US5203445A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Carrier conveying apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1991-07-26
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Granted: 1993-04-20
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Expires: 2011-07-26
Abstract
Abstract A carrier conveying apparatus comprises a first carrier rest for placing carriers thereon, a second carrier rest to which the carriers are conveyed, a carrier holding member for holding a plurality of carriers at a time from below, a liftably moving mechanism for liftably moving the carrier holding member and a horizontally moving mechanism provided over a distance from below the first carrier rest to a position below the second carrier rest to horizontally move the carrier holding member and liftably moving mechanism. The liftably moving mechanism lifts the carrier holding member from below the first carrier rest and hence lifts the carriers placed on the first carrier rest in a manner to hold them by the carrier holding member. Then the horizontally moving means horizontally moves the carrier holding member and liftably moving mechanism to a position above the second carrier rest. Then the liftably moving mechanism lowers the carrier holding member to place the carriers on the second carrier rest.
Inventors
- 👤 Hirotsugu Shiraiwa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 07:43
CPC Classifications
H; H10; H10W; H10W99/00; H10P; H10P72/00; H10P72/30; H10P72/34; H10P72/3411; H10P72/3412; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/14
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
144 words
A carrier conveying apparatus, comprising: a first carrier rest on which carriers are placed, said first carrier rest being square in configuration; a second carrier rest; a carrier holding member for holding carriers from beneath the carrier, said carrier holding member having a plurality of projection rods projected from a main rod with a spacing defined between the adjacent projection rods to allow the carrier rest to pass through the spacing; and carrier holding member driving means for lifting the carrier holding member from beneath the first carrier rest and, by doing so, lifting the carriers which are placed on the first carrier rest with the carriers held by the carrier holding member, moving the carrier holding member in a horizontal direction and placing the carriers on the second carrier rest after the carrier holding member has been lowered toward the second carrier rest.
Claim 2
Dependent Claim
144 words
A carrier conveying apparatus, comprising: a first carrier rest on which carriers are placed, said first carrier rest being square in configuration; a second carrier rest; a carrier holding member for holding carriers from beneath the carrier, said carrier holding member having a plurality of projection rods projected from a main rod with a spacing defined between the adjacent projection rods to allow the carrier rest to pass through the spacing; and carrier holding member driving means for lifting the carrier holding member from beneath the first carrier rest and, by doing so, lifting the carriers which are placed on the first carrier rest with the carriers held by the carrier holding member, moving the carrier holding member in a horizontal direction and placing the carriers on the second carrier rest after the carrier holding member has been lowered toward the second carrier rest.
Claim 3
Dependent Claim
14 words
The carrier conveying apparatus according to claim 1, comprising at least two carrier-holding members.
Claim 4
Dependent Claim
17 words
The carrier conveying apparatus according to claim 1 wherein the carrier holding member has three projection rods.
Claim 5
Dependent Claim
17 words
The carrier conveying apparatus according to claim 1, wherein the carrier holding member has five projection rods.
Claim 6
Dependent Claim
28 words
The carrier conveying apparatus according to claim 1, wherein the carrier rest includes a sensor for detecting whether or not the carriers are placed on the carrier rest.
Claim 7
Dependent Claim
29 words
The carrier conveying apparatus according to claim 1, wherein the carrier rest includes a sensor for detecting the direction in which the carrier is placed on the carrier rest.
Claim 8
Dependent Claim
50 words
The carrier conveying apparatus according to claim 1, wherein the carrier holding member driving means comprises liftably moving means for liftably moving the carrier holding member; horizontally moving means for horizontally moving the carrier holding member; and a control section for controlling the liftably moving means and horizontally moving means.
Claim 9
Dependent Claim
29 words
The carrier conveying apparatus according to claim 7, wherein the liftably moving means comprises an air cylinder and an air supply source for supplying air to the air cylinder.
Claim 10
Dependent Claim
27 words
The carrier conveying apparatus according to claim 7, wherein the horizontally moving means comprises a ball screw and rotationally driving section for rotationally driving the ball screw.
Claim 11
Dependent Claim
19 words
The carrier conveying apparatus according to claim 9, wherein the rotationally driving section is comprised of a stepping motor.
