Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
135 words
A method for producing an electro-optical device comprising the steps of: forming a plurality of channels on a major surface of a first substrate, the channels being substantially parallel to each other; forming a pair of first electrodes in each channel so as to provide a gas discharge space between the first electrodes of each pair; filling the channels with a filler material so as to flatten the major surface of the first substrate; depositing a dielectric layer on the flattened surface of the first substrate; removing the filler material from the channels; combining the first substrate with a second substrate, the second substrate having a plurality of second electrodes disposed substantially perpendicularly to the channels of the first substrate; and providing an electro-optical material layer interposed between the dielectric layer and the second substrate.
Claim 2
Independent Claim
135 words
A method for producing an electro-optical device comprising the steps of: forming a plurality of channels on a major surface of a first substrate, the channels being substantially parallel to each other; forming a pair of first electrodes in each channel so as to provide a gas discharge space between the first electrodes of each pair; filling the channels with a filler material so as to flatten the major surface of the first substrate; depositing a dielectric layer on the flattened surface of the first substrate; removing the filler material from the channels; combining the first substrate with a second substrate, the second substrate having a plurality of second electrodes disposed substantially perpendicularly to the channels of the first substrate; and providing an electro-optical material layer interposed between the dielectric layer and the second substrate.
Claim 3
Dependent Claim
15 words
A method according to claim 1; wherein said channels are formed in the first substrate.
Claim 4
Dependent Claim
19 words
A method according to claim 1; wherein said channels are defined by partition walls formed on the first substrate.
Claim 5
Independent Claim
97 words
A method for manufacturing discharge chambers comprising the steps of: forming a plurality of channels on a major surface of a substrate, the channels being substantially parallel to each other; forming a pair of first electrodes in each channel so as to provide a gas discharge between the first electrodes of each pair; filling the channels with a filler material so as to flatten the major surface of the substrate; depositing of a dielectric layer on the flattened surface of the substrate; removing the filler material from the channels; and filling the channels with an ionizable gas.
Claim 6
Independent Claim
97 words
A method for manufacturing discharge chambers comprising the steps of: forming a plurality of channels on a major surface of a substrate, the channels being substantially parallel to each other; forming a pair of first electrodes in each channel so as to provide a gas discharge between the first electrodes of each pair; filling the channels with a filler material so as to flatten the major surface of the substrate; depositing of a dielectric layer on the flattened surface of the substrate; removing the filler material from the channels; and filling the channels with an ionizable gas.
Claim 7
Dependent Claim
13 words
A method according to claim 4, wherein said material comprises a heat-resisting polymer.
Claim 8
Dependent Claim
24 words
The method according to claim 1, wherein said step of depositing a dielectric layer on said substrate includes a step of applying heat thereto.
Claim 9
Dependent Claim
22 words
The method according to claim 6, wherein said filler material is heat resistant and resists the heat applied to said dielectric layer.
Claim 10
Dependent Claim
15 words
The method according to claim 1, wherein said filler material is a heat-resisting high polymer.
Claim 11
Dependent Claim
14 words
The method according to claim 1, wherein said filler material comprises a plastic material.
Claim 12
Dependent Claim
22 words
The method according to claim 1, wherein said step of removing said filler material includes dissolving the filler material in the channels.
Claim 13
Independent Claim
137 words
A method of manufacturing an electro-optical device comprising the steps of: forming a plurality of channels on a major surface of a first substrate, each of the channels defining a gas-discharge path; forming a pair of first electrodes in each channel between which is formed a gas discharge space; filling the channels with a filler material so as to flatten the major surface of the first substrate; depositing a dielectric layer on the flattened surface of the first substrate; removing the filler material from the channels; and combining the first substrate with a second substrate, the second substrate having a plurality of second electrodes and an electro-optical material layer disposed between the dielectric layer and the second substrate, the channels and the second electrodes being arranged so that they are spaced-apart in vertical and horizontal directions, respectively.
Claim 14
Independent Claim
137 words
A method of manufacturing an electro-optical device comprising the steps of: forming a plurality of channels on a major surface of a first substrate, each of the channels defining a gas-discharge path; forming a pair of first electrodes in each channel between which is formed a gas discharge space; filling the channels with a filler material so as to flatten the major surface of the first substrate; depositing a dielectric layer on the flattened surface of the first substrate; removing the filler material from the channels; and combining the first substrate with a second substrate, the second substrate having a plurality of second electrodes and an electro-optical material layer disposed between the dielectric layer and the second substrate, the channels and the second electrodes being arranged so that they are spaced-apart in vertical and horizontal directions, respectively.
Claim 15
Dependent Claim
19 words
The method of claim 11, wherein each of said channels is separated by a wall of the first substrate.
Claim 16
Dependent Claim
21 words
The method of claim 11, wherein each of said channels is separated by a partition wall formed on the first substrate.
Claim 17
Dependent Claim
14 words
The method of claim 11, wherein said filler material is a heat-resisting high polymer.
Claim 18
Dependent Claim
22 words
The method of claim 11, wherein said step of removing said filler material includes dissolving the filler material filled in the channels.
Claim 19
Dependent Claim
20 words
The method of claim 11, wherein said step of depositing said dielectric layer includes a step of applying heat thereto.
Claim 20
Dependent Claim
23 words
The method of claim 16, wherein said filler material is a heat resistant material which resists the heat applied to the dielectric layer.