US5216807A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of producing electrical connection members
Assignee: Canon Inc
•
Filing: 1992-02-11
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Granted: 1993-06-08
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Expires: 2012-02-11
Abstract
Abstract A method of producing an electrical connection member includes the steps of applying a carrier containing a light-sensitive resin onto a substrate member, forming holes in portions of the carrier to form a pattern and expose the substrate member in the holes, filling each hole in the carrier with an electrically conductive member, and removing the substrate member from the carrier. With this method, it is possible to easily produce electrical connection members in which high density electrical connecting portions can be provided and in which the reliability and security of electrical connections can be improved.
Inventors
- 👤 Tetsuo Yoshizawa
- 👤 Yoshimi Terayama
- 👤 Hiroshi Kondo
- 👤 Takashi Sakaki
- 👤 Shunichi Haga
- 👤 Yasuteru Ichida
- 👤 Masaki Konishi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 01:23
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/62; H10W70/63; H10W70/635; H10W70/01; H10W70/05; H10W70/095; H10W72/00; H10W72/071; H10W72/072; H10W72/07251; H10W72/20; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49204; Y10T29/49208
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
70 words
A method for producing electrical connection members, comprising the steps of: forming a layer of light-sensitive resin on a substrate member for supporting materials to be used for forming said electrical connection members; forming holes through said layer of light-sensitive resin by patterning predetermined portions of said layer of light-sensitive resin; heating the layer of light-sensitive resin; filling each hole with an electrically conductive member; and removing the substrate member.
Claim 2
Independent Claim
70 words
A method for producing electrical connection members, comprising the steps of: forming a layer of light-sensitive resin on a substrate member for supporting materials to be used for forming said electrical connection members; forming holes through said layer of light-sensitive resin by patterning predetermined portions of said layer of light-sensitive resin; heating the layer of light-sensitive resin; filling each hole with an electrically conductive member; and removing the substrate member.
Claim 3
Dependent Claim
56 words
A method according to claim 1, further comprising the step of etching, prior to filling the holes, the portions of the substrate member exposed through the holes formed in the carrier to form recesses corresponding to the holes so that each recess has a diameter larger than the diameter of a corresponding hole in the carrier.
Claim 4
Dependent Claim
39 words
A method according to claim 2, wherein each electrically conductive member fills the respective recess formed in the substrate member, with the electrically conductive members forming bumps which have protruding configurations and comprise part of an electrical connection member.
Claim 5
Dependent Claim
23 words
A method according to claim 1, further comprising the step of forming a wiring pattern on at least one surface of the carrier.
Claim 6
Dependent Claim
24 words
A method according to claim 1, wherein each electrically conductive member has a bump-like configuration which projects above a corresponding surface of the carrier.
Claim 7
Dependent Claim
49 words
A method according to claim 1, further comprising the step of fusing the electrically conductive members to respective connecting portions of an electrical circuit part by using either one of a metal and a metallic alloy to fuse contacting surface of the connecting portions and the electrically conductive members.
Claim 8
Dependent Claim
23 words
A method according to claim 6, wherein the fusing step uses either one of an internal heating process and an external heating process.
Claim 9
Dependent Claim
39 words
A method according to claim 1, further comprising the step of connecting the electrically conductive members to respective connecting portions of a probe card for measuring electrical characteristics of an electrical circuit member in contact with the probe card.
Claim 10
Independent Claim
134 words
A method of producing electrical connection members, comprising the steps of: forming a first layer of light-sensitive resin on a substrate member for supporting materials to be used for forming said electrical connection members; forming holes through the first layer of light-sensitive resin by patterning predetermined portions of the first layer of light-sensitive resin; filling each hole with a first electrically conductive member; forming a second layer of light-sensitive resin on the first layer of light-sensitive resin filled with the first electrically conductive members; forming holes through the second layer of light-sensitive resin by patterning predetermined portions of the second layer of light-sensitive resin; filling each hole in the second layer of light-sensitive resin with a second electrically conductive member; heating the first and second layers of light-sensitive resin; and removing the substrate member.
Claim 11
Independent Claim
134 words
A method of producing electrical connection members, comprising the steps of: forming a first layer of light-sensitive resin on a substrate member for supporting materials to be used for forming said electrical connection members; forming holes through the first layer of light-sensitive resin by patterning predetermined portions of the first layer of light-sensitive resin; filling each hole with a first electrically conductive member; forming a second layer of light-sensitive resin on the first layer of light-sensitive resin filled with the first electrically conductive members; forming holes through the second layer of light-sensitive resin by patterning predetermined portions of the second layer of light-sensitive resin; filling each hole in the second layer of light-sensitive resin with a second electrically conductive member; heating the first and second layers of light-sensitive resin; and removing the substrate member.
Claim 12
Dependent Claim
62 words
A method according to claim 9, further comprising the step of etching, prior to filling the holes, the portions of the substrate member exposed through the holes formed in the first carrier to form recesses in the substrate member corresponding to the holes so that each recess has a diameter larger than the diameter of a corresponding hole in the first carrier.
Claim 13
Dependent Claim
44 words
A method according to claim 10, wherein each first electrically conductive member is filled into the respective recess formed in the substrate member, with the first electrically conductive members forming bumps which have protruding configurations and which comprise part of an electrical connection member.
Claim 14
Dependent Claim
32 words
A method according to claim 9, further comprising the step of forming a wiring pattern on at least one of the surfaces of the first carrier and the first electrically conductive members.
Claim 15
Dependent Claim
34 words
A method according to claim 9, wherein each first electrically conductive member and second electrically conductive member has a bump-like configuration which projects above a corresponding surface of the first and second carriers, respectively.
Claim 16
Dependent Claim
75 words
A method according to claim 9, further comprising the step of connecting the first electrically conductive members exposed at one surface of the first carrier and the second electrically conductive members exposed at an opposite facing surface of the second carrier to respective connecting portions of an electrical circuit part by fusing contacting surfaces of the connecting portions and first and second electrically conductive members with either one of a metal and a metallic alloy.
Claim 17
Dependent Claim
23 words
A method according to claim 14, wherein the fusing step uses either one of an internal heating process and an external heating process.
Claim 18
Dependent Claim
68 words
A method according to claim 9, further comprising the step of connecting the second electrically conductive member exposed at one surface of the first carrier to respective connecting portions of a probe card, with the first electrically conductive members being exposed at an opposite facing surface of the second carrier for measuring the electrical characteristics of a member in contact with respective connecting portions of the probe card.
Claim 19
Dependent Claim
64 words
A method according to claim 9, wherein the steps of applying a second carrier containing a light sensitive resin on the first carrier, forming holes in predetermined portions of the second carrier to expose the first electrically conductive members through each of the holes, and filling each hole formed in the second carrier with a second electrically conductive member, are performed at least once.
References Cited (Backward Citations)
US2961746A
Cited
US3193789A
Cited
US3541222A
Cited
US3778900A
Cited
US3680037A
Cited
US3971610A
Cited
US4050756A
Cited
US4064623A
Cited
US4067945A
Cited
US4240198A
Cited
US4323593A
Cited
EP0114211A2
Cited
WO1986000173A1
Cited
US4628406A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-07 | 1996-12-07 | 1997-06-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-07 | 2000-12-07 | 2001-06-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-07 | 2004-12-07 | 2005-06-08 | $7700.00 | Window Closed / Lapsed |