US5227648A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Resonance cavity photodiode array resolving wavelength and spectrum
Assignee: Individual
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Filing: 1991-12-03
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Granted: 1993-07-13
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Expires: 2011-12-03
Abstract
Abstract A photodiode array composed of sharply tuned at consecutively different wavelengths are disclosed with the vertical resonance cavity. Semiconductor superlattice distributed Bragg reflectors can be used as the resonance cavity to achieve sharp tuning and monolithic integration, and the wedged distributed Bragg reflector configuration resonance cavity provides a sequential wavelength detection range. A linear array having resolution a fraction of the photodiodes bandwidth and a square-matrix array with a wedged etalon for high resolution, are disclosed. The disclosed photodiode array make a pocket-type wavelength meter feasible and can be used as a substitute for a spectrometer.
Inventors
- 👤 Jong-Chun Woo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 05:48
CPC Classifications
B; B82; B82Y; B82Y20/00; H; H10; H10F; H10F39/00; H10F39/10; H10F39/107; H10F77/00; H10F77/10; H10F77/14; H10F77/146; H10F77/40; H10F77/413
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
67 words
A semiconductor chip having a linear photodiode array comprising: a series of tuned photodiodes having a tuning sharpness of nanometers in wavelength based on a thickness gradient and a separation of adjacent photodiode elements, wherein the photodiodes further comprise a vertical Fabry-Perot resonance cavity having two reflectors, one of the reflectors being a wedged distributed Bragg reflector and a second of the reflectors being a plane reflector.
Claim 2
Dependent Claim
67 words
A semiconductor chip having a linear photodiode array comprising: a series of tuned photodiodes having a tuning sharpness of nanometers in wavelength based on a thickness gradient and a separation of adjacent photodiode elements, wherein the photodiodes further comprise a vertical Fabry-Perot resonance cavity having two reflectors, one of the reflectors being a wedged distributed Bragg reflector and a second of the reflectors being a plane reflector.
Claim 3
Dependent Claim
132 words
A semiconductor chip having a square matrix photodiode array comprising: a series of tuned photodiodes having a tuning sharpness of nanometers in wavelength based on a thickness gradient and a separation of adjacent photodiode elements, wherein photodiodes having a coarse difference in bandwidth response are aligned in one direction and photodiodes having a fine difference in bandwidth response are aligned in another direction, and two wedged etalons each having a thin side and a thick side, one of said two wedged etalons being monolithically fabricated in the form of a distributed Bragg reflector and having a thin side disposed in a first orientation relative to said semiconductor chip, and another of said two wedged etalons being installed externally and having a thin side disposed in an orientation different from said first orientation.
Claim 4
Dependent Claim
132 words
A semiconductor chip having a square matrix photodiode array comprising: a series of tuned photodiodes having a tuning sharpness of nanometers in wavelength based on a thickness gradient and a separation of adjacent photodiode elements, wherein photodiodes having a coarse difference in bandwidth response are aligned in one direction and photodiodes having a fine difference in bandwidth response are aligned in another direction, and two wedged etalons each having a thin side and a thick side, one of said two wedged etalons being monolithically fabricated in the form of a distributed Bragg reflector and having a thin side disposed in a first orientation relative to said semiconductor chip, and another of said two wedged etalons being installed externally and having a thin side disposed in an orientation different from said first orientation.
Claim 5
Dependent Claim
137 words
A semiconductor chip having a square matrix photodiode array comprising: a series of tuned photodiodes having a tuning sharpness of nanometers in wavelength based on a thickness gradient and a separation of adjacent photodiode elements, wherein photodiodes having a coarse difference in bandwidth response are aligned in one direction and photodiodes having a fine difference in bandwidth response are aligned in another direction, and two wedged etalons each having a thin side and a thick side, one of said two wedged etalons being monolithically fabricated in the form of a distributed Bragg reflector and having a thin side disposed in a first orientation relative to said semiconductor chip, and another of said two wedged etalons being fabricated on top of the semiconductor chip and having a thin side disposed in an orientation different from said first orientation.
Claim 6
Dependent Claim
137 words
A semiconductor chip having a square matrix photodiode array comprising: a series of tuned photodiodes having a tuning sharpness of nanometers in wavelength based on a thickness gradient and a separation of adjacent photodiode elements, wherein photodiodes having a coarse difference in bandwidth response are aligned in one direction and photodiodes having a fine difference in bandwidth response are aligned in another direction, and two wedged etalons each having a thin side and a thick side, one of said two wedged etalons being monolithically fabricated in the form of a distributed Bragg reflector and having a thin side disposed in a first orientation relative to said semiconductor chip, and another of said two wedged etalons being fabricated on top of the semiconductor chip and having a thin side disposed in an orientation different from said first orientation.
References Cited (Backward Citations)
JPS58119680A
Cited
US4665421A
Cited
JPS6097681A
Cited
US4620209A
Cited
JPS61229371A
Cited
US4956686A
Cited
JPS62267624A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-07-12 | 1997-01-11 | 1997-07-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-07-12 | 2001-01-11 | 2001-07-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-07-12 | 2005-01-11 | 2005-07-13 | $7700.00 | Window Closed / Lapsed |