US5215960A
Expired / Lapsed
US
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Method for manufacturing oxide superconducting devices
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1991-07-16
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Granted: 1993-06-01
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Expires: 2011-07-16
Abstract
Abstract In a method of manufacturing a superconducting device which has a first thin film of oxide superconductor material formed on a substrate and a second thin film formed on the first thin film of oxide superconductor material, after the second thin film is deposited on the first thin film of oxide superconductor material, a multi-layer structure formed of the first and second thin films is patterned so that a side surface of the first thin film is exposed. In this condition, the whole of the substrate is heated in an O 2 atmosphere or in an O 3 atmosphere so that oxygen is entrapped into the first thin film of oxide superconductor material. Thereafter, the patterned multi-layer structure is preferably covered with a protection coating.
Inventors
- 👤 Sou Tanaka
- 👤 Mitsuchika Saitoh
- 👤 Michitomo Iiyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:43
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0912; H10N60/0941; Y; Y10; Y10S; Y10S505/00; Y10S505/70; Y10S505/701; Y10S505/702; Y10S505/725; Y10S505/728; Y10S505/73; Y10S505/731; Y10S505/732; Y10S505/742; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
165 words
A method of manufacturing a superconducting device which has a first thin film of oxide superconductor material formed on a substrate and a second thin film of non-superconductor material formed on the first thin film of oxide superconductor material and a third film of oxide superconductor material formed on the second thin film of non-superconductor material, so that a three-layer structure is formed of the first thin film of oxide superconductor material, the second thin film of non-superconductor material and the third film of superconductor material, the method including patterning the three-layer structure so that at least a side surface of the first thin film of oxide superconductor material is exposed, and then, heat-treating the three-layer structure at a temperature of up to 500° C. in an O 2 atmosphere or in an O 3 atmosphere so as to cause oxygen to be entrapped into the first thin film of oxide superconductor material, the whole of the three-layer structure being covered with a protection coating.
Claim 2
Independent Claim
165 words
A method of manufacturing a superconducting device which has a first thin film of oxide superconductor material formed on a substrate and a second thin film of non-superconductor material formed on the first thin film of oxide superconductor material and a third film of oxide superconductor material formed on the second thin film of non-superconductor material, so that a three-layer structure is formed of the first thin film of oxide superconductor material, the second thin film of non-superconductor material and the third film of superconductor material, the method including patterning the three-layer structure so that at least a side surface of the first thin film of oxide superconductor material is exposed, and then, heat-treating the three-layer structure at a temperature of up to 500° C. in an O 2 atmosphere or in an O 3 atmosphere so as to cause oxygen to be entrapped into the first thin film of oxide superconductor material, the whole of the three-layer structure being covered with a protection coating.
Claim 3
Dependent Claim
16 words
A method claimed in claim 1 wherein the protection coating is formed of a noble metal.
Claim 4
Dependent Claim
28 words
A method claim 1 wherein said protection coating is formed of an oxide superconductor material crystal different in orientation from the first thin film of oxide superconductor material.
Claim 5
Dependent Claim
18 words
A method claimed in claim 1 wherein the three-layer structure has a width not greater than 3 μm.
Claim 6
Dependent Claim
28 words
A method claimed in claim 1 wherein each of the first and third thin films of oxide superconductor material is formed of a "c"-axis oriented superconductor material crystal.
Claim 7
Dependent Claim
24 words
A method claimed in claim 1 wherein the heat-treatment is executed at a heating temperature in a range of not less than 400° C.
Claim 8
Dependent Claim
25 words
A method claimed in claim 1 wherein the heat-treatment is executed in the O 2 atmosphere having a partial pressure not less than 5 Torr.
Claim 9
Dependent Claim
38 words
A method claimed in claim 7 wherein the heat-treatment is executed at 400° C. in the O 2 atmosphere having a partial pressure in a range of not less than 5 Torr but not greater than 20 Torr.
Claim 10
Dependent Claim
29 words
A method claimed in claim 7 wherein the heat-treatment is executed at 500° C. in the O 2 atmosphere having a partial pressure of not less than 10 Torr.
Claim 11
Dependent Claim
25 words
A method claimed in claim 1 wherein the heat-treatment is executed in the O 3 atmosphere having a partial pressure not less than 0.1 Torr.
Claim 12
Dependent Claim
29 words
A method claimed in claim 1 wherein the heat-treatment is executed at 500° C. in the O 3 atmosphere having a partial pressure of not less than 10 Torr.
Claim 13
Dependent Claim
30 words
A method claimed in claim 1 wherein each of the first and third thin films of oxide superconductor material is formed of a Y-Ba-Cu-O type oxide superconductor material single crystal.
Claim 14
Dependent Claim
34 words
A method claimed in claim 11 wherein the protection coating is deposited at a temperature lower than a temperature zone in which oxygen is lost from the first thin film of oxide superconductor material.
Claim 15
Dependent Claim
44 words
A method claimed in claim 13 wherein each of the first and third thin films of oxide superconductor material is formed of a Y-Ba-Cu-O type oxide superconductor material single crystal, and the protection coating is deposited at a temperature not greater than 400° C.
Claim 16
Dependent Claim
32 words
A method claimed in claim 11 wherein the protection coating is formed of a noble metal layer having a thickness of not less than 10 nm but not greater than 50 nm.
Claim 17
Dependent Claim
33 words
A method claimed in claim 15 wherein the protection coating is formed of a Au or Ag layer having a thickness of not less than 10 nm but not greater than 50 nm.
Claim 18
Dependent Claim
38 words
A method claimed in claim 11 wherein the protection coating is formed of an oxide superconductor material crystal layer having an orientation different from that of each of the first and third thin films of oxide superconductor material.
Claim 19
Dependent Claim
48 words
A method claimed in claim 17 wherein each of the first and third thin films of oxide superconductor material is formed of a "c"-axis oriented superconductor material crystal, and the oxide superconductor material crystal layer of the protection coating is formed of an "a"-axis oriented superconductor material crystal.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-05-31 | 1996-11-30 | 1997-06-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-05-31 | 2000-11-30 | 2001-06-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-05-31 | 2004-11-30 | 2005-06-01 | $7700.00 | Window Closed / Lapsed |