US5238469A
Expired / Lapsed
US
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Method and apparatus for removing residual hydrogen from a purified gas
Assignee: Entegris GP Inc
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Filing: 1992-04-02
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Granted: 1993-08-24
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Expires: 2012-04-02
Abstract
Abstract The invention relates generally to a gas purification system for the purification of noble gasses and nitrogen. An improved method of purification generally includes the following steps: (a) heating an impure gas; (b) contacting the impure gas with an impurity sorbing material to produce a purified gas; (c) cooling the purified gas to a temperature less than about 100° C.; and (d) contacting the purified gas with a hydrogen sorbing gas to remove residual hydrogen. The system includes an improved heat exchange apparatus for cooling the purified gas and a low temperature hydrogen sorption apparatus.
Inventors
- 👤 Jeffrey L. Briesacher
- 👤 Charles H. Applegarth
- 👤 D'Arcy H. Lorimer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 18:12
CPC Classifications
B; B01; B01D; B01D53/00; B01D53/02; B01D53/04; B01D53/0407; B01D2256/00; B01D2256/10; B01D2256/18; B01D2257/00; B01D2257/10; B01D2257/102; B01D2257/108; B01D2257/11; B01D2258/00; B01D2258/02; B01D2258/0216; B01D2259/00; B01D2259/40; B01D2259/402; B01D2259/41
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
74 words
A method for removing residual hydrogen from a purified gas comprising the steps of: (a) heating an impure gas; (b) contacting the heated impure gas with an impurity sorbing material to produce a purified gas having trace amounts of residual hydrogen; (c) cooling the purified gas to a temperature less than about 100° C.; and (d) contacting the cooled purified gas with a hydrogen sorbing material to at least partially remove said residual hydrogen.
Claim 2
Independent Claim
74 words
A method for removing residual hydrogen from a purified gas comprising the steps of: (a) heating an impure gas; (b) contacting the heated impure gas with an impurity sorbing material to produce a purified gas having trace amounts of residual hydrogen; (c) cooling the purified gas to a temperature less than about 100° C.; and (d) contacting the cooled purified gas with a hydrogen sorbing material to at least partially remove said residual hydrogen.
Claim 3
Dependent Claim
19 words
A method as recited in claim 1 wherein the impure gas is heated to more than about 200° C.
Claim 4
Dependent Claim
19 words
A method as recited in claim 2 wherein the purified gas is cooled to less than about 60° C.
Claim 5
Dependent Claim
19 words
A method as recited in claim 3 wherein the purified gas is cooled to less than about 40° C.
Claim 6
Dependent Claim
33 words
A method as recited in claim 1 wherein said impure gas includes at least a component which is selected from the group consisting essentially of nitrogen, helium, neon, argon, krypton, xenon, and radon.
Claim 7
Dependent Claim
29 words
A method as recited in claim 1 wherein said impurity sorbing material includes a non-evaporative getter material selected from the group consisting essentially of zirconium-vanadium-iron alloys and zirconium-iron alloys.
Claim 8
Dependent Claim
32 words
A method as recited in claim 1 wherein said hydrogen sorbing material includes a material selected from the group consisting essentially of zirconium, palladium, platinum, rhodium, ruthenium, nickel, titanium, and alloys thereof.
Claim 9
Dependent Claim
29 words
A method as recited in claim 7 wherein said hydrogen sorbing material includes a non-evaporative getter material selected from the group consisting essentially of zirconium-vanadium-iron alloys and zirconium-iron alloys.
Claim 10
Dependent Claim
41 words
A method as recited in claim 1 wherein said step of cooling said purified gas comprises flowing said purified gas through at least one conduit, wherein said conduit has a substantially constant wall temperature which is less than about 100° C.
Claim 11
Dependent Claim
115 words
A gas purification system comprising: (a) gas inlet means for impure gas; (b) heating means coupled to said gas inlet means for heating said impure gas to a temperature greater than about 200° C.; (c) purifier means coupled to said heating means, said purifier means including a getter material capable of removing impurities from said impure gas to produce a purified gas; (d) cooling means coupled to said purifier means for cooling said purified gas to a temperature less than about 100° C.; (e) hydrogen sorbing means coupled to said cooling means which includes a hydrogen sorbing material to remove residual hydrogen from said purified gas; and (f) a gas outlet for said purified gas.
