US5204539A
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US
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Avalanche photodiode with hetero-periodical structure
Assignee: NEC Corp
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Filing: 1992-01-27
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Granted: 1993-04-20
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Expires: 2012-01-27
Abstract
Abstract An avalanche photodiode includes an avalanche multiplication layer of a hetero-periodical structure consisting of alternately provided barrier and well layers. Each barrier layer includes a multi-quantum barrier layer consisting of alternately provided short-width barrier and well layers. The barrier and well layers include respectively first and second III-group elements which meet the following conditions: E.sub.A <E.sub.B, and E.sub.A +E.sub.gA <E.sub.B +E.sub.gB or E.sub.A <E.sub.B, and E.sub.A +E.sub.gA >E.sub.B +E.sub.gB where E A and E B are average ionization energies of the first and second III-group elements respectively, and E gA and E gB are forbidden band gap energies, respectively.
Inventors
- 👤 Masayoshi Tsuji
- 👤 Kikuo Makita
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 02:29
CPC Classifications
B; B82; B82Y; B82Y20/00; H; H10; H10F; H10F30/00; H10F30/20; H10F30/21; H10F30/22; H10F30/225; H10F30/2255; H10F77/00; H10F77/10; H10F77/14; H10F77/146; Y; Y10; Y10S; Y10S977/00; Y10S977/70; Y10S977/755; Y10S977/76; Y10S977/761; Y10S977/813; Y10S977/815
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
175 words
An avalanche photodiode, comprising: a light absorbing layer; an avalanche multiplication layer of a hetero-periodical structure comprising alternately provided first barrier and well layers, each of said first barrier layers of said avalanche multiplication layer comprising a multi-quantum barrier layer having alternately provided narrow-width barrier and well layers, a virtual barrier being formed which is higher than said first barrier and is generated at the multi-quantum barrier layer, so that electrons which are injected into the avalanche multiplication layer experience large energy differences between the virtual barrier and the well layer so that electrons obtain a large ionizing energy; and first and second electrodes for applying a predetermined voltage across said light absorbing and avalanche multiplication layers; wherein said narrow-width barrier and well layers comprise respectively first and second group III-V compounds which meet the following conditions: E.sub.A <E.sub.B, and E.sub.A +E.sub.gA <E.sub.B +E.sub.gB where E A and E B are average ionization energies of said first and second group III-V compounds, respectively, and E gA and E gB are forbidden band gap energies, respectively.
Claim 2
Dependent Claim
175 words
An avalanche photodiode, comprising: a light absorbing layer; an avalanche multiplication layer of a hetero-periodical structure comprising alternately provided first barrier and well layers, each of said first barrier layers of said avalanche multiplication layer comprising a multi-quantum barrier layer having alternately provided narrow-width barrier and well layers, a virtual barrier being formed which is higher than said first barrier and is generated at the multi-quantum barrier layer, so that electrons which are injected into the avalanche multiplication layer experience large energy differences between the virtual barrier and the well layer so that electrons obtain a large ionizing energy; and first and second electrodes for applying a predetermined voltage across said light absorbing and avalanche multiplication layers; wherein said narrow-width barrier and well layers comprise respectively first and second group III-V compounds which meet the following conditions: E.sub.A <E.sub.B, and E.sub.A +E.sub.gA <E.sub.B +E.sub.gB where E A and E B are average ionization energies of said first and second group III-V compounds, respectively, and E gA and E gB are forbidden band gap energies, respectively.
Claim 3
Dependent Claim
22 words
An avalanche photodiode, according to claim 1, wherein: said multi-quantum barrier layer is provided in a center of said first barrier layer.
Claim 4
Dependent Claim
43 words
An avalanche photodiode, according to claim 1, wherein: said multi-quantum barrier layer is provided in one end of said first barrier layer in which photocarriers which drift within said avalanche multiplication layer reach said multi-quantum barrier layer after passing said first barrier layer.
