US5217401A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacturing a field-emission type switching device
Assignee: Panasonic Holdings Corp
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Filing: 1992-02-18
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Granted: 1993-06-08
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Expires: 2012-02-18
Abstract
Abstract A field-emission type switching device includes a substrate formed with a recess having a straight edge and serrated edge opposite to the straight edge. A gate electrode is formed at the bottom of the recess. An emitter electrode is provided over the substrate and formed with a serrated edge which is slightly off alignment with the serrate edge of the recess so as to provide an emitter overhanging portion overhanging the recess. Similarly, a collector electrode is provided over the substrate means and formed with a straight edge which is slightly off alignment with the straight edge of the recess so as to provide a collector overhanging portion overhanging the recess. The emitter and collector electrodes are disposed in one plate and the gate electrode is disposed in another plane below the one plane.
Inventors
- 👤 Masanori Watanabe
- 👤 Hiroyuki Kado
- 👤 Takao Chikamura
- 👤 Nobuyuki Yoshiike
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 01:30
CPC Classifications
H; H01; H01J; H01J21/00; H01J21/02; H01J21/06; H01J21/10; H01J21/105; H01J3/00; H01J3/02; H01J3/021; H01J3/022
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
186 words
A method for making a field-emission type switching device comprising the steps of: (a) forming an insulation layer on a semiconductor substrate layer; (b) forming an electrically conductive layer over said insulation layer; (c) etching said electrically conductive layer to form an emitter electrode having a serrated edge having at least one tip and a collector electrode having a straight edge; (d) etching said insulation layer through a space between said emitter electrode and collector electrode as to form a recess in said insulation layer such that an emitter overhanging portion is formed overhanging said recess and, at the same time, a collector overhanging portion is formed overhanging said recess; (e) injecting ions at the bottom of said recess into said semiconductor substrate so as to form a gate electrode; and (f) etching said overhanging portions to provide tapered edges; wherein the at least one tip of the serrated edge of the emitter electrode is left at a thickness within a range of 0.02-0.04 micrometer and wherein the point of contact of the emitter electrode with the insulation layer is maintained so as to be thick.
Claim 2
Independent Claim
186 words
A method for making a field-emission type switching device comprising the steps of: (a) forming an insulation layer on a semiconductor substrate layer; (b) forming an electrically conductive layer over said insulation layer; (c) etching said electrically conductive layer to form an emitter electrode having a serrated edge having at least one tip and a collector electrode having a straight edge; (d) etching said insulation layer through a space between said emitter electrode and collector electrode as to form a recess in said insulation layer such that an emitter overhanging portion is formed overhanging said recess and, at the same time, a collector overhanging portion is formed overhanging said recess; (e) injecting ions at the bottom of said recess into said semiconductor substrate so as to form a gate electrode; and (f) etching said overhanging portions to provide tapered edges; wherein the at least one tip of the serrated edge of the emitter electrode is left at a thickness within a range of 0.02-0.04 micrometer and wherein the point of contact of the emitter electrode with the insulation layer is maintained so as to be thick.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-07 | 1996-12-07 | 1997-06-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-07 | 2000-12-07 | 2001-06-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-07 | 2004-12-07 | 2005-06-08 | $7700.00 | Window Closed / Lapsed |