US5212987A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Acoustic screen scan microscope for the examination of an object in the short-range field of a resonant acoustic oscillator
Assignee: Jenoptik Industrial Metrology Germany GmbH
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Filing: 1991-11-15
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Granted: 1993-05-25
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Expires: 2011-11-15
Abstract
Abstract An acoustic scanning microscope uses damping of a resonant acoustic oscillator and an acoustic near-field effect. In a preferred embodiment, a 32 KHz tuning fork serving as an acoustic oscillator with a 50 nm point achieves a vertical resolution of 5 nm and a horizontal resolution of 50 nm in the case of a minimum distance of approximately 50 nm. Frequency or amplitude variation of the resonant acoustic oscillator can be used. The acoustic near-field effect is dependent on the coupling medium, e.g., air, and the pressure, e.g., normal pressure.
Inventors
- 👤 Klaus Dransfeld
- 👤 Ulrich Fischer
- 👤 Peter Guethner
- 👤 Knut Heitmann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 08:21
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/18; G01Q60/22; G01H; G01H13/00; G01H3/00; G01H3/10; G01H3/12; G01H3/125; G01N; G01N29/00; G01N29/04; G01N29/06; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/862; Y10S977/868; Y10S977/869; Y10S977/88; Y10S977/881
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
113 words
An acoustic scanning microscope for examining an object, said acoustic scanning microscope comprising: a resonant acoustic oscillator located adjacent to, but not contacting, said object as said acoustic oscillator oscillates such that said object is in an acoustic field of said acoustic oscillator, said acoustic field being defined as a field created when a size of a radiation source and its distance from said object are approximately the same and are significantly smaller than a wavelength of acoustic radiation used; and means for determining the damping of said acoustic oscillator as a function of the position of said object in relation to said acoustic oscillator to generate a micro-image profile of said object.
Claim 2
Dependent Claim
113 words
An acoustic scanning microscope for examining an object, said acoustic scanning microscope comprising: a resonant acoustic oscillator located adjacent to, but not contacting, said object as said acoustic oscillator oscillates such that said object is in an acoustic field of said acoustic oscillator, said acoustic field being defined as a field created when a size of a radiation source and its distance from said object are approximately the same and are significantly smaller than a wavelength of acoustic radiation used; and means for determining the damping of said acoustic oscillator as a function of the position of said object in relation to said acoustic oscillator to generate a micro-image profile of said object.
Claim 3
Dependent Claim
116 words
An acoustic scanning microscope for examining an object, said acoustic scanning microscope comprising: a resonant acoustic oscillator located adjacent to, but not contacting, said object as said acoustic oscillator oscillates such that said object is in an acoustic field of said acoustic oscillator, said acoustic field being defined as a field created when a size of a radiation source and its distance from said object are approximately the same and are significantly smaller than a wavelength of acoustic radiation used; and means for determining the damping of said acoustic oscillator as a function of the position of said object in relation to said acoustic oscillator; wherein said acoustic oscillator includes a coupled pair of acoustic oscillators.
Claim 4
Dependent Claim
116 words
An acoustic scanning microscope for examining an object, said acoustic scanning microscope comprising: a resonant acoustic oscillator located adjacent to, but not contacting, said object as said acoustic oscillator oscillates such that said object is in an acoustic field of said acoustic oscillator, said acoustic field being defined as a field created when a size of a radiation source and its distance from said object are approximately the same and are significantly smaller than a wavelength of acoustic radiation used; and means for determining the damping of said acoustic oscillator as a function of the position of said object in relation to said acoustic oscillator; wherein said acoustic oscillator includes a coupled pair of acoustic oscillators.
Claim 5
Dependent Claim
16 words
An acoustic scanning microscope according to claim 2, wherein said acoustic oscillator includes a tuning fork.
Claim 6
Dependent Claim
20 words
An acoustic scanning microscope according to claim 2, wherein said acoustic oscillator includes a centrally fixed bar with free ends.
Claim 7
Dependent Claim
117 words
An acoustic scanning microscope for examining an object, said acoustic scanning microscope comprising: a resonant acoustic oscillator located adjacent to, but not contacting, said object as said acoustic oscillator oscillates such that said object is in an acoustic field of said acoustic oscillator, said acoustic field being defined as a field created when a size of a radiation source and its distance from said object are approximately the same and are significantly smaller than a wavelength of acoustic radiation used; and means for determining the damping of said acoustic oscillator as a function of the position of said object in relation to said acoustic oscillator; wherein said acoustic oscillator oscillates perpendicular to the surface of said object.
