US5229682A
Expired / Lapsed
US
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Field electron emission device
Assignee: Seiko Epson Corp
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Filing: 1992-02-21
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Granted: 1993-07-20
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Expires: 2012-02-21
Abstract
Abstract A field emission device and method for manufacturing which comprises using a diffusion mask to preserve an area of a silicon substrate for use as a cathode while all around the cathode the substrate is being diffused with oxygen to form an insulating layer. And further comprising depositing a molybdenum gate electrode layer on the insulating layer and etching the molybdenum gate electrode layer such that the diffusion mask falls off and the insulating layer is dissolved around the cathode through the hole formed in the gate electrode layer by the diffusion mask being removed. The gate electrode openings are therefore automatically and independently self-aligned with their respective cathodes.
Inventors
- 👤 Hiroshi Komatsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 20:22
CPC Classifications
H; H01; H01J; H01J3/00; H01J3/02; H01J3/021; H01J3/022; H01J1/00; H01J1/02; H01J1/30; H01J1/304; H01J1/3042; H01J9/00; H01J9/02; H01J9/022; H01J9/025; H10; H10W; H10W46/00; H01J2201/00; H01J2201/30; H01J2201/304; H01J2201/30403; H01J2201/30426; H01J2201/319; H01J2209/00; H01J2209/02; H01J2209/022; H01J2209/0223; H01J2209/0226; H10W46/601
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
125 words
A field electron emission device, comprising: a cone-shaped cathode having a base and a tip, said tip projecting upwardly from said base, said base being superjacent a first conductive layer; a planar insulating layer formed on said first conductive layer and having a cylindrical opening within which said cathode is disposed; a gate electrode comprising a second conductive layer disposed on said insulating layer, said gate electrode extending into the opening such that it overlaps said opening and forms a downwardly descending projection, and such that an opening exists in said gate electrode, said gate electrode opening being centered about said cathode tip; and an anode disposed above said gate electrode and said cathode, wherein said gate electrode is operable to control an anode current.
Claim 2
Dependent Claim
125 words
A field electron emission device, comprising: a cone-shaped cathode having a base and a tip, said tip projecting upwardly from said base, said base being superjacent a first conductive layer; a planar insulating layer formed on said first conductive layer and having a cylindrical opening within which said cathode is disposed; a gate electrode comprising a second conductive layer disposed on said insulating layer, said gate electrode extending into the opening such that it overlaps said opening and forms a downwardly descending projection, and such that an opening exists in said gate electrode, said gate electrode opening being centered about said cathode tip; and an anode disposed above said gate electrode and said cathode, wherein said gate electrode is operable to control an anode current.
Claim 3
Dependent Claim
17 words
The device of claim 1, wherein: said insulating layer comprises tantalum oxide and said cathode comprises tantalum.
Claim 4
Dependent Claim
17 words
The device of claim 1, wherein: said insulating layer comprises silicon dioxide and said cathode comprises silicon.
Claim 5
Dependent Claim
25 words
The device of claim 1, further comprising: an insulating substrate subjacent said first conductive layer, and said first conductive layer comprises a conductive thin film.
Claim 6
Dependent Claim
16 words
The device of claim 1, wherein: said gate electrode controls a discharge current from the cathode.
Claim 7
Dependent Claim
126 words
A field emission device, comprising: a) a pyramidal-shaped cathode having a base and a tip, said cathode projecting upwardly from said base, said base being superjacent a first conductive layer; a planar insulating layer formed on said first conductive layer and having a quadrangular opening within which said cathode is disposed; a gate electrode comprising a second conductive layer disposed on said insulating layer, said gate electrode extending into said quadrangular opening such that it overlaps said quadrangular opening and forms a downwardly descending projection, and such that an opening exists in said gate electrode, said gate electrode opening centered about said cathode tip; and an anode disposed above said gate electrode and said cathode, wherein said gate electrode is operable to control an anode current.
Claim 8
Dependent Claim
126 words
A field emission device, comprising: a) a pyramidal-shaped cathode having a base and a tip, said cathode projecting upwardly from said base, said base being superjacent a first conductive layer; a planar insulating layer formed on said first conductive layer and having a quadrangular opening within which said cathode is disposed; a gate electrode comprising a second conductive layer disposed on said insulating layer, said gate electrode extending into said quadrangular opening such that it overlaps said quadrangular opening and forms a downwardly descending projection, and such that an opening exists in said gate electrode, said gate electrode opening centered about said cathode tip; and an anode disposed above said gate electrode and said cathode, wherein said gate electrode is operable to control an anode current.
Claim 9
Dependent Claim
18 words
The field emission device of claim 6, wherein said pyramidal-shaped cathode has a height of approximately 6,000 Å.
Claim 10
Dependent Claim
17 words
The field emission device of claim 6, wherein said pyramidal-shaped cathode is quadrangular pyramid of about 70°.
Claim 11
Dependent Claim
26 words
The field emission device of claim 6, wherein said insulating layer is approximately 5,000 Å thick and said second conductive layer is approximately 2,000 Å thick.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-07-19 | 1997-01-18 | 1997-07-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-07-19 | 2001-01-18 | 2001-07-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-07-19 | 2005-01-18 | 2005-07-20 | $7700.00 | Window Closed / Lapsed |