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US5235140A Expired / Lapsed US ⏱️ 0.0 years remaining

Electrode bump for flip chip die attachment

Assignee: Eastman Kodak Co
•
Filing: 1992-05-21
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Granted: 1993-08-10
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Expires: 2012-05-21
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Abstract

Abstract A large electrode bump is generated on a substrate such as a circuit board. A small electrode bump is then formed on the large bump. Preferably a barrier layer is deposited over the large bump prior to formation of the small bump. In this case the small bump is formed on the barrier layer over the large bump. In one embodiment, the small bump is formed by applying a sacrificial layer on the large bump. A window is created in the sacrificial layer. A spring may optionally be inserted in the window. The window is then filled with a conductive material. Finally, the sacrificial layer is removed to reveal the small bump. In another embodiment, a small bump is formed on a semiconductor die and a larger bump is formed on a substrate. The semiconductor die is mounted on the substrate such that the bump on the die contacts the larger bump.

Inventors

  • 👤 Samuel Reele
  • 👤 Thomas R. Pian

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 20:24
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/40; H05K3/4007; H10; H10W; H10W70/00; H10W70/099; H10W90/00; H10W90/701; H05K1/00; H05K1/02; H05K1/09; H05K1/092; H05K1/095; H05K2201/00; H05K2201/03; H05K2201/0332; H05K2201/0335; H05K2201/035; H05K2201/0364; H05K2201/0367; H05K2201/09; H05K2201/09818; H05K2201/09845; H05K2203/00; H05K2203/14; H05K2203/1476; H10W72/00; H10W72/071; H10W72/072; H10W72/07211

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 89 words
A composite conductive electrode bump comprising the combination of: a larger electrically conductive bump located on a substrate; a smaller electrically conductive bump located on said larger bump, said smaller bump having a width which is significantly smaller than the width of said larger bump; and means, including an electrode spring that extends externally from said smaller bump, for providing a mechanical scrubbing action to remove oxides from a die bond pad contacted by said electrode spring, the majority of said electrode spring being imbedded in said smaller bump.
Claim 2
Dependent Claim 89 words
A composite conductive electrode bump comprising the combination of: a larger electrically conductive bump located on a substrate; a smaller electrically conductive bump located on said larger bump, said smaller bump having a width which is significantly smaller than the width of said larger bump; and means, including an electrode spring that extends externally from said smaller bump, for providing a mechanical scrubbing action to remove oxides from a die bond pad contacted by said electrode spring, the majority of said electrode spring being imbedded in said smaller bump.
Claim 3
Dependent Claim 37 words
The electrode bump as defined in claim 1 further comprising an electrically conductive barrier layer, said barrier layer being located on said large bump, said small bump being located on said barrier layer over said large bump.
Claim 4
Dependent Claim 16 words
The electrode bump as defined in claim 1 wherein said large bump is made of gold.
Claim 5
Dependent Claim 20 words
The electrode bump as defined in claim 1 wherein said larger bump has a width of between about 25-50 microns.
Claim 6
Dependent Claim 19 words
The electrode bump as defined in claim 1 wherein said larger bump has a height of about 10 microns.
Claim 7
Dependent Claim 33 words
The electrode bump as defined in claim 2 wherein said barrier layer is made of a material selected from the group consisting of platinum, palladium, nickel, tungsten, titanium and alloys of these materials.
Claim 8
Dependent Claim 18 words
The electrode bump as defined in claim 1 wherein said smaller bump is about 10 microns in height.
Claim 9
Dependent Claim 20 words
The electrode bump as defined in claim 1 wherein said smaller bump has a width of between about 10-20 microns.
Claim 10
Dependent Claim 19 words
The electrode bump as defined in claim 1 wherein said smaller bump has an aspect ratio of about 1:1.
Claim 11
Dependent Claim 23 words
The electrode bump as defined in claim 1 wherein said smaller bump is made of a material including an amalgam or conductive epoxy.
Claim 12
Dependent Claim 19 words
The electrode bump as defined in claim 10 wherein said smaller bump is made of a material including gold.

References Cited (Backward Citations)

US3119172A Cited
US4426773A Cited
US4970571A Cited
US4899174A Cited
US5027188A Cited
US4980034A Cited
US4991000A Cited
US5029529A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-08-09 1997-02-08 1997-08-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-08-09 2001-02-08 2001-08-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-08-09 2005-02-08 2005-08-10 $7700.00 Window Closed / Lapsed

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