Claim 8
Dependent Claim
117 words
An acoustic scanning microscope for examining an object, said acoustic scanning microscope comprising: a resonant acoustic oscillator located adjacent to, but not contacting, said object as said acoustic oscillator oscillates such that said object is in an acoustic field of said acoustic oscillator, said acoustic field being defined as a field created when a size of a radiation source and its distance from said object are approximately the same and are significantly smaller than a wavelength of acoustic radiation used; and means for determining the damping of said acoustic oscillator as a function of the position of said object in relation to said acoustic oscillator; wherein said acoustic oscillator oscillates perpendicular to the surface of said object.
Claim 9
Dependent Claim
20 words
An acoustic scanning microscope according to claim 1, wherein said acoustic oscillator oscillates perpendicular to the surface of said object.
Claim 10
Dependent Claim
147 words
An acoustic scanning microscope for examining an object, said acoustic scanning microscope comprising: a resonant acoustic oscillator located adjacent to, but not contacting, said object as said acoustic oscillator oscillates such that said object is in an acoustic field of said acoustic oscillator, said acoustic field being defined as a field created when a size of a radiation source and its distance from said object are approximately the same and are significantly smaller than a wavelength of acoustic radiation used; and means for determining the damping of said acoustic oscillator as a function of the position of said object in relation to said acoustic oscillator; wherein said acoustic oscillator is shaped and arranged with respect to said object such that a specific small portion of said acoustic oscillator with a high oscillation amplitude comes into the closest proximity with said object to serve as a probe point.
Claim 11
Dependent Claim
147 words
An acoustic scanning microscope for examining an object, said acoustic scanning microscope comprising: a resonant acoustic oscillator located adjacent to, but not contacting, said object as said acoustic oscillator oscillates such that said object is in an acoustic field of said acoustic oscillator, said acoustic field being defined as a field created when a size of a radiation source and its distance from said object are approximately the same and are significantly smaller than a wavelength of acoustic radiation used; and means for determining the damping of said acoustic oscillator as a function of the position of said object in relation to said acoustic oscillator; wherein said acoustic oscillator is shaped and arranged with respect to said object such that a specific small portion of said acoustic oscillator with a high oscillation amplitude comes into the closest proximity with said object to serve as a probe point.
Claim 12
Dependent Claim
24 words
An acoustic scanning microscope according to claim 1, wherein a gas is introduced as a coupling medium between said acoustic oscillator and said object.
Claim 13
Dependent Claim
28 words
An acoustic scanning microscope according to claim 1, wherein a frequency variation of said acoustic oscillator oscillating at natural resonance is utilized as a measure of said damping.
Claim 14
Dependent Claim
27 words
An acoustic scanning microscope according to claim 9, wherein amplitude variation of said acoustic oscillator oscillating at natural resonance is utilized as a measure of said damping.
Claim 15
Dependent Claim
136 words
An acoustic scanning microscope for examining an object, said acoustic scanning microscope comprising: a resonant acoustic oscillator located adjacent to, but not contacting, said object as said acoustic oscillator oscillates such that said object is in an acoustic field of said acoustic oscillator, said acoustic field being defined as a field created when a size of a radiation source and its distance from said object are approximately the same and are significantly smaller than a wavelength of acoustic radiation used; and means for determining the damping of said acoustic oscillator as a function of the position of said object in relation to said acoustic oscillator; wherein during scanning of said object a distance between said acoustic oscillator and said object is regulated such that said damping of said acoustic oscillator is compensated to a constant extent.
Claim 16
Dependent Claim
136 words
An acoustic scanning microscope for examining an object, said acoustic scanning microscope comprising: a resonant acoustic oscillator located adjacent to, but not contacting, said object as said acoustic oscillator oscillates such that said object is in an acoustic field of said acoustic oscillator, said acoustic field being defined as a field created when a size of a radiation source and its distance from said object are approximately the same and are significantly smaller than a wavelength of acoustic radiation used; and means for determining the damping of said acoustic oscillator as a function of the position of said object in relation to said acoustic oscillator; wherein during scanning of said object a distance between said acoustic oscillator and said object is regulated such that said damping of said acoustic oscillator is compensated to a constant extent.
Claim 17
Dependent Claim
117 words
An acoustic scanning microscope for examining an object, said acoustic scanning microscope comprising: a resonant acoustic oscillator located adjacent to, but not contacting, said object as said acoustic oscillator oscillates such that said object is in an acoustic field of said acoustic oscillator, said acoustic field being defined as a field created when a size of a radiation source and its distance from said object are approximately the same and are significantly smaller than a wavelength of acoustic radiation used; and means for determining the damping of said acoustic oscillator as a function of the position of said object in relation to said acoustic oscillator; wherein said acoustic oscillator has a resonator quality greater than one thousand.
Claim 18
Dependent Claim
117 words
An acoustic scanning microscope for examining an object, said acoustic scanning microscope comprising: a resonant acoustic oscillator located adjacent to, but not contacting, said object as said acoustic oscillator oscillates such that said object is in an acoustic field of said acoustic oscillator, said acoustic field being defined as a field created when a size of a radiation source and its distance from said object are approximately the same and are significantly smaller than a wavelength of acoustic radiation used; and means for determining the damping of said acoustic oscillator as a function of the position of said object in relation to said acoustic oscillator; wherein said acoustic oscillator has a resonator quality greater than one thousand.
Claim 19
Dependent Claim
15 words
An acoustic scanning microscope according to claim 1, wherein said acoustic oscillator includes piezoelectric material.
Claim 20
Dependent Claim
145 words
An acoustic scanning microscope for examining an object, said acoustic scanning microscope comprising: a resonant acoustic oscillator located adjacent to, but not contacting, said object as said acoustic oscillator oscillates such that said object is in an acoustic field of said acoustic oscillator, said acoustic field being defined as a field created when a size of a radiation source and its distance from said object are approximately the same and are significantly smaller than a wavelength of acoustic radiation used; and means for determining the damping of said acoustic oscillator as a function of the position of said object in relation to said acoustic oscillator; wherein said acoustic oscillator includes piezoelectric material and wherein said acoustic oscillator is provided with two structured electrodes and is connected to an electronic switching circuit which effects excitation of said acoustic oscillator at its natural resonance by electronic feedback.
Claim 21
Dependent Claim
145 words
An acoustic scanning microscope for examining an object, said acoustic scanning microscope comprising: a resonant acoustic oscillator located adjacent to, but not contacting, said object as said acoustic oscillator oscillates such that said object is in an acoustic field of said acoustic oscillator, said acoustic field being defined as a field created when a size of a radiation source and its distance from said object are approximately the same and are significantly smaller than a wavelength of acoustic radiation used; and means for determining the damping of said acoustic oscillator as a function of the position of said object in relation to said acoustic oscillator; wherein said acoustic oscillator includes piezoelectric material and wherein said acoustic oscillator is provided with two structured electrodes and is connected to an electronic switching circuit which effects excitation of said acoustic oscillator at its natural resonance by electronic feedback.
Claim 22
Dependent Claim
146 words
An acoustic scanning microscope for examining an object, said acoustic scanning microscope comprising: a resonant acoustic oscillator located adjacent to, but not contacting, said object as said acoustic oscillator oscillates such that said object is in an acoustic field of said acoustic oscillator, said acoustic field being defined as a field created when a size of a radiation source and its distance from said object are approximately the same and are significantly smaller than a wavelength of acoustic radiation used; and means for determining the damping of said acoustic oscillator as a function of the position of said object in relation to said acoustic oscillator; wherein said acoustic oscillator includes a coupled pair of oscillators oscillating in antiphase, which is mounted at a nodal point of coupled oscillation such that no oscillations are transferred to a mounting as long as no interaction with said object occurs.
Claim 23
Dependent Claim
146 words
An acoustic scanning microscope for examining an object, said acoustic scanning microscope comprising: a resonant acoustic oscillator located adjacent to, but not contacting, said object as said acoustic oscillator oscillates such that said object is in an acoustic field of said acoustic oscillator, said acoustic field being defined as a field created when a size of a radiation source and its distance from said object are approximately the same and are significantly smaller than a wavelength of acoustic radiation used; and means for determining the damping of said acoustic oscillator as a function of the position of said object in relation to said acoustic oscillator; wherein said acoustic oscillator includes a coupled pair of oscillators oscillating in antiphase, which is mounted at a nodal point of coupled oscillation such that no oscillations are transferred to a mounting as long as no interaction with said object occurs.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-05-24 | 1996-11-23 | 1997-05-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-05-24 | 2000-11-23 | 2001-05-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-05-24 | 2004-11-23 | 2005-05-25 | $7700.00 | Window Closed / Lapsed |