US5217754A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Organometallic precursors in conjunction with rapid thermal annealing for synthesis of thin film ceramics
Assignee: University of Pennsylvania
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Filing: 1990-10-23
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Granted: 1993-06-08
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Expires: 2010-10-23
Abstract
Abstract An organometallic precursor mixture is formed containing desired components of a final ceramic. This precursor mixture is dissolved in an organic solvent. The dissolved mixture is then spin cast or otherwise evenly deposited onto a wafer substrate. Finally, the coated wafer substrate is annealed by a process of Rapid Thermal Annealing to produce a thin ceramic film and to remove any organic material. This process exhibits preferential crystal growth to produce a uniform thin film.
Inventors
- 👤 Jorge J. Santiago-Aviles
- 👤 Donald H. Berry
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 03:09
CPC Classifications
C; C04; C04B; C04B35/00; C04B35/622; C04B35/626; C04B35/63; C04B35/632; C04B35/6325
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
67 words
A method for manufacturing a film ceramic comprising: providing an organometallic precursor; dissolving said precursor in an organic solvent; depositing the dissolved organometalic precursor onto a substrate; and heating the deposited, dissolved precursor on the substrate for a period of time less than about 50 seconds and under conditions of temperature effective to decompose the precursor, eliminate organic components and form the ceramic film on said substrate.
Claim 2
Independent Claim
67 words
A method for manufacturing a film ceramic comprising: providing an organometallic precursor; dissolving said precursor in an organic solvent; depositing the dissolved organometalic precursor onto a substrate; and heating the deposited, dissolved precursor on the substrate for a period of time less than about 50 seconds and under conditions of temperature effective to decompose the precursor, eliminate organic components and form the ceramic film on said substrate.
Claim 3
Dependent Claim
19 words
The method of claim 1 wherein the dissolved, deposited organometallic precursor is heated at a temperature between 475°-900° C.
Claim 4
Dependent Claim
19 words
The method of claim 1 wherein the deposited organometallic precursor does not exceed a temperature of about 750° C.
Claim 5
Dependent Claim
13 words
The method of claim 1 wherein the film ceramic is a ferroelectric ceramic.
Claim 6
Dependent Claim
12 words
The method of claim 4 wherein the ferroelectric ceramic is a perovskite.
Claim 7
Dependent Claim
13 words
The method of claim 1 wherein the film ceramic is an oxide ceramic.
Claim 8
Dependent Claim
21 words
The method of claim 1 wherein the organometallic precursor is a mixture of one or more metal alkoxide or metal carboxylate.
Claim 9
Dependent Claim
22 words
The method of claim 1 wherein the organometallic precursor is a mixture of barium dineodecanoate or lead dineodecanoate with titanium demethoxy dineodecanoate.
Claim 10
Dependent Claim
20 words
The method of claim 1 wherein the method of depositing said dissolved organometallic precursor onto said substrate is spin casting.
Claim 11
Dependent Claim
17 words
The method of claim 1 wherein the method is performed at a pressure not exceeding one atmosphere.
Claim 12
Dependent Claim
16 words
The method of claim 1 wherein the film ceramic is less than about 1 micron thick.
Claim 13
Dependent Claim
93 words
An improved method of manufacturing an electric, electronic, or mechano-electric device having electrically conductive elements comprising: manufacturing one or more of said electrically conductive elements by the process of dissolving an organometallic precursor in an organic solvent; depositing said dissolved organometallic precursor onto a substrate to be used in said electrically conductive element; and heating the deposited, dissolved precursor on the substrate for a period of time less than about 50 seconds and under conditions of temperature effective to decompose the precursor, eliminate organic components and form a ceramic film on said substrate.
Claim 14
Dependent Claim
93 words
An improved method of manufacturing an electric, electronic, or mechano-electric device having electrically conductive elements comprising: manufacturing one or more of said electrically conductive elements by the process of dissolving an organometallic precursor in an organic solvent; depositing said dissolved organometallic precursor onto a substrate to be used in said electrically conductive element; and heating the deposited, dissolved precursor on the substrate for a period of time less than about 50 seconds and under conditions of temperature effective to decompose the precursor, eliminate organic components and form a ceramic film on said substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-07 | 1996-12-07 | 1997-06-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-07 | 2000-12-07 | 2001-06-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-07 | 2004-12-07 | 2005-06-08 | $7700.00 | Window Closed / Lapsed |