US5234789A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polylactide compounds as sensitivity enhancers for radiation sensitive mixtures containing o-quinonediazide photoactive compounds
Assignee: OCG Microelectronic Materials Inc
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Filing: 1992-03-19
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Granted: 1993-08-10
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Expires: 2012-03-19
Abstract
Abstract A radiation-sensitive composition comprising an admixture in a solvent of: at least one alkali-soluble binder resin, at least one photoactive compound and an effective sensitivity enhancing amount of at least one polylactide compound; the amount of said binder resin being about 60 to 95% by weight, the amount of said photoactive component being about 5% to about 40% by weight, based on the total solids content of said radiation-sensitive composition.
Inventors
- 👤 James G. Favier, Jr.
- 👤 Lawrence Ferreira
- 👤 John A. McFarland, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 09:16
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/0045; G03F7/0048; G03F7/022; G03F7/023; G03F7/0233
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
70 words
A radiation-sensitive composition comprising an admixture in a solvent of: at least one alkali-soluble binder resin, at least o-quinonediazide photoactive compound and an effective sensitivity enhancing amount of at least one polylactide compound; the amount of said binder resin being about 60 to 95% by weight, the amount of said photoactive compound being about 5% to about 40% by weight, based on the total solids content of said radiation-sensitive composition.
Claim 2
Dependent Claim
70 words
A radiation-sensitive composition comprising an admixture in a solvent of: at least one alkali-soluble binder resin, at least o-quinonediazide photoactive compound and an effective sensitivity enhancing amount of at least one polylactide compound; the amount of said binder resin being about 60 to 95% by weight, the amount of said photoactive compound being about 5% to about 40% by weight, based on the total solids content of said radiation-sensitive composition.
Claim 3
Dependent Claim
15 words
The composition of claim 1 wherein said binder resin is an alkali-soluble phenolic novolak resin.
Claim 4
Dependent Claim
67 words
The composition of claim 1 wherein said o-quinonediazide compound or compounds are present in the amount of about 10% to about 25% by weight, said binder resin is present in the amount of about 75% to about 90% by weight and said polylactide compound is present in the amount of 0.5% to about 10% by weight, all based on the total solids content of said radiation-sensitive composition.
Claim 5
Dependent Claim
33 words
The composition of claim 1 wherein said polylactide compound is present in the amount of from about 2% to about 5% by weight, based on the total solids content of said radiation-sensitive composition.
Claim 6
Dependent Claim
29 words
The composition of claim 1 further comprising at least one substance selected from the group consisting of solvents, actinic and visual contrast dyes, plasticizers, anti-striation agents, and speed enhancers.
Claim 7
Dependent Claim
78 words
A coated substrate comprising a substrate coated with a film of a radiation-sensitive composition comprising an admixture of at least one alkali-soluble binder resin, at least one o-quinonediazide photoactive compound and an effective sensitivity enhancing amount of at least one polylactide compound; the amount of said binder resin being about 60 to 95% by weight, the amount of photo-active compound being about 5% to about 40% by weight, based on the total solids content of said radiation-sensitive composition.
Claim 8
Dependent Claim
78 words
A coated substrate comprising a substrate coated with a film of a radiation-sensitive composition comprising an admixture of at least one alkali-soluble binder resin, at least one o-quinonediazide photoactive compound and an effective sensitivity enhancing amount of at least one polylactide compound; the amount of said binder resin being about 60 to 95% by weight, the amount of photo-active compound being about 5% to about 40% by weight, based on the total solids content of said radiation-sensitive composition.
Claim 9
Dependent Claim
58 words
The coated substrate of claim 6 wherein said substrate comprises one or more compounds selected from the group consisting of silicon, doped silicon, aluminum, polymeric resins, silicon dioxide, doped silicon dioxide, silicon resins, gallium arsenide, aluminum gallium arsenide, titanium, tantalum, molybdenum tungsten, titanium silicides, tantalum silicides, molybdenum silicides, tungsten silicides, silicon nitride, copper, polysilicon ceramics, and aluminum/copper mixtures.
Claim 10
Dependent Claim
13 words
The coated substrate of claim 7 wherein said substrate is a silicon wafer.
Claim 11
Dependent Claim
13 words
The coated substrate of claim 7 wherein said substrate is a aluminum wafer.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1996-08-09 | 1997-02-08 | 1997-08-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-08-09 | 2001-02-08 | 2001-08-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-08-09 | 2005-02-08 | 2005-08-10 | $7700.00 | Window Closed / Lapsed |