Abstract A laminated type piezoelectric actuator having a laminated body formed by alternately laminating piezoelectric ceramic layers and internal electrode layers, each of which are approximately the same shape. The four corners or edges of each layer of the ceramic layers and the internal electrode layers, which edges extend in parallel with the lamination direction of the laminated body, are machined to form a convex, arcuate shape or an angled, planar shape. This enables the end parts of each layer, which have a high distribution density of microcracks, to be removed, so that interlayer short-circuiting between the internal electrode films caused by the microcracks is prevented. Accordingly, the operation life and the reliability of the actuator of this invention is extended and improved, respectively, even when it is driven by a driving voltage which is exactly or close to that of a dc voltage in a highly humid environment. By using a Pb (Ni 1/3 Nb 2/3 ) O 3 --PbTiO 3 --PbZrO 3 system perovskite structure compound oxide as the piezoelectric ceramic piece, and removing each of the four edges in the cross section to exhibit a convex, arcuate shape with a radius of curvature equal to or greater than 1.0 mm, or an angled, planar shape having a chamfering length equal to or greater than 0.8 mm, it is possible to increase the life of the actuator to about 10 times that of the actuator of the prior art.
A laminated type piezoelectric actuator comprising: a laminated body of piezoelectric ceramic layers and internal electrode layers, each of said layers having substantially the same cross sectional area; insulator films respectively covering exposed portions of odd numbered and even numbered layers of said internal electrode layers at one and the other of a mutually opposing pair of side faces running in parallel with the lamination direction of said laminated body; and external electrode films provided on the respective side faces covering said insulator films and the exposed portions of said internal electrode layers for electrical connection therebetween, wherein said laminated body has edges extending in parallel to the lamination direction, and said edges are machined to form one of a convex, arcuate shape or an angled, planar shape, thereby reducing the formation of microcracks at said edges.
Claim 2
Dependent Claim
137 words
A laminated type piezoelectric actuator comprising: a laminated body of piezoelectric ceramic layers and internal electrode layers, each of said layers having substantially the same cross sectional area; insulator films respectively covering exposed portions of odd numbered and even numbered layers of said internal electrode layers at one and the other of a mutually opposing pair of side faces running in parallel with the lamination direction of said laminated body; and external electrode films provided on the respective side faces covering said insulator films and the exposed portions of said internal electrode layers for electrical connection therebetween, wherein said laminated body has edges extending in parallel to the lamination direction, and said edges are machined to form one of a convex, arcuate shape or an angled, planar shape, thereby reducing the formation of microcracks at said edges.
Claim 3
Dependent Claim
34 words
A laminated type piezoelectric actuator as claimed in claim 1, wherein said piezoelectric ceramic layers comprise a Pb (Ni 166 Nb 2/3 ) O 3 --PbTiO 3 --PbZrO 3 system perovskite structure compound oxide.
Claim 4
Dependent Claim
27 words
A laminated type piezoelectric actuator as claimed in claim 1, wherein the convex, arcuate ridges exhibit a radius of curvature equal to or greater than 1.0 mm.
Claim 5
Dependent Claim
25 words
A laminated type piezoelectric actuator, as recited in claim 1, wherein the angled, planar ridges exhibit a length equal to or greater than 0.8 mm.