Claim 12
Dependent Claim
115 words
A gas purification system comprising: (a) gas inlet means for impure gas; (b) heating means coupled to said gas inlet means for heating said impure gas to a temperature greater than about 200° C.; (c) purifier means coupled to said heating means, said purifier means including a getter material capable of removing impurities from said impure gas to produce a purified gas; (d) cooling means coupled to said purifier means for cooling said purified gas to a temperature less than about 100° C.; (e) hydrogen sorbing means coupled to said cooling means which includes a hydrogen sorbing material to remove residual hydrogen from said purified gas; and (f) a gas outlet for said purified gas.
Claim 13
Dependent Claim
39 words
A gas purification system as recited in claim 10 wherein said impure gas is heated to about 300°-450° C. by said heating means and said purified gas is cooled to less than about 60° C. by said cooling means.
Claim 14
Dependent Claim
30 words
A gas purification system as recited in claim 10 wherein said getter material comprises a non-evaporative getter alloy selected from the group consisting essentially of zirconium-vanadium-iron alloys and zirconium-iron alloys.
Claim 15
Dependent Claim
32 words
A gas purification system as recited in claim 10 wherein said hydrogen sorbing material is selected from the group consisting essentially of zirconium, palladium, platinum, rhodium, ruthenium, nickel, titanium, and alloys thereof.
Claim 16
Dependent Claim
31 words
A gas purification system as recited in claim 10 wherein said hydrogen sorbing material comprises a non-evaporative getter alloy selected from the group consisting essentially of zirconium-vanadium-iron alloys and zirconium-iron alloys.
Claim 17
Dependent Claim
92 words
A gas purification system as recited in claim 10 wherein said cooling means comprises: (a) a first manifold, including a first plurality of integral connector nipples; (b) a second manifold, including a second plurality of integral connector nipples aligned with said connector nipples of said first manifold; (c) a plurality of straight tubes, each tube extending between a first connector nipple on said first manifold and a second connector nipple on said second manifold, each of said straight tubes being welded in place at the first manifold and at the second manifold.
Claim 18
Dependent Claim
39 words
A gas purification system as recited in claim 15 wherein said cooling means further comprises heat sink means contacting said plurality of straight tubes to maintain the temperature of said tubes at a substantially constant temperature along their lengths.
Claim 19
Dependent Claim
42 words
A gas purification system as recited in claim 16 wherein said heat sink means comprises a first plate contacting said plurality of tubes on a first side thereof and a second plate contacting said plurality of tubes on a second side thereof.
Claim 20
Dependent Claim
21 words
A gas purification system as recited in claim 16 further comprising means for removing heat energy from said heat sink means.
Claim 21
Dependent Claim
143 words
A heat exchange apparatus comprising: (a) a first monoblock manifold formed from a single piece of material and including a first plurality of integral connector nipples such that interior surfaces of said first plurality of connector nipples do not include a joint between a plurality of pieces; (b) a second monoblock manifold formed from a single piece of material and including a second plurality of integral connector nipples aligned with said connector nipples of said first manifold such that interior surfaces of said second plurality of connector nipples do not include a joint between a plurality of pieces; (c) a plurality of straight tubes, each tube extending between a first connector nipple on said first manifold and a second connector nipple on said second manifold, each of said straight tubes being welded in place at the first manifold and at the second manifold.
Claim 22
Dependent Claim
143 words
A heat exchange apparatus comprising: (a) a first monoblock manifold formed from a single piece of material and including a first plurality of integral connector nipples such that interior surfaces of said first plurality of connector nipples do not include a joint between a plurality of pieces; (b) a second monoblock manifold formed from a single piece of material and including a second plurality of integral connector nipples aligned with said connector nipples of said first manifold such that interior surfaces of said second plurality of connector nipples do not include a joint between a plurality of pieces; (c) a plurality of straight tubes, each tube extending between a first connector nipple on said first manifold and a second connector nipple on said second manifold, each of said straight tubes being welded in place at the first manifold and at the second manifold.
Claim 23
Dependent Claim
35 words
A heat exchange apparatus as recited in claim 19 further comprising heat sink means contacting said plurality of straight tubes to maintain the temperature of said tubes at a substantially constant temperature along their lengths.
Claim 24
Dependent Claim
42 words
A gas purification system as recited in claim 20 wherein said heat sink means comprises a first plate contacting said plurality of tubes on a first side thereof and a second plate contacting said plurality of tubes on a second side thereof.
Claim 25
Dependent Claim
27 words
A gas purification system as recited in claim 21 further comprising means for removing heat energy at least one of said first plate and said second plate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-08-23 | 1997-02-22 | 1997-08-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-08-23 | 2001-02-22 | 2001-08-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-08-23 | 2005-02-22 | 2005-08-24 | $7700.00 | Window Closed / Lapsed |