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US5234556A Expired / Lapsed US ⏱️ 0.0 years remaining

Polymeric metal oxide materials and their formation and use

Assignee: Ambri Ltd
•
Filing: 1990-08-20
•
Granted: 1993-08-10
•
Expires: 2010-08-20
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Abstract

Abstract A method of treating a metal alkoxide solution to form metal oxide prepolymer molecules therein is characterized by irradiating the solution with light energy having a wavelength selected to break the metal-alkoxy group bond in said metal alkoxide, thereby to form the metal oxide prepolymer molecules in the solution. The prepolymer is converted into polymeric metal oxide gel. The stoichiometry of the oxide is high. A gel of carbon content below 4 atomic % can be achieved by the step of decarbonizing the gel, preferably using light to produce ozone.

Inventors

  • 👤 Tomoji Oishi
  • 👤 Ken Takahashi
  • 👤 Tetsuo Nakazawa
  • 👤 Shigeru Tanaka
  • 👤 Tadahiko Miyoshi

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 14:56
CPC Classifications
B; B01; B01J; B01J13/00; B01J13/0052; C; C01; C01B; C01B13/00; C01B13/10; C01B13/14; C01B13/32; C03; C03C; C03C17/00; C03C17/22; C03C17/23; C03C17/25; C03C25/00; C03C25/10; C03C25/104; C03C25/106; C03C25/1061; C07; C07F; C07F19/00; C07F19/005; H; H01; H01G; H01G2/00; H01G2/12; H01G4/00; H01G4/002; H01G4/018; H01G4/06; H01G4/08; H01G4/10; H05; H05B; H05B33/00; H05B33/10; H05B33/12; H05B33/22; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H10; H10P; H10P14/00; H10P14/40; H10P14/60; H10P14/65; H10P14/6516; H10P14/6536; H10P14/66; H10P14/668; H10P14/69; H10P14/692; H10P14/6938; H10P14/6939; H10P14/69393; H10P95/00; H10P95/08; H10W; H10W74/00; H10W74/10; H10W74/111; H10W74/121; H10W74/40; H10W74/47; C03C2217/00; C03C2217/20; C03C2217/21; C03C2217/28; C03C2217/282; C03C2218/00; C03C2218/10; C03C2218/11; C03C2218/113; C09; C09K; C09K2323/00; C09K2323/05; C09K2323/051; C09K2323/06; F; F02; F02B; F02B75/00; F02B75/02; F02B2075/022; F02B2075/027; H10P14/63; H10P14/6326; H10P14/6342; H10P14/665; H10W72/00; H10W72/50; H10W72/551; H10W72/552; H10W72/5522; H10W72/5524; H10W72/851; H10W72/874; H10W72/884; H10W90/00; H10W90/701; H10W90/721; H10W90/722; H10W90/724; H10W90/731; H10W90/736; H10W90/751; H10W90/756; Y; Y10; Y10S; Y10S428/00; Y10S428/917; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917; Y10T428/24926; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265; Y10T428/266; Y10T428/29; Y10T428/2913; Y10T428/2933; Y10T428/294; Y10T428/2942; Y10T428/2949; Y10T428/31504