Claim 12
Dependent Claim
15 words
The carrier conveying apparatus according to claim 1, wherein the carrier is a wafer carrier.
Claim 13
Dependent Claim
18 words
The carrier conveying apparatus according to claim 1, wherein the projection rod has a polygonal cross sectional shape.
Claim 14
Dependent Claim
18 words
The carrier conveying apparatus according to claim 1, wherein the projection rod has a circular cross sectional shape.
Claim 15
Dependent Claim
30 words
The carrier conveying apparatus according to claim 1, wherein at least one of the carrier rest and the carrier holding member includes means for determining the position of the carrier.
Claim 16
Dependent Claim
136 words
A carrier conveying apparatus, comprising: a first carrier rest having a plurality of projection rods projected from a main rod, carriers being placed on adjacent projection rods; a second carrier rest; a carrier holding member for holding carriers from beneath the carrier, said carrier holding member being square in configuration and capable of passing through a spacing defined between the adjacent projection rods; and carrier holding member driving means for lifting the carrier holding member from beneath the first carrier rest and, by doing so, lifting the carriers which are placed on the first carrier rest with the carriers held by the carrier holding member, moving the carrier holding member in a horizontal direction and placing the carriers on the second carrier rest after the carrier holding member has been lowered toward the second carrier rest.
Claim 17
Dependent Claim
136 words
A carrier conveying apparatus, comprising: a first carrier rest having a plurality of projection rods projected from a main rod, carriers being placed on adjacent projection rods; a second carrier rest; a carrier holding member for holding carriers from beneath the carrier, said carrier holding member being square in configuration and capable of passing through a spacing defined between the adjacent projection rods; and carrier holding member driving means for lifting the carrier holding member from beneath the first carrier rest and, by doing so, lifting the carriers which are placed on the first carrier rest with the carriers held by the carrier holding member, moving the carrier holding member in a horizontal direction and placing the carriers on the second carrier rest after the carrier holding member has been lowered toward the second carrier rest.
Claim 18
Dependent Claim
18 words
The carrier conveying apparatus according to claim 15, wherein the apparatus includes at least two carrier holding members.
Claim 19
Dependent Claim
16 words
The carrier conveying apparatus according to claim 15, wherein the carrier rest has three projection rods.
Claim 20
Dependent Claim
16 words
The carrier conveying apparatus according to claim 15, wherein the carrier rest has five projection rods.
Claim 21
Dependent Claim
18 words
The carrier conveying apparatus according to claim 15, wherein the projection rod has a polygonal cross section shape.
Claim 22
Dependent Claim
18 words
The carrier conveying apparatus according to claim 15, wherein the projection rod has a circular cross sectional shape.
Claim 23
Dependent Claim
30 words
The carrier conveying apparatus according to claim 15, wherein at least one of the carrier rest and the carrier holding member includes means for determining the position of the carrier.
Claim 24
Dependent Claim
28 words
The carrier conveying apparatus according to claim 15, wherein the carrier rest includes a sensor for detecting whether or not the carriers are placed on the carrier rest.
Claim 25
Dependent Claim
29 words
The carrier conveying apparatus according to claim 15, wherein the carrier rest includes a sensor for detecting the direction in which the carrier is placed on the carrier rest.
Claim 26
Dependent Claim
50 words
The carrier conveying apparatus according to claim 15, wherein the carrier holding member driving means comprises liftably moving means for liftably moving the carrier holding member; horizontally moving means for horizontally moving the carrier holding member; and a control section for controlling the liftably moving means and horizontally moving means.
Claim 27
Dependent Claim
29 words
The carrier conveying apparatus according to claim 24, wherein the liftably moving means comprises an air cylinder and an air supply source for supplying air to the air cylinder.
Claim 28
Dependent Claim
27 words
The carrier conveying apparatus according to claim 24, wherein the horizontally moving means comprises a ball screw and rotationally driving section for rotationally driving the ball screw.
Claim 29
Dependent Claim
19 words
The carrier conveying apparatus according to claim 26, wherein the rotationally driving section is comprised of a stepping motor.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-04-19 | 1996-10-19 | 1997-04-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-04-19 | 2000-10-19 | 2001-04-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-04-19 | 2004-10-19 | 2005-04-20 | $7700.00 | Window Closed / Lapsed |