied on a region of said confinement layer doped for the first conductivity type, being applied on a further contact layer, that is highly doped for the first conductivity type.
Claim 11
Dependent Claim 26 words
The laser diode according to claim 8, wherein one of said two predetermined layers is a tuning layer provided for wavelength variation of the laser diode.
Claim 12
Dependent Claim 24 words
The laser diode according to claim 8, wherein said tuning layer is arranged on a side of said intermediate layer facing toward the substrate.
Claim 13
Dependent Claim 25 words
The laser diode according to claim 8, wherein said tuning layer is arranged on a side of said intermediate layer facing away from the substrate.
Claim 14
Dependent Claim 307 words
A laser diode on a semi-insulating substrate, comprising: a stripe-shaped layer structure having an intermediate layer located between two predetermined layers, at least one layer of said two predetermined layers being an active layer provided for generating a light emission; a confinement layer, that is substantially doped for electrical conduction of a first conductivity type, laterally adjoining said stripe-shaped layer structure at both sides thereof; an upper region that is doped for a second conductivity type, the second conductivity type being opposite the first conductivity type, over said stripe-shaped layer structure and a lateral region located laterally relative to said stripe-shaped layer structure and separated from said stripe-shaped layer structure by a portion of said confinement layer, said lateral region being doped for the second conductivity type and being electrically conductively connected to a side of said layer structure facing toward the substrate, said lateral region being separate from said upper region; a lower region, doped for the second conductivity type, in the substrate, said lower region electrically connecting said lateral region to said side of said stripe-shaped layer structure facing toward the substrate; a contact layer having respective portions electrically separated from one another on said upper region, on said lateral region and on a region of said confinement layer doped for the first conductivity type; respective contacts separated from one another for said portions of said contact layer, so that separate current injection is provided through said intermediate layer into each of said two predetermined layers; a contact of said respective contacts, that is provided for said portion of said contact layer that is not arranged on said upper region, having an omega-shaped configuration that leaves free a region for a bonding area of a contact of said respective contacts, that is provided for said portion of said contact layer arranged on said upper region.
Claim 15
Dependent Claim 307 words
A laser diode on a semi-insulating substrate, comprising: a stripe-shaped layer structure having an intermediate layer located between two predetermined layers, at least one layer of said two predetermined layers being an active layer provided for generating a light emission; a confinement layer, that is substantially doped for electrical conduction of a first conductivity type, laterally adjoining said stripe-shaped layer structure at both sides thereof; an upper region that is doped for a second conductivity type, the second conductivity type being opposite the first conductivity type, over said stripe-shaped layer structure and a lateral region located laterally relative to said stripe-shaped layer structure and separated from said stripe-shaped layer structure by a portion of said confinement layer, said lateral region being doped for the second conductivity type and being electrically conductively connected to a side of said layer structure facing toward the substrate, said lateral region being separate from said upper region; a lower region, doped for the second conductivity type, in the substrate, said lower region electrically connecting said lateral region to said side of said stripe-shaped layer structure facing toward the substrate; a contact layer having respective portions electrically separated from one another on said upper region, on said lateral region and on a region of said confinement layer doped for the first conductivity type; respective contacts separated from one another for said portions of said contact layer, so that separate current injection is provided through said intermediate layer into each of said two predetermined layers; a contact of said respective contacts, that is provided for said portion of said contact layer that is not arranged on said upper region, having an omega-shaped configuration that leaves free a region for a bonding area of a contact of said respective contacts, that is provided for said portion of said contact layer arranged on said upper region.
Claim 16
Dependent Claim 26 words
The laser diode according to claim 12, wherein one of said two predetermined layers is a tuning layer provided for wavelength variation of the laser diode.
Claim 17
Dependent Claim 24 words
The laser diode according to claim 12, wherein said tuning layer is arranged on a side of said intermediate layer facing toward the substrate.
Claim 18
Dependent Claim 25 words
The laser diode according to claim 12, wherein said tuning layer is arranged on a side of said intermediate layer facing away from the substrate.

References Cited (Backward Citations)

JPS57172790A Cited
EP0360011A2 Cited
US5048049A Cited
US5027363A Cited
EP0404551A2 Cited
JPH03105991A Cited
US5073895A Cited
US5155560A Cited
EP1103890A2 Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-11-08 1997-05-10 1997-11-09 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-11-08 2001-05-10 2001-11-09 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-11-08 2005-05-10 2005-11-09 $7700.00 Window Closed / Lapsed

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