Claims Analysis

Total Claims: 35
Claim 1
Independent Claim 42 words
A method of treating a metal alkoxide solution, comprising the step of irradiating said solution with light energy having a wavelength selected to break the metal-alkoxy group bond in said metal alkoxide, thereby to form metal oxide prepolymer molecules in the solution.
Claim 2
Independent Claim 42 words
A method of treating a metal alkoxide solution, comprising the step of irradiating said solution with light energy having a wavelength selected to break the metal-alkoxy group bond in said metal alkoxide, thereby to form metal oxide prepolymer molecules in the solution.
Claim 3
Dependent Claim 24 words
A method according to claim 1 including the further step, subsequent to said irradiating step, of converting the prepolymer into polymeric metal oxide gel.
Claim 4
Dependent Claim 14 words
A method according to claim 2, further including the step of decarbonizing said gel.
Claim 5
Independent Claim 53 words
A method of forming a polymeric metal oxide gel, comprising the steps of (i) forming a metal oxide prepolymer in solution, by irradiating a metal alkoxide solution with light energy having a wavelength selected to break the metal-alkoxy group bond in said metal alkoxide, (ii) converting said prepolymer to polymeric metal oxide gel.
Claim 6
Independent Claim 53 words
A method of forming a polymeric metal oxide gel, comprising the steps of (i) forming a metal oxide prepolymer in solution, by irradiating a metal alkoxide solution with light energy having a wavelength selected to break the metal-alkoxy group bond in said metal alkoxide, (ii) converting said prepolymer to polymeric metal oxide gel.
Claim 7
Dependent Claim 56 words
A method according to claim 4 wherein said step (ii) comprises as least one of (a) after or simultaneously with step (i), irradiating with said light energy so as to form said gel, (b) heating the prepolymer solution to form said gel, (c) removing solvent from the prepolymer solution sufficiently to cause formation of said gel.
Claim 8
Dependent Claim 15 words
A method according to claim 4 comprising the further step (iii) of decarbonizing said gel.
Claim 9
Dependent Claim 27 words
A method according to claim 6 wherein said decarbonizing step (iii) comprises irradiating said gel with light energy, in the presence of a substance producing oxygen radicals.
Claim 10
Dependent Claim 15 words
A method according to claim 7 where said substance producing oxygen radicals is molecular oxygen.
Claim 11
Dependent Claim 23 words
A method according to claim 6 wherein said decarbonizing step (iii) comprises irradiating said gel with light energy to cause production of ozone.
Claim 12
Dependent Claim 19 words
A method according to claim 6 wherein said steps (i), (ii) and (iii) are all performed below 300° C.
Claim 13
Dependent Claim 15 words
A method according to claim 4 wherein said gel is formed as a thin film.
Claim 14
Dependent Claim 19 words
A method according to claim 11 wherein said thin film has a thickness in the range of 1-1000 nm.
Claim 15
Dependent Claim 30 words
A method according to claim 11, comprising repeating at least said steps (ii) and (iii) in that order, so as to produce said thin film as a plurality of layers.
Claim 16
Dependent Claim 26 words
A method according to claim 4, wherein the concentration of said metal alkoxide in said solution in said step (i) is in the range 0.0025-2.5 mol/l.
Claim 17
Independent Claim 45 words
A method of forming a polymeric metal oxide gel comprising the step (i) of irradiating a metal alkoxide solution with light energy having a wavelength adapted to break the metal-alkoxy group bond in said metal alkoxide, so as to achieve formation of polymeric metal oxide.
Claim 18
Independent Claim 45 words
A method of forming a polymeric metal oxide gel comprising the step (i) of irradiating a metal alkoxide solution with light energy having a wavelength adapted to break the metal-alkoxy group bond in said metal alkoxide, so as to achieve formation of polymeric metal oxide.
Claim 19
Dependent Claim 23 words
A method according to claim 15 including the further step (ii), subsequent to said irradiating step (i), of decarbonizing said polymeric metal oxide.
Claim 20
Dependent Claim 29 words
A method according to claim 16 wherein said decarbonizing step (ii) comprises irradiating said polymeric metal oxide with light energy, in the presence of a substance producing oxygen radicals.
Claim 21
Dependent Claim 15 words
A method according to claim 17 where said substance producing oxygen radicals is molecular oxygen.
Claim 22
Dependent Claim 25 words
A method according to claim 16 wherein said decarbonizing step (ii) comprises irradiating said polymeric metal oxide with light energy to cause production of ozone.
Claim 23
Dependent Claim 18 words
A method according to claim 16 wherein said steps (i) and (ii) both are performed below 300° C.
Claim 24
