US5228949A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for controlled spray etching
Assignee: Atotech USA LLC
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Filing: 1991-11-07
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Granted: 1993-07-20
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Expires: 2011-11-07
Abstract
Abstract A method and apparatus is provided for controlled spray etching, in which panels, such as printed circuit boards are delivered through an etching chamber, to have a spray etchant sprayed generally on upper and lower surfaces of the panel. The spray is controlled such that a reduced amount of etchant is provided on the perimeter surface portions of the panel, relative to the central surface portions of the panel, transversely of the path of travel of the panels through the etching chamber. The spray may be varied in amount, preferably by varying the pressure at different locations transversely of the chamber; the spray longitudinally through the chamber, may vary, to spray leading and trailing surface portions of the panels a lesser amount than central portions of the panels, measured longitudinally. The control of the spray of leading and trailing surface portions of the panels may be facilitated by one or more sensors that control an intermittent discharge of spray etchant near the inlet to the etch chamber.
Inventors
- 👤 Karl F. G. Ketelhohn
- 👤 Donald F. Ball
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 14:13
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; C; C23; C23F; C23F1/00; C23F1/08; H05; H05K; H05K3/00; H05K3/02; H05K3/06; H05K3/068
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
215 words
A method of spray etching panels and the like, comprising the steps of: (a) providing a generally confined spray etch chamber with at least one bank of spray nozzles; (b) delivering the panels longitudinally through the chamber between an inlet and an outlet thereof, in generally horizontal orientation, along a generally horizontal path of travel through the chamber, vertically spaced from at least one bank of nozzles; (c) spraying at least one of an upper and lower surface of the panels with an etchant spray spaced vertically relative to the path of travel, from a bank of nozzles; and (d) controlling the amount of etchant spray provided along perimeter portions of at least one of an upper and lower surface of the panels by: (i) delivering a reduced amount of etchant to side surface portions of at least one of an upper and lower surface of the panels relative to the amount of etchant delivered to center surface portions of panels and (ii) delivering a reduced amount of etchant to leading and trailing surface portions of at least one of an upper and lower surface of the panels relative to the amount of etchant delivered to center surface portions of panels, while the panels pass through the etch chamber between the inlet and outlet thereof.
Claim 2
Independent Claim
215 words
A method of spray etching panels and the like, comprising the steps of: (a) providing a generally confined spray etch chamber with at least one bank of spray nozzles; (b) delivering the panels longitudinally through the chamber between an inlet and an outlet thereof, in generally horizontal orientation, along a generally horizontal path of travel through the chamber, vertically spaced from at least one bank of nozzles; (c) spraying at least one of an upper and lower surface of the panels with an etchant spray spaced vertically relative to the path of travel, from a bank of nozzles; and (d) controlling the amount of etchant spray provided along perimeter portions of at least one of an upper and lower surface of the panels by: (i) delivering a reduced amount of etchant to side surface portions of at least one of an upper and lower surface of the panels relative to the amount of etchant delivered to center surface portions of panels and (ii) delivering a reduced amount of etchant to leading and trailing surface portions of at least one of an upper and lower surface of the panels relative to the amount of etchant delivered to center surface portions of panels, while the panels pass through the etch chamber between the inlet and outlet thereof.
Claim 3
Dependent Claim
25 words
The method of claim 1, wherein the spray on the panels is delivered from and controlled relative to both upper and lower banks of nozzles.
Claim 4
Dependent Claim
57 words
The method of claim 2, wherein the step of (d)(i) is accomplished by providing lower pressure of spray etchant to outer spray nozzles along sides of the chamber above and below the path of travel, relative to the pressure of spray etchant provided to inner spray nozzles that are between outer spray nozzles, transversely of the chamber.
Claim 5
Dependent Claim
49 words
The method of claim 2, wherein the step (d)(ii) is accomplished by intermittently delivering spray etchant through first spray nozzles at the inlet to the chamber, relative to the delivery of spray etchant through other nozzles as a panel passes longitudinally through the chamber between inlet and outlet thereof.
Claim 6
Dependent Claim
101 words
The method of claim 2, wherein the step of (d)(i) is accomplished by providing lower pressure of spray etchant to outer spray nozzles along sides of the chamber above and below the path of travel, relative to the pressure of spray etchant provided to inner spray nozzles that are between outer spray nozzles, transversely of the chamber, wherein the step (d)(ii) is accomplished by intermittently delivering spray etchant through first spray nozzles at the inlet to the chamber, relative to the delivery of spray etchant through other nozzles as a panel passes longitudinally through the chamber between inlet and outlet thereof.
Claim 7
Dependent Claim
53 words
The method of claim 4, wherein the intermittent delivery of spray etchant includes sensing the presence of a panel and responsively operating the first spray nozzles in response to the sensing, to deliver less etchant to the leading and trailing surface portions of the panels as panels pass between chamber inlet and outlet.
Claim 8
Dependent Claim
39 words
The method of claim 6, wherein the step of responsively operating includes opening and closing the first spray nozzles when the leading, center and trailing surface portions of a panel have reached predetermined locations along the path of travel.
Claim 9
Dependent Claim
28 words
The method of claim 1, while pivotally oscillating the spray nozzles transversely of the chamber, to vary the orientation of spray etchant emanating therefrom, transversely of the chamber.
Claim 10
Dependent Claim
110 words
The method of claim 5, wherein the intermittent delivery of spray etchant includes sensing the presence of a panel and responsively operating the first spray nozzles in response to the sensing, to deliver less etchant to the leading and trailing surface portions of the panels as panels pass between chamber inlet and outlet, wherein the step of responsively operating includes opening and closing the first spray nozzles when the leading and trailing surface portions of a panel have reached predetermined locations along the path of travel, and while pivotally oscillating the spray nozzles transversely of the chamber, to vary the orientation of spray etchant emanating therefrom, transversely of the chamber.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-07-19 | 1997-01-18 | 1997-07-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-07-19 | 2001-01-18 | 2001-07-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-07-19 | 2005-01-18 | 2005-07-20 | $7700.00 | Window Closed / Lapsed |