US5231259A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Radiation manufacturing apparatus
Assignee: LEMELSON MEDICAL EDUCATION & RESEARCH FOUNDATION
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Filing: 1992-08-14
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Granted: 1993-07-27
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Expires: 2012-08-14
Abstract
Abstract An apparatus and method for reacting on articles of manufacture with radiation such as generated by an electron gun, laser or other means directed against a substrate wherein controlled movement of the substrate and/or the radiation is effected under the control of a computer. Controlled operation of the radiation and its movement against the substrate or the movement of the substrate during processing is effected by operating an automatic computer or master controller. An automatic article manipulator is also controlled in its operation to move the substrate prior to and after operation thereon with such radiation. A single computer or master controller may be employed to control the operation of the manipulator for removing the substrate from the vicinity of the radiation and replacing it with a new article to be operated on during the next cycle of operation of the radiation generating means.
Inventors
- 👤 Jerome H. Lemelson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 07:24
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/46; H05K3/4644; H05K3/467; B; B01; B01J; B01J3/00; B01J3/06; B01J3/08; B21; B21C; B21C23/00; B21C23/02; B21C23/04; B21C23/08; B21C23/085; B21C25/00; B21C25/08; B21D; B21D26/00; B21D26/02; B21D26/06; B22; B22D; B22D31/00; B22F; B22F3/00; B22F3/20; B24; B24B; B24B31/00; B30; B30B; B30B11/00; B30B11/22; B30B11/26; C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/487; H01; H01C; H01C1/00; H01C1/16; H01C7/00; H01C7/20; H03; H03K; H03K17/00; H03K17/51; H03K17/80; H05K1/00; H05K1/16; H05K1/167; H05K3/02; H10; H10D; H10D84/00; H10D84/01; B01J2203/00; B01J2203/06; B01J2203/0605; B01J2203/061; B01J2203/065; B01J2203/0655; B29; B29C; B29C48/00; B29C48/03; B29C48/06; B29C48/09; H05K1/162; H05K2203/00; H05K2203/03; H05K2203/0315; H05K2203/11; H05K2203/1142; H05K2203/17; H05K2203/175
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
156 words
An apparatus for processing a substrate comprising, in combination: (a) a reaction chamber; (b) first means for generating radiation in said reaction chamber; (c) second means for supporting work to be processed, including said substrate, within said reaction chamber to be operated on with radiation generated by said first means; (d) third means for moving said second means with respect to said radiation generating first means; (e) fourth means including an automatic manipulator for moving work to and from said second means; and (f) master control means for controlling the operation of said first, third, and fourth means to: i) cause said fourth means to place work to be processed on said second means, ii) operate said first means to cause radiation generated thereby to intersect and process said work supported by said second means, and iii) cause said fourth means to automatically remove said processed work from said second means and from said reaction chamber.
Claim 2
Independent Claim
156 words
An apparatus for processing a substrate comprising, in combination: (a) a reaction chamber; (b) first means for generating radiation in said reaction chamber; (c) second means for supporting work to be processed, including said substrate, within said reaction chamber to be operated on with radiation generated by said first means; (d) third means for moving said second means with respect to said radiation generating first means; (e) fourth means including an automatic manipulator for moving work to and from said second means; and (f) master control means for controlling the operation of said first, third, and fourth means to: i) cause said fourth means to place work to be processed on said second means, ii) operate said first means to cause radiation generated thereby to intersect and process said work supported by said second means, and iii) cause said fourth means to automatically remove said processed work from said second means and from said reaction chamber.
Claim 3
Dependent Claim
24 words
An apparatus in accordance with claim 1 wherein said automatic manipulator is operable to carry work into and remove work from said reaction chamber.
Claim 4
Dependent Claim
18 words
An apparatus in accordance with claim 2 wherein said automatic manipulator is supported outside of said reaction chamber.
Claim 5
Dependent Claim
65 words
An apparatus in accordance with claim 1 wherein said reaction chamber includes: (a) a door secured to and operable to cover an opening formed in said chamber; and (b) motor means controlled by said master control means for opening said door to permit said manipulator to move work into and out of said chamber and to close said door to seal work within said chamber.
Claim 6
Dependent Claim
69 words
An apparatus in accordance with claim 1 wherein said third means includes means for moving said work supporting second means in a plurality of directions, and wherein said master control means includes means for controlling said third means to move said second means in a plurality of directions within said reaction chamber to allow radiation generated by said first means to variably intersect work supported by said second means.
Claim 7
Dependent Claim
19 words
An apparatus in accordance with claim 5 wherein said first means is operable to generate a beam of radiation.
Claim 8
Dependent Claim
20 words
An apparatus in accordance with claim 5 wherein said first means includes means for generating a beam of charged particles.
Claim 9
Dependent Claim
20 words
An apparatus in accordance with claim 5 wherein said first means includes means for generating an intense beam of radiation.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-07-26 | 1997-01-25 | 1997-07-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-07-26 | 2001-01-25 | 2001-07-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-07-26 | 2005-01-25 | 2005-07-27 | $7700.00 | Window Closed / Lapsed |