Abstract The crude Ti particles prepared by molten salt electrolysis or Iodide method are classified into each particle diameter according to contents of impurities, and the crude Ti particles having a desired particle diameter are selected from the crude Ti particles classified depending on each particle diameter. Otherwise, the crude Ti particles are acid-treated. Then they are electron-beam-melted. Through the above production process, there is prepared a highly purified Ti material having an oxygen content of not more than 350 ppm, Fe, Ni and Cr contents of not more than 15 ppm each, Na and K contents of not more than 0.5 ppm each, a reduction of area as a material characteristic of not less than 70%, and a thermal conductivity of not less than 16 W/m K. In short, the highly purified Ti material satisfying high purity, good processability and good thermal conductivity can be obtained. A film having more uniform thickness of film and inside structure can be obtained from a sputtering target prepared using the above highly purified Ti material.
A highly purified Ti material comprising: an oxygen content of not more than 350 ppm; Fe, Ni and Cr contents of not more than 15 ppm each; Na and K contents of not more than 0.5 ppm each; a reduction of area of not less than 70%; and a thermal conductivity of not less than 16 W/mK.
Claim 2
Dependent Claim
57 words
A highly purified Ti material comprising: an oxygen content of not more than 350 ppm; Fe, Ni and Cr contents of not more than 15 ppm each; Na and K contents of not more than 0.5 ppm each; a reduction of area of not less than 70%; and a thermal conductivity of not less than 16 W/mK.
Claim 3
Dependent Claim
25 words
The highly purified Ti material according to claim 1, wherein said Ti material has U and Th contents of not more than 1 ppb each.
Claim 4
Dependent Claim
65 words
The highly purified Ti material according to claim 1, wherein the Ti material has an oxygen content of not more than 250 ppm; Fe, Ni and Cr contents of not more than 10 ppm each; Na and K contents of not more than 0.1 ppm each a reduction of area of not less than 80%; and a thermal conductivity of not less than 17 W/mK.
Claim 5
Dependent Claim
65 words
The highly purified Ti material according to claim 1, wherein the Ti material has an oxygen content of not more than 200 ppm; Fe, Ni and Cr contents of not more than 5 ppm each; Na and K contents of not more than 0.05 ppm each a reduction of area of not less than 85%; and a thermal conductivity of not less than 18 W/mK.
Claim 6
Dependent Claim
20 words
The sputtering target consisting of the highly purified Ti material according to claim 1 and shaped into a desired form.