Slab or stripline gas laser

Claim 2

A stripline laser having two resonator mirrors, two electrodes that lie opposite one another and two waveguide surfaces that proceed parallel to the two electrodes, the two waveguide surfaced defining a plasma space containing a laser beam, comprising: a first electrode of the two electrodes being connected to the mirrors in a fixed angular position; and a second electrode of the two electrodes connected to and mechanically fixed relative to the first electrode and positioned such that the second electrode does not contact the mirrors, the second electrode being opposite the first electrode at a fixed distance.

Claim 3

The laser according to claim 1, wherein the mirrors are composed of metal, and wherein a spacing adequate for electrical insulation is present between the mirrors and the second electrode.

Claim 4

The laser according to claim 2, wherein the mirrors are composed of copper.

Claim 5

The laser according to claim 1, wherein the first electrode is at least partially composed of a material having an extremely low coefficient of thermal expansion.

Claim 6

The laser according to claim 4, wherein a first mirror of the two resonator mirrors is rigidly mounted on the first electrode; wherein a second mirror of the two resonator mirrors is movable in a beam direction of the laser beam relative to the first electrode, the first electrode having means for said moving of the second mirror; and wherein the movable, second mirror is held at a constant spacing from the first mirror by at least one spacer having an extremely low coefficient of thermal expansion.

Claim 7

The laser according to claim 5, wherein the at least one spacer is guided in a bore of the first electrode.

Claim 8

The laser according to claim 4, wherein the first electrode is composed of two plates adjoining one another in a beam direction of the laser beam; wherein the two plates are movable relative to one another only in the beam direction; and wherein a mutual spacing of the two plates is defined by at least one spacer having an extremely low coefficient of thermal expansion that keeps the mutual spacing of the mirrors constant.

Claim 9

The laser according to claim 7, wherein the two plates are joined to one another by elements that are resilient in the beam direction.

Claim 10

The laser according to claim 7, wherein rods, bands or wire proceeding parallel to the plates in the beam direction are provided as spacers.

Claim 11

The laser according to claim 7, wherein the laser further comprises means for protecting the at least one spacer against corrosion caused by laser gas produced by the laser beam.

Claim 12

The laser according to claim 10, wherein the at least one spacer is composed of carbon fibers; and wherein the means for protecting the as least one spacer is a layer of An, Au or plasma-sprayed Al 2 O 3 that is applied onto the at least one spacer for protection against corrosion.

Claim 13

The laser according to claim 7, wherein the laser further comprises at least two cavities, the at least one spacer being guided in the two cavities; wherein the two cavities are in the two plates, respectively, of the first electrode that are movable relative to one another; and wherein the two cavities are connected to one another by a bellows and are terminated gas-tight relative to the plasma space defined by the two waveguide surfaces.

Claim 14

The laser according to claim 12, wherein the two cavities are formed by tubes that proceed in the beam direction and are arranged laterally adjoining the two plates.

Claim 15

The laser according to claim 7, wherein the at least one spacer is guided in a bore of the first electrode.

Claim 16

A stripline laser having two resonator mirrors, two electrodes that lie opposite one another and two waveguide surfaces that proceed parallel to the two electrodes, the two waveguide surfaces defining a plasma space containing a laser beam, comprising a first electrode of the two electrodes being connected to the mirrors in a fixed angular position, the first electrode at least partially composed of a material having an extremely low coefficient of thermal expansion; and a second electrode of the two electrodes connected to and mechanically fixed relative to the first electrode and positioned such that the second electrode does not contact the mirrors; a first mirror of the two resonator mirrors rigidly mounted on the first electrode and a second mirror of the two resonator mirrors movable in a beam direction of the laser beam relative to the first electrode and the movable, second mirror held at a constant spacing from the first mirror by at least one spacer having an extremely low coefficient of thermal expansion, the first electrode having means for said moving of the second mirror.

Claim 17

A stripline laser having two resonator mirrors, two electrodes that lie opposite one another and two waveguide surfaces that proceed parallel to the two electrodes, the two waveguide surfaces defining a plasma space containing a laser beam, comprising a first electrode of the two electrodes being connected to the mirrors in a fixed angular position, the first electrode at least partially composed of a material having an extremely low coefficient of thermal expansion; and a second electrode of the two electrodes connected to and mechanically fixed relative to the first electrode and positioned such that the second electrode does not contact the mirrors; a first mirror of the two resonator mirrors rigidly mounted on the first electrode and a second mirror of the two resonator mirrors movable in a beam direction of the laser beam relative to the first electrode and the movable, second mirror held at a constant spacing from the first mirror by at least one spacer having an extremely low coefficient of thermal expansion, the first electrode having means for said moving of the second mirror.

Claim 18

The laser according to claim 15, wherein the at least one spacer is guided in a bore of the first electrode.

Claim 19

A stripline laser having two resonator mirrors, two electrodes that lie opposite one another and two waveguide surfaces that proceed parallel to the two electrodes, the two waveguide surfaces defining a plasma space containing a laser beam, comprising: a first electrode of the two electrodes being connected to the mirrors in a fixed angular position, the first electrode at least partially composed of a material having an extremely low coefficient of thermal expansion; and a second electrode of the two electrodes connected to and mechanically fixed relative to the first electrode and positioned such that the second electrode does not contact the mirrors; the first electrode composed of two plates adjoining one another in a beam direction of the laser beam, the two plates being movable relative to one another only in the beam direction; and a mutual spacing of the two plates defined by at least one spacer having an extremely low coefficient of thermal expansion that keeps the mutual spacing of the mirrors constant.

Claim 20

A stripline laser having two resonator mirrors, two electrodes that lie opposite one another and two waveguide surfaces that proceed parallel to the two electrodes, the two waveguide surfaces defining a plasma space containing a laser beam, comprising: a first electrode of the two electrodes being connected to the mirrors in a fixed angular position, the first electrode at least partially composed of a material having an extremely low coefficient of thermal expansion; and a second electrode of the two electrodes connected to and mechanically fixed relative to the first electrode and positioned such that the second electrode does not contact the mirrors; the first electrode composed of two plates adjoining one another in a beam direction of the laser beam, the two plates being movable relative to one another only in the beam direction; and a mutual spacing of the two plates defined by at least one spacer having an extremely low coefficient of thermal expansion that keeps the mutual spacing of the mirrors constant.

Claim 21

The laser according to claim 17, wherein the two plates are joined to one another by elements that are resilient in the beam direction.

Claim 22

The laser according to claim 17, wherein the laser further comprises at least two cavities, the at least one spacer being guided in the two cavities; wherein the two cavities are in the two plates, respectively, of the first electrode that are movable relative to one another; and wherein the two cavities are connected to one another by a bellows and are terminated gas-tight relative to the plasma space defined by the two waveguide surfaces.

Claim 23

The laser according to claim 19, wherein the two cavities are formed by tubes that proceed in the beam direction and are arranged laterally adjoining the two plates.