US5226099A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Digital micromirror shutter device
Assignee: Texas Instruments Inc
•
Filing: 1991-04-26
•
Granted: 1993-07-06
•
Expires: 2011-04-26
Abstract
Abstract There is disclosed a device that consists of a micro-mechanical switch consisting of an electrode, a gap between the electrode and an individually deflectable element, which has a vertical shutter attached to its underside. When the electrode is addressed the movement of the deflectable element causes the shutter to raise or lower. Such a device can be used in switching. One embodiment of such a use in waveguides is disclosed along with the method of manufacture.
Inventors
- 👤 Michael A. Mignardi
- 👤 Jeffrey B. Sampsell
- 👤 R. Mark Boysel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 00:23
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/24; G02B6/26; G02B6/35; G02B6/3596; G02B26/00; G02B26/08; G02B26/0816; G02B26/0833; G02B26/0841; G02B6/354; G02B6/3544; G02B6/3548; G02B6/3552; G02B6/351; G02B6/353; G02B6/3564; G02B6/3568; G02B6/357; G02B6/3584
Claims Analysis
Total Claims: 42
Claim 1
Independent Claim
87 words
A deflectable device comprising: a. a substrate; b. an electrode formed upon said substrate; c. at least one support structure formed upon said substrate next to said electrode; d. a movable metal element monolithically fabricated in conjunction with said electrode and said at least one support structure attached to said support structure above said electrode; e. an air gap between said electrode and said element; and f. a vertical structure attached to said element such that said vertical structure is in direct contact with said metal element.
Claim 2
Dependent Claim
87 words
A deflectable device comprising: a. a substrate; b. an electrode formed upon said substrate; c. at least one support structure formed upon said substrate next to said electrode; d. a movable metal element monolithically fabricated in conjunction with said electrode and said at least one support structure attached to said support structure above said electrode; e. an air gap between said electrode and said element; and f. a vertical structure attached to said element such that said vertical structure is in direct contact with said metal element.
Claim 3
Dependent Claim
10 words
The device of claim 1 wherein said substrate is silicon.
Claim 4
Dependent Claim
11 words
The device of claim 1 wherein said substrate is gallium arsenide.
Claim 5
Dependent Claim
10 words
The device of claim 1 wherein said electrode is metal.
Claim 6
Dependent Claim
10 words
The device of claim 1 wherein said electrode is polysilicon.
Claim 7
Dependent Claim
13 words
The device of claim 1 wherein said support structure comprises a metal post.
Claim 8
Dependent Claim
12 words
The device of claim 1 wherein said support structure comprises organic polymer.
Claim 9
Dependent Claim
18 words
The device of claim 1 wherein said metal element is attached to said support structure by one hinge.
Claim 10
Dependent Claim
18 words
The device of claim 1 wherein said metal element is attached to said support structure by two hinges.
Claim 11
Dependent Claim
18 words
The device of claim 1 wherein said metal element is attached to said support structure by four hinges.
Claim 12
Independent Claim
74 words
A method of manufacture comprising: a. forming electrodes upon a substrate; b. coating said electrodes with a polymer spacer; c. patterning said spacer; d. forming metal layers upon said spacer; e. patterning said metal layers to form hinges, metal elements and structure vertically attached to the underside of said metal elements; f. dividing said substrate into individual devices; g. removing a portion of said spacer from said devices; and h. packaging said individual devices.
Claim 13
Independent Claim
74 words
A method of manufacture comprising: a. forming electrodes upon a substrate; b. coating said electrodes with a polymer spacer; c. patterning said spacer; d. forming metal layers upon said spacer; e. patterning said metal layers to form hinges, metal elements and structure vertically attached to the underside of said metal elements; f. dividing said substrate into individual devices; g. removing a portion of said spacer from said devices; and h. packaging said individual devices.
Claim 14
Dependent Claim
16 words
The method of claim 11 wherein said forming electrodes step comprises depositing, patterning and etching metal.
Claim 15
Dependent Claim
20 words
The method of claim 11 where said forming electrodes step comprises diffusing in a material to act as an electrode.
Claim 16
Dependent Claim
17 words
The method of claim 11 wherein said forming electrodes step comprises forming said electrodes out of polysilicon.
Claim 17
Dependent Claim
18 words
The method of claim 11 wherein said patterning said spacer layer comprises patterning said spacer with partial vias.
Claim 18
Dependent Claim
18 words
The method of claim 11 wherein said forming a metal layer step comprises depositing metal upon said spacer.
Claim 19
Dependent Claim
26 words
The method of claim 11 wherein said forming a metal layer step comprises patterning said spacer with vias prior to depositing said metal upon said spacer.
Claim 20
Dependent Claim
13 words
The method of claim 11 wherein said dividing step comprises sawing said wafer.
Claim 21
Dependent Claim
16 words
The method of claim 11 wherein said removing step comprises removing substantially all of said spacer.
Claim 22
Dependent Claim
29 words
The method of claim 11 wherein said removing step comprises removing a portion of said spacer and leaving a portion of said spacer to act as a support structure.
Claim 23
Dependent Claim
94 words
A deflectable device comprising: a. a substrate; b. a lower sheath upon said substrate; c. a waveguide core upon said lower sheath; d. an upper sheath upon said waveguide core; e. a deflectable, monolithically fabricated metal element structure comprising a metal element and a vertical structure attached to said metal element such that said vertical structure is in direct contact with said metal element, said structure suspended over said waveguide core, separated from said core by an air gap; and f. an electrode located adjacent said air gap for electrically addressing said metal element.
Claim 24
Dependent Claim
94 words
A deflectable device comprising: a. a substrate; b. a lower sheath upon said substrate; c. a waveguide core upon said lower sheath; d. an upper sheath upon said waveguide core; e. a deflectable, monolithically fabricated metal element structure comprising a metal element and a vertical structure attached to said metal element such that said vertical structure is in direct contact with said metal element, said structure suspended over said waveguide core, separated from said core by an air gap; and f. an electrode located adjacent said air gap for electrically addressing said metal element.
Claim 25
Dependent Claim
10 words
The device of claim 21 wherein said substrate is silicon.
Claim 26
Dependent Claim
12 words
The device of claim 21 wherein said lower sheath is silicon dioxide.
Claim 27
Dependent Claim
12 words
The device of claim 21 wherein said waveguide core is silicon nitride.
Claim 28
Dependent Claim
12 words
The device of claim 21 wherein said upper sheath is silicon dioxide.
Claim 29
Independent Claim
86 words
A method of manufacture comprising: a. forming electrodes upon a substrate; b. coating said electrodes with a polymer spacer; c. forming metal layers upon said spacer; d. patterning said metal layers to form hinges, and metal elements; e. forming a metal shutter layer upon said metal layers; f. patterning said shutter layer; g. removing portions of said shutter layer and said metal layers; h. dividing said substrate into individual devices; i. removing a portion of said spacer from said devices; and j. packaging said individual devices.
Claim 30
Independent Claim
86 words
A method of manufacture comprising: a. forming electrodes upon a substrate; b. coating said electrodes with a polymer spacer; c. forming metal layers upon said spacer; d. patterning said metal layers to form hinges, and metal elements; e. forming a metal shutter layer upon said metal layers; f. patterning said shutter layer; g. removing portions of said shutter layer and said metal layers; h. dividing said substrate into individual devices; i. removing a portion of said spacer from said devices; and j. packaging said individual devices.
Claim 31
Dependent Claim
16 words
The method of claim 26 wherein said forming electrodes step comprises depositing, patterning and etching metal.
Claim 32
Dependent Claim
20 words
The method of claim 26 where said forming electrodes step comprises diffusing in a material to act as an electrode.
Claim 33
Dependent Claim
17 words
The method of claim 26 wherein said forming electrodes step comprises forming said electrodes out of polysilicon.
Claim 34
Dependent Claim
18 words
The method of claim 26 wherein said forming a metal layer step comprises depositing metal upon said spacer.
Claim 35
Dependent Claim
27 words
The method of claim 26 wherein said forming a metal layer step comprises patterning said spacer with vias prior to depositing said metal layer upon said spacer.
Claim 36
Dependent Claim
16 words
The method of claim 26 wherein said patterning said metal layer comprises masking said metal layers.
Claim 37
Dependent Claim
21 words
The method of claim 26 wherein said forming said shutter metal layer comprises depositing said shutter layer upon said metal layers.
Claim 38
Dependent Claim
16 words
The method of claim 26 wherein said patterning said shutter layer comprises masking said shutter layer.
Claim 39
Dependent Claim
21 words
The method of claim 26 wherein said removing portions of said shutter layer and metal layers step comprises etching said layers.
Claim 40
Dependent Claim
13 words
The method of claim 26 wherein said dividing step comprises sawing said wafer.
Claim 41
Dependent Claim
16 words
The method of claim 26 wherein said removing step comprises removing substantially all of said spacer.
Claim 42
Dependent Claim
29 words
The method of claim 26 wherein said removing step comprises removing a portion of said spacer and leaving a portion of said spacer to act as a support structure.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-07-05 | 1997-01-04 | 1997-07-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-07-05 | 2001-01-04 | 2001-07-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-07-05 | 2005-01-04 | 2005-07-06 | $7700.00 | Window Closed / Lapsed |