US5209119A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Microdevice for sensing a force
Assignee: University of Minnesota System
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Filing: 1990-12-12
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Granted: 1993-05-11
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Expires: 2010-12-12
Abstract
Abstract A microsensor or micromechanical device based upon the piezoelectric properties of thin film lead zirconate titanate (PZT) with a thickness of between 0.1 and 5 microns. The thin film PZT is sandwiched between first and second electrodes which are provided with electrical connection means for electrically connecting the electrodes to a voltage sensor or voltage source. The invention also relates to a method for making such microsensor or micromechanical device.
Inventors
- 👤 Dennis L. Polla
- 👤 Takashi Tamagawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 13:59
CPC Classifications
G; G01; G01L; G01L1/00; G01L1/16; H; H10; H10N; H10N30/00; H10N30/01; H10N30/07; H10N30/074; H10N30/077; H10N30/078; H10N30/80; H10N30/85; H10N30/853; H10N30/8548; H10N30/8554
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
136 words
A microdevice formed integral to an integrated circuit chip for sensing a force comprising: a lead zirconate titanate (PZT) piezoelectric thin film having a thickness between about 0.1 and 0.5 microns, said thin film presenting a surface upon which said force acts and being adapted for deflective movement in response to the application of said force; first and second electrodes positioned on opposite sides of said PZT thin film, each of said electrodes having an inner surface in operable contact with said PZT thin film and an outer surface defining an outer surface of said microdevice, the first and second electrodes comprising means for sensing the piezoelectric effects produced in the film by said deflective movement of said thin film; and electrical connection means for electrically connecting said first and second electrodes to a voltage sensor.
Claim 2
Dependent Claim
136 words
A microdevice formed integral to an integrated circuit chip for sensing a force comprising: a lead zirconate titanate (PZT) piezoelectric thin film having a thickness between about 0.1 and 0.5 microns, said thin film presenting a surface upon which said force acts and being adapted for deflective movement in response to the application of said force; first and second electrodes positioned on opposite sides of said PZT thin film, each of said electrodes having an inner surface in operable contact with said PZT thin film and an outer surface defining an outer surface of said microdevice, the first and second electrodes comprising means for sensing the piezoelectric effects produced in the film by said deflective movement of said thin film; and electrical connection means for electrically connecting said first and second electrodes to a voltage sensor.
Claim 3
Dependent Claim
29 words
The microdevice of claim 1 wherein the size of the said surface upon which said force acts ranges from about 100 square microns to about 1×10 6 square microns.
Claim 4
Dependent Claim
24 words
The microdevice of claim 1 wherein the composition of said PZT thin film has a zirconate:titanate ratio of between about 94:6 and about 30:70.
Claim 5
Dependent Claim
20 words
The microdevice of claim 3 wherein the composition of said PZT thin film has a zirconate:titanate ratio of about 54:46.
Claim 6
Dependent Claim
20 words
The microdevice of claim 1 wherein said PZT thin film is deposited on said first electrode by sol-gel deposition techniques.
Claim 7
Dependent Claim
11 words
The microdevice of claim 5 wherein said first electrode is platinum.
Claim 8
Dependent Claim
48 words
The microdevice of claim 1 comprising a pressure sensor having a sealed cavity defined in part by a deformable membrane being operably coupled to said thin film such that a force applied to the membrane results in deformation of said membrane causing a stress in said thin film.
Claim 9
Dependent Claim
37 words
The microdevice of claim 7 wherein said PZT thin film and said first and second electrodes form a thin film sensor assembly and said deformable membrane is positioned between said cavity and said thin film sensor assembly.
Claim 10
Dependent Claim
25 words
The microdevice of claim 7 wherein said sealed cavity is formed on a silicon die having a size less than about 1×10 6 square microns.
Claim 11
Dependent Claim
24 words
The microdevice of claim 1 comprising a force or pressure microsensor wherein said first and second electrodes are electrically connected with a voltage sensor.
References Cited (Backward Citations)
US2478223A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-05-10 | 1996-11-09 | 1997-05-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-05-10 | 2000-11-09 | 2001-05-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-05-10 | 2004-11-09 | 2005-05-11 | $7700.00 | Window Closed / Lapsed |