Interferometric temperature measurement system and method

Claim 1

An interferometric temperature measurement system for measuring the temperature of a sample, said system comprising: a laser source which sends a beam of electromagnetic radiation towards said sample; a first detector which measures the intensity of a reflected beam of electromagnetic radiation reflected off of said sample; said first detector being positioned on the axis of the reflected beam of electromagnetic radiation; said electromagnetic radiation from said laser source having both S and P components, said S and P components being orthogonal to each other; second and third detectors located off the axis of the reflected beam which measure the intensity of the S and P components respectively of the reflected beam of electromagnetic radiation; a first polarizer, positioned on the axis of the reflected beam of electromagnetic radiation between the sample and the first detector which causes the S and P components of the electromagnetic radiation along orthogonal directions to interfere with each other prior to detection by said first detector; a second polarizer, positioned on the axis of said reflected beam of electromagnetic radiation between the first polarizer and the sample, which causes the intensities of the S and P components of the radiation to be equal at a predetermined temperature; first and second beam between the first and second polarizers splitters, positioned on the axis of the reflected beam, which divert a portion of the reflected radiation toward said second and third detectors respectively; third and fourth polarizers, located off the axis of the reflected beam of electromagnetic radiation and in the path of said diverted portion of radiation from said first and second beam splitters respectively, such that only the S component of the diverted electromagnetic radiation will be received by said second detector and only the P component of said diverted electromagnetic radiation will be received by said third detector; circuitry which receives signals from said first, second, and third detectors and which determines the temperature of said sample.

Claim 6

A method for determining the temperature of a sample comprising the steps of: polarizing electromagnetic radiation from a laser source reflected off of the sample such that S and P orthogonal components of electromagnetic radiation from said laser source interfere with each other; polarizing the reflected radiation from said laser source such that the S and P components are generally equivalent at a predetermined temperature; measuring the intensity of the interfered radiation, on the axis of the reflected radiation; measuring the intensity of the S component of the polarized reflected radiation having generally equivalent S and P components at a predetermined temperature, off the axis of the reflected radiation; measuring the intensity of the P component of the polarized reflected radiation having generally equivalent S and P components at a predetermined temperature, off the axis of the reflected radiation; and determining the temperature from the three measured intensities.

Claim 7

A method for determining the temperature of a sample comprising the steps of: polarizing electromagnetic radiation from a laser source reflected off of the sample such that S and P orthogonal components of electromagnetic radiation from said laser source interfere with each other; polarizing the reflected radiation from said laser source such that the S and P components are generally equivalent at a predetermined temperature; measuring the intensity of the interfered radiation, on the axis of the reflected radiation; measuring the intensity of the S component of the polarized reflected radiation having generally equivalent S and P components at a predetermined temperature, off the axis of the reflected radiation; measuring the intensity of the P component of the polarized reflected radiation having generally equivalent S and P components at a predetermined temperature, off the axis of the reflected radiation; and determining the temperature from the three measured intensities.