Dependent Claim 26 words
A method according to claim 15, wherein the concentration of said metal alkoxide in said solution in said step (i) is in the range 0.0025-2.5 mol/l.
Claim 25
Independent Claim 72 words
A method of forming a thin film of polymeric metal oxide gel on a substrate comprising (i) forming a metal oxide prepolymer in solution by irradiating a metal alkoxide solution with light energy having a wavelength adapted to break the metal-alkoxy group bond in said metal alkoxide, (ii) before or after said step (i), applying said solution to a substrate (iii) converting said prepolymer to polymeric metal oxide gel on said substrate.
Claim 26
Independent Claim 72 words
A method of forming a thin film of polymeric metal oxide gel on a substrate comprising (i) forming a metal oxide prepolymer in solution by irradiating a metal alkoxide solution with light energy having a wavelength adapted to break the metal-alkoxy group bond in said metal alkoxide, (ii) before or after said step (i), applying said solution to a substrate (iii) converting said prepolymer to polymeric metal oxide gel on said substrate.
Claim 27
Dependent Claim 29 words
Method according to claim 22 further including the step (iv) of decarbonizing said gel by irradiating it with light energy in the presence of a substance producing oxygen radicals.
Claim 28
Dependent Claim 17 words
A method according to claim 22 wherein said film has a thickness in the range 1-1000 nm.
Claim 29
Dependent Claim 35 words
A method according to claim 23, comprising after said step (i) repeating at least said steps (ii), (iii) and (iv) in that order, so as to produce said thin film as a plurality of layers.
Claim 30
Independent Claim 66 words
A method of reducing the carbon content in a polymeric metal oxide gel, comprising the steps of (i) irradiating a metal alkoxide solution with light energy having a wavelength adapted to break the metal alkoxy group bond in said metal alkoxide, so as to form a metal oxide prepolymer in said solution, (ii) forming said metal oxide gel from said solution, and (ii) decarbonizing said gel.
Claim 31
Independent Claim 66 words
A method of reducing the carbon content in a polymeric metal oxide gel, comprising the steps of (i) irradiating a metal alkoxide solution with light energy having a wavelength adapted to break the metal alkoxy group bond in said metal alkoxide, so as to form a metal oxide prepolymer in said solution, (ii) forming said metal oxide gel from said solution, and (ii) decarbonizing said gel.
Claim 32
Dependent Claim 80 words
In a method of forming a thin film capacitor on a substrate, said thin film capacitor comprising a polymeric metal oxide film, the improvement of forming said polymeric metal oxide film by a process comprising the steps of irradiating a metal alkoxide solution with light energy having a wavelength adapted to break the metal-alkoxy group bond in said metal alkoxide, so as to form metal oxide prepolymer in said solution, and converting said prepolymer to said polymeric metal oxide film.
Claim 33
Dependent Claim 80 words
In a method of forming a thin film capacitor on a substrate, said thin film capacitor comprising a polymeric metal oxide film, the improvement of forming said polymeric metal oxide film by a process comprising the steps of irradiating a metal alkoxide solution with light energy having a wavelength adapted to break the metal-alkoxy group bond in said metal alkoxide, so as to form metal oxide prepolymer in said solution, and converting said prepolymer to said polymeric metal oxide film.
Claim 34
Dependent Claim 76 words
In a method of making a metal member having a polymeric metal oxide film on a surface thereof, the improvement of forming said polymeric metal oxide film by a process comprising the steps of irradiating a metal alkoxide solution with light energy having a wavelength adapted to break the metal-alkoxy group bond in said metal alkoxide, so as to form metal oxide prepolymer in said solution, and converting said prepolymer to said polymeric metal oxide film.
Claim 35
Dependent Claim 76 words
In a method of making a metal member having a polymeric metal oxide film on a surface thereof, the improvement of forming said polymeric metal oxide film by a process comprising the steps of irradiating a metal alkoxide solution with light energy having a wavelength adapted to break the metal-alkoxy group bond in said metal alkoxide, so as to form metal oxide prepolymer in said solution, and converting said prepolymer to said polymeric metal oxide film.

References Cited (Backward Citations)

JPS61190074A Cited
US5057335A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-08-09 1997-02-08 1997-08-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-08-09 2001-02-08 2001-08-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-08-09 2005-02-08 2005-08-10 $7700.00 Window Closed / Lapsed

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