US5202716A
Expired / Lapsed
US
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Resist process system
Assignee: Tokyo Electron Ltd
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Filing: 1992-06-25
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Granted: 1993-04-13
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Expires: 2012-06-25
Abstract
Abstract A resist process system of the present invention includes at least two robots for conveying a wafer, a passage through which the robots can move, plural process units arranged along the passage, and a waiting unit for temporarily holding the wafer which is to be processed. The waiting unit is arranged beside the passage and between the process units and it includes plural compartments partitioned in it.
Inventors
- 👤 Kiyohisa Tateyama
- 👤 Masami Akimoto
- 👤 Mitsuru Ushijima
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 16:59
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0451; H10P72/0452; H10P72/0456; B; B29; B29C; B29C31/00; G; G03; G03F; G03F7/00; G03F7/16; G03F7/26; G03F7/30; G03F7/3021; G03F7/70; G03F7/70691; G03F7/70733; G03F7/7075; H10P72/0458; H10P72/30; H10P72/33; H10P72/3302
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
59 words
A resist process system comprising; conveying means for conveying a wafer; a passage along which the conveying means is movable; a plurality of process units arranged beside the passage; and at least one waiting unit for temporarily keeping the wafer which is to be processed; wherein said waiting unit is arranged beside the