US5228877A
Expired / Lapsed
US
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Field emission devices
Assignee: BAE Systems Electronics Ltd
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Filing: 1992-01-23
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Granted: 1993-07-20
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Expires: 2012-01-23
Abstract
Abstract In a method of forming a micron-size field emitter, an array of conductive tips is formed on a substrate. A layer of dielectric material is formed on the substrate to a thickness substantially equal to the height of the tips, but forming a protuberance over each tip. A conductive grid layer is deposited over the dielectric layer, forming corresponding protuberances, followed by a layer of resist material which is of sufficiently low viscosity so that it flows off the grid layer at the protuberances leaving the protuberances substantially unprotected. The grid and dielectric layers in the protuberances are then etched away to reveal the tips through the resulting apertures in the grid and dielectric layers. The apertures are thereby automatically aligned with the tips without the need for lithographic processes.
Inventors
- 👤 Michael J. Allaway
- 👤 Stuart T. Birrell
- 👤 Neil A. Cade
- 👤 Peter W. Green
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 00:14
CPC Classifications
H; H01; H01J; H01J9/00; H01J9/02; H01J9/022; H01J9/025
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
159 words
A method of forming a field emission device, the method comprising the steps of: forming an array of electrically-conductive tips on a substrate, each tip having a tip radius of a few nanometers and an apex angle less than 90°; depositing on the substrate one or more dielectric layers having a total average thickness substantially equal to the tip height but exhibiting protuberances over the tips; depositing an electrically-conductive grid layer over the dielectric layer; depositing over the grid layer a layer of resist material of sufficiently low viscosity so that the resist material flows off the grid layer at the protuberances, leaving the protuberances substantially unprotected by the resist material; etching away the grid layer at each protuberance to produce a respective grid layer aperture with a collar of grid layer material therearound; and etching away the thereby exposed portions of the dielectric layer to expose the tips through the resulting apertures in the grid and dielectric layers.
Claim 2
Independent Claim
159 words
A method of forming a field emission device, the method comprising the steps of: forming an array of electrically-conductive tips on a substrate, each tip having a tip radius of a few nanometers and an apex angle less than 90°; depositing on the substrate one or more dielectric layers having a total average thickness substantially equal to the tip height but exhibiting protuberances over the tips; depositing an electrically-conductive grid layer over the dielectric layer; depositing over the grid layer a layer of resist material of sufficiently low viscosity so that the resist material flows off the grid layer at the protuberances, leaving the protuberances substantially unprotected by the resist material; etching away the grid layer at each protuberance to produce a respective grid layer aperture with a collar of grid layer material therearound; and etching away the thereby exposed portions of the dielectric layer to expose the tips through the resulting apertures in the grid and dielectric layers.
Claim 3
Dependent Claim
21 words
A method as claimed in claim 1, wherein the grid layer is formed of material having a relatively high electrical resistivity.
Claim 4
Dependent Claim
16 words
A method as claimed in claim 2, wherein the grid layer is formed of amorphous silicon.
Claim 5
Dependent Claim
17 words
A method as claimed in claim 2, wherein the grid layer is formed of doped insulating material.
Claim 6
Dependent Claim
26 words
A method as claimed in claim 2, wherein a pattern of conductors is formed on the grid layer before deposition of the layer of resist material.
Claim 7
Dependent Claim
15 words
A method as claimed in claim 1, wherein the grid layer is formed of metal.
Claim 8
Dependent Claim
16 words
A method as claimed in claim 1, wherein the tips are formed of eutectic fibre material.
Claim 9
Dependent Claim
19 words
A method as claimed in claim 1, wherein the tips are coated with a thin layer of noble metal.
Claim 10
Dependent Claim
15 words
A method as claimed in claim 1, wherein the material coating the tips is aluminium.
Claim 11
Dependent Claim
64 words
A method as claimed in claim 1, wherein when the dielectric layer has been etched away just far enough to expose the tips, a second dielectric layer is deposited thereover which forms a second protuberance over the tip, followed by a second conductive grid layer, and wherein the resist formation and etching steps are repeated, whereby two grid layers with aligned apertures are formed.
Claim 12
Dependent Claim
91 words
A method as claimed in claim 1, comprising the further steps of forming a further dielectric layer over the apertured grid layer, which further dielectric layer exhibits protuberances over the tips; depositing a second conductive grid layer over the further dielectric layer; depositing a layer of resist material over the second grid layer leaving the protuberances substantially unprotected by the resist material; and etching away the second grid layer and the further dielectric layer in the protuberances to expose the tips through the resulting apertures in the grid and dielectric layers.
Claim 13
Dependent Claim
79 words
A method as claimed in claim 1, wherein for the deposition of said one or more dielectric layers a first dielectric layer is deposited on the substrate forming a thin tapered layer portion over the apex of each tip; a second dielectric layer is deposited over the first dielectric layer, the combined thicknesses of the first and second dielectric layers being substantially equal to the tip height and the second dielectric layer exhibiting relatively small protuberances over the tips.
Claim 14
Dependent Claim
18 words
A method as claimed in claim 12, wherein said first dielectric layer is spun on to the substrate.
Claim 15
Dependent Claim
18 words
A method as claimed in claim 13, wherein said first dielectric layer is formed of a glass-loaded polymer.
Claim 16
Dependent Claim
26 words
A method as claimed in claim 14, wherein the polymer is polysiloxane; and wherein the polysiloxane layer is baked before deposition of said second dielectric layer.
Claim 17
Dependent Claim
18 words
A method as claimed in claim 1, wherein the resist layer is spun on to the grid layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-07-19 | 1997-01-18 | 1997-07-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-07-19 | 2001-01-18 | 2001-07-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-07-19 | 2005-01-18 | 2005-07-20 | $7700.00 | Window Closed / Lapsed |