Claim 5
Dependent Claim
38 words
An avalanche photodiode, according to claim 1, wherein: said first barrier layer comprises InAlAs; said well layer consists of InGaAs; and said narrow-width barrier and well layers of said multi-quantum barrier layer consist of InAlAs and InGaAs, respectively.
Claim 6
Dependent Claim
56 words
An avalanche photodiode, according to claim 1, wherein: said first barrier layer consists of InAlAs; said well layer consists of InGaAsP; and said narrow-width barrier and well layers of said multi-quantum barrier layer consist of InAlAs and InGaAs, respectively; wherein a band energy discontinuity between said barrier layer and well layers falls within a valence band.
Claim 7
Dependent Claim
38 words
An avalanche photodiode, according to claim 1, wherein: said first barrier layer comprises AlGaAsSb; said well layer consists of InGaAs; and said narrow-width barrier and well layers of said multi-quantum barrier layer consist of AlGaAsSb and InGaAs, respectively.
Claim 8
Dependent Claim
56 words
An avalanche photodiode, according to claim 1, wherein: said first barrier layer consists of AlGaAsSb; said well layer consists of AlGalnAs; and said narrow-width barrier and well layers of said multi-quantum barrier layer consist of AlGasAsSb and InGaAs, respectively; wherein a band energy discontinuity between said first barrier and well layers falls within a valence band.
Claim 9
Dependent Claim
126 words
An avalanche photodiode, comprising: a light absorbing layer; an avalanche multiplication layer of a hetero-periodical structure consisting of alternately provided first barrier and well layers, each of said first barrier layers of said avalanche multiplication layer comprising a multi-quantum barrier layer consisting of alternately provided narrow-width barrier and well layers; and first and second electrodes for applying a predetermined voltage across said light absorbing and avalanche multiplication layers; wherein said first barrier and well layers comprise respectively first and second group III-V compounds which meet the following conditions: E.sub.A <E.sub.B, and E.sub.A +E.sub.gA >E.sub.B +E.sub.gB where E A and E B are average ionization energies of said first and second group III-V compounds, respectively, and E gA and E gB are forbidden band gap energies, respectively.
Claim 10
Dependent Claim
126 words
An avalanche photodiode, comprising: a light absorbing layer; an avalanche multiplication layer of a hetero-periodical structure consisting of alternately provided first barrier and well layers, each of said first barrier layers of said avalanche multiplication layer comprising a multi-quantum barrier layer consisting of alternately provided narrow-width barrier and well layers; and first and second electrodes for applying a predetermined voltage across said light absorbing and avalanche multiplication layers; wherein said first barrier and well layers comprise respectively first and second group III-V compounds which meet the following conditions: E.sub.A <E.sub.B, and E.sub.A +E.sub.gA >E.sub.B +E.sub.gB where E A and E B are average ionization energies of said first and second group III-V compounds, respectively, and E gA and E gB are forbidden band gap energies, respectively.
Claim 11
Dependent Claim
22 words
An avalanche photodiode, according to claim 8, wherein: said multi-quantum barrier layer is provided in a center of said first barrier layer.
Claim 12
Dependent Claim
43 words
An avalanche photodiode, according to claim 8, wherein: said multi-quantum barrier layer is provided in one end of said first barrier layer in which photocarriers which drift within said avalanche multiplication layer reach said multi-quantum barrier layer after passing said first barrier layer.
Claim 13
Dependent Claim
36 words
An avalanche photodiode, according to claim 8, wherein: said first barrier layer comprises InAlAs; said well layer comprises InGaAs; and said narrow-width barrier and well layers of said multi-quantum barrier layer comprise InAlAs and InGaAs, respectively.
Claim 14
Dependent Claim
53 words
An avalanche photodiode, according to claim 8, wherein: said first barrier layer comprises InAlAs; said well layer comprises InGaAsP; and said narrow-width barrier and well layers of said multi-quantum barrier layer comprise InAlAs and InGaAs, respectively; wherein a band energy discontinuity between said first barrier and well layers falls within a valence band.
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