US5225663A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Heat process device
Assignee: Tokyo Electron Ltd
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Filing: 1991-11-18
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Granted: 1993-07-06
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Expires: 2011-11-18
Abstract
Abstract A heat process device according to the present invention includes a film-like heating body serving as a heat source for a heat transfer plate on which an object to be processed is mounted and heated. Therefore, the heat process device can be excellent in controlling the heating temperature. It can also apply a uniform heat process to the object. Further, it can be made small in size and easy to operate.
Inventors
- 👤 Kimiharu Matsumura
- 👤 Eiichi Shirakawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 11:21
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0432
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
75 words
A heat process device comprising: plural heat process units piled one upon the others at a certain interval, each of said heat process units including a heat transfer plate on one side of which an object to be processed is mounted; a film-like heating body attached to the other side of the heat transfer plate; electrodes attached to the film-like heating body; and a system for supplying a predetermined amount of current to the electrodes.
Claim 2
Dependent Claim
75 words
A heat process device comprising: plural heat process units piled one upon the others at a certain interval, each of said heat process units including a heat transfer plate on one side of which an object to be processed is mounted; a film-like heating body attached to the other side of the heat transfer plate; electrodes attached to the film-like heating body; and a system for supplying a predetermined amount of current to the electrodes.
Claim 3
Dependent Claim
26 words
The heat process device according to claim 1, wherein said object to be processed is a semiconductor wafer, a liquid crystal device or a printing resister.
Claim 4
Dependent Claim
75 words
A heat process device comprising: a heat transfer plate on one side of which an object to be processed is mounted, a film-like heating body formed on this one side of said heat transfer plate, electrodes formed on and along both side edges of said film-like heating body, a means for supplying a predetermined amount of current to said electrodes, and an insulation layer formed not on said electrodes but on said film-like heating body.
Claim 5
Dependent Claim
75 words
A heat process device comprising: a heat transfer plate on one side of which an object to be processed is mounted, a film-like heating body formed on this one side of said heat transfer plate, electrodes formed on and along both side edges of said film-like heating body, a means for supplying a predetermined amount of current to said electrodes, and an insulation layer formed not on said electrodes but on said film-like heating body.
Claim 6
Dependent Claim
92 words
A heat process device comprising plural heat process units piled one upon the other at a certain interval, said heat process unit including a heat transfer plate on one side of which an object to be processed is mounted, a film-like heating body formed on this side of said heat transfer plate, electrodes formed on and along both side rims of said film-like heating body, a means for supplying a predetermined amount of current to said electrodes, and an insulation layer formed not on said electrodes but on said film-like heating body.
Claim 7
Dependent Claim
92 words
A heat process device comprising plural heat process units piled one upon the other at a certain interval, said heat process unit including a heat transfer plate on one side of which an object to be processed is mounted, a film-like heating body formed on this side of said heat transfer plate, electrodes formed on and along both side rims of said film-like heating body, a means for supplying a predetermined amount of current to said electrodes, and an insulation layer formed not on said electrodes but on said film-like heating body.
Claim 8
Dependent Claim
46 words
The heat process device according to any of claims 3 and 4, wherein said insulation layer formed on the film-like heating is made of a material selected from the group consisting of: alumina, zirconia, silicon carbonite, silicon nitride, quartz, rutile, high alumina brick and carbon brick.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-07-05 | 1997-01-04 | 1997-07-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-07-05 | 2001-01-04 | 2001-07-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-07-05 | 2005-01-04 | 2005-07-06 | $7700.00 | Window Closed / Lapsed |