Counterflow valve

Claim 1

A counterflow valve means for switching between flowing gas streams without undesirable interaction of the gas with any dead volume area or non-metallic surfaces or both, comprising: a) four-way valve means having a first and second input and a first and second output, and containing a first position wherein the first input is connected to the first output and the second input is connected to the second output, and a second position wherein the fist input is connected to the second output and the second input is connected to the first output; b) first inlet duct means, containing a first leg, and a second leg, said first leg being connected to said first input, said first inlet duct means being adapted to receive a flow of a first gas or gas mixture, c) second inlet duct means, containing a first leg and a second leg, the first leg being connected to the second input, the second inlet duct means being adapted to receive a flow of a second gas or gas mixture, d) pressure regulation means having an input connected to the first output and an output connected to a first vent gas means, e) adjustable flow control orifice means having an input connected to said second output and an output connected to a second vent gas means, and f) valve outlet duct means having an input connected to said second leg of said first inlet duct means and to said second leg of said second inlet duct means and an output for connection to a device adapted to receive a flow of a mixture of said first gas or gas mixture and said second gas or gas mixture, wherein said four-way valve means is a four-way double ported ball valve.

Claim 5

An apparatus for testing the interaction of one or more low level impurities with one or more components of an ultra-high purity gas distribution system, which comprises: a) an inert or diluent gas inlet duct means fluidly connected to a first and second leg, b) said first leg containing an electronic flow control means, a purifier and permeation device, in order, downstream of said inert or diluent gas inlet, and being fluidly connected to a first input of a counterflow valve means, c) said second leg containing a purifier and a permeation device, in order, downstream of said inert or diluent gas inlet, and being fluidly connected to a second input of said counterflow valve means, d) said first and second leg further being fluidly connected downstream of said counterflow valve means to means for testing said one or more components of said ultra-high purity gas distribution system and wherein said counterflow valve means comprises: i) four-way valve means having a first and second input and a first and second output, and containing a first position wherein the first input is connected to the first output and the second output is connected to the second output, and a second position wherein the first input is connected to the second output and the second input is connected to the first output; ii) first inlet duct means, containing a first leg, and a second leg, said first leg being connected to said first input, said first inlet duct means being adapted to receive a flow of a first gas or gas mixture, iii) second inlet duct means, containing a first leg and a second leg, the first leg being connected to the second input, the second inlet duct means being adapted to receive a flow of a second gas or gas mixture, iv) pressure regulation means having an input connected to the first output and an output connected to a first vent gas means, v) adjustable flow control orifice means having an input connected to said second output and an output connected to a second vent gas means, and vi) valve outlet duct means having an input connected to said second leg of said first inlet duct means and to said second leg of said second inlet duct means and an output for connection to a device adapted to receive a flow of a mixture of said first gas or gas mixture and said second gas or gas mixture.

Claim 6

An apparatus for testing the interaction of one or more low level impurities with one or more components of an ultra-high purity gas distribution system, which comprises: a) an inert or diluent gas inlet duct means fluidly connected to a first and second leg, b) said first leg containing an electronic flow control means, a purifier and permeation device, in order, downstream of said inert or diluent gas inlet, and being fluidly connected to a first input of a counterflow valve means, c) said second leg containing a purifier and a permeation device, in order, downstream of said inert or diluent gas inlet, and being fluidly connected to a second input of said counterflow valve means, d) said first and second leg further being fluidly connected downstream of said counterflow valve means to means for testing said one or more components of said ultra-high purity gas distribution system and wherein said counterflow valve means comprises: i) four-way valve means having a first and second input and a first and second output, and containing a first position wherein the first input is connected to the first output and the second output is connected to the second output, and a second position wherein the first input is connected to the second output and the second input is connected to the first output; ii) first inlet duct means, containing a first leg, and a second leg, said first leg being connected to said first input, said first inlet duct means being adapted to receive a flow of a first gas or gas mixture, iii) second inlet duct means, containing a first leg and a second leg, the first leg being connected to the second input, the second inlet duct means being adapted to receive a flow of a second gas or gas mixture, iv) pressure regulation means having an input connected to the first output and an output connected to a first vent gas means, v) adjustable flow control orifice means having an input connected to said second output and an output connected to a second vent gas means, and vi) valve outlet duct means having an input connected to said second leg of said first inlet duct means and to said second leg of said second inlet duct means and an output for connection to a device adapted to receive a flow of a mixture of said first gas or gas mixture and said second gas or gas mixture.

Claim 8

An apparatus for switching between four gas streams, comprising three counterflow valve means fluidly interconnected such that an outlet duct means of a first and third counterflow valve means are each fluidly connected to a first and second inlet means, respectively, of said second counterflow valve means, and wherein each of said first, second and third counterflow valve means, comprises: a) four-way valve means having a first and second input and a first and second output, and containing a first position wherein the first input is connected to the first output and the second input is connected to the second output, and a second position wherein the first input is connected to the second output and the second input is connected to the first output; b) first inlet duct means, containing a first leg, and a second leg, said first leg being connected to said first input, said first inlet duct means being adapted to receive a flow of a first gas or gas mixture, c) second inlet duct means, containing a first leg and a second leg, the first leg being connected to the second input, the second inlet duct means being adapted to receive a flow of a second gas or gas mixture, d) pressure regulation means having an input connected to the first output and an output connected to a first vent gas means, e) adjustable flow control orifice means having an input connected to said second output and an output connected to a second vent gas means, and f) valve outlet duct means having an input connected to said second leg of said first inlet duct means and to said second leg of said second inlet duct means and an output for connection to a device adapted to receive a flow of a mixture of said first gas or gas mixture and said second gas or gas mixture.

Claim 9

An apparatus for switching between four gas streams, comprising three counterflow valve means fluidly interconnected such that an outlet duct means of a first and third counterflow valve means are each fluidly connected to a first and second inlet means, respectively, of said second counterflow valve means, and wherein each of said first, second and third counterflow valve means, comprises: a) four-way valve means having a first and second input and a first and second output, and containing a first position wherein the first input is connected to the first output and the second input is connected to the second output, and a second position wherein the first input is connected to the second output and the second input is connected to the first output; b) first inlet duct means, containing a first leg, and a second leg, said first leg being connected to said first input, said first inlet duct means being adapted to receive a flow of a first gas or gas mixture, c) second inlet duct means, containing a first leg and a second leg, the first leg being connected to the second input, the second inlet duct means being adapted to receive a flow of a second gas or gas mixture, d) pressure regulation means having an input connected to the first output and an output connected to a first vent gas means, e) adjustable flow control orifice means having an input connected to said second output and an output connected to a second vent gas means, and f) valve outlet duct means having an input connected to said second leg of said first inlet duct means and to said second leg of said second inlet duct means and an output for connection to a device adapted to receive a flow of a mixture of said first gas or gas mixture and said second gas or gas mixture.