Heat processing apparatus of vertical type

Claim 2

A heat processing apparatus of the vertical type comprising: an apparatus box having at the lower end portion thereof an opening through which an object to be processed are carried in and out of the box; door for opening and hermetically closing the opening of the box; a process tube having an open bottom and located in the upper half of the box; heaters enclosing the process tube; a space formed in the lower half of the box and under the process tube, and connected to the opening of the box; a cap for closing the open bottom of the process tube and supporting the object at the time of heat process; an elevator arranged in the box and serving to move the cap up and down between a position where the open bottom of the process tube is closed and another position in the space where the open bottom is opened; drive means for driving the elevator; supply means for supplying a clean gas into the space and provided with a first port by which the supply means is connected to the space; exhausting means for exhausting outside the box the clean gas which has passed through the space, and provided with a second port communicated with the space, said second port being located on that side of the cap which is opposed to the first port of the supply means; and collecting means for drawing and collecting the gas introduced by the exhausting means.

Claim 3

The apparatus according to claim 1, wherein said exhausting means has a member for forcedly exhausting the gas to promote gas exhaustion.

Claim 4

The apparatus according to claim 2, wherein said gas forcedly-exhausting member is a fan.

Claim 5

The apparatus according to claim 1, wherein said drive means is housed in the box and separated from the space by a partition.

Claim 6

The apparatus according to claim 1, wherein said exhausting means includes an exhaust duct for introducing the gas and said exhaust duct extends outside from the top of the box.

Claim 7

The apparatus according to claim 1, wherein said supply means has a member for forcedly supplying the gas to promote gas supply.

Claim 8

The apparatus according to claim 6, wherein said gas forcedly-supplying member is a fan.

Claim 9

The apparatus according to claim 1, wherein said supply means has a filter at the first port.

Claim 10

A heat processing apparatus of the vertical type comprising: an apparatus box having at the lower end portion thereof an opening through which an object to be processed are carried in and out of the box; a door for opening and hermetically closing the opening of the box; a process tube having an open bottom and located in the upper half of the box; heaters enclosing the process tube; a space formed in the lower half of the box and under the process tube, and connected to the opening of the box; a cap for closing the open bottom of the process tube and supporting the object at the time of heat process; an elevator arranged in the box and serving to move the cap up and down between a position where the open bottom of the process tube is closed and another position in the space where the open bottom is opened; drive means for driving the elevator; supply means for supplying a clean gas into the space and provided with a first port by which the supply means is connected to the space; first exhausting means for exhausting outside the box the clean gas which has passed through the space, and provided with a second port communicated with the space, said second port being located on that side of the cap which is opposed to the first port of the supply means; collecting means for drawing and collecting the gas introduced by the first exhausting means; and second exhausting means for exhausting a remaining gas in the process tube, and arranged adjacent to the open bottom of the process tube.

Claim 11

A heat processing apparatus of the vertical type comprising: an apparatus box having at the lower end portion thereof an opening through which an object to be processed are carried in and out of the box; a door for opening and hermetically closing the opening of the box; a process tube having an open bottom and located in the upper half of the box; heaters enclosing the process tube; a space formed in the lower half of the box and under the process tube, and connected to the opening of the box; a cap for closing the open bottom of the process tube and supporting the object at the time of heat process; an elevator arranged in the box and serving to move the cap up and down between a position where the open bottom of the process tube is closed and another position in the space where the open bottom is opened; drive means for driving the elevator; supply means for supplying a clean gas into the space and provided with a first port by which the supply means is connected to the space; first exhausting means for exhausting outside the box the clean gas which has passed through the space, and provided with a second port communicated with the space, said second port being located on that side of the cap which is opposed to the first port of the supply means; collecting means for drawing and collecting the gas introduced by the first exhausting means; and second exhausting means for exhausting a remaining gas in the process tube, and arranged adjacent to the open bottom of the process tube.

Claim 12

The apparatus according to claim 9, wherein said first exhausting means has a member for forcedly exhausting the gas to promote gas exhaustion.

Claim 13

The apparatus according to claim 9, wherein said drive means is housed in the box and separated from the space by a partition.

Claim 14

The apparatus according to claim 9, wherein said first exhausting means includes an exhaust duct for introducing the gas and said exhaust duct extends outside from the top of the box.

Claim 15

The apparatus according to claim 9, wherein said supply means has a member for forcedly supplying the gas to promote gas supply.

Claim 16

The apparatus according to claim 9, wherein said supply means has a filter at the first port.

Claim 17

The apparatus according to claim 9, wherein said second exhausting means includes a scavenger enclosing the lower end portion of the process tube.

Claim 18

The apparatus according to claim 15, wherein said scavenger has a cooling member opposed to the lower end portion of the process tube to prevent this portion of the process tube from being overheated.

Claim 19

The apparatus according to claim 16, wherein said cooling member is shaped like a ring and that face of said cooling member which is opposed to the lower end portion of the process tube has a clearance relative to this portion of the process tube.

Claim 20

The apparatus according to claim 9, wherein said second exhausting means has a member for forcedly exhausting the remaining gas to promote gas exhaust.

Claim 21

The apparatus according to claim 9, further comprising collecting means for collecting the gas introduced by the second exhaust means and removing harmful components from the gas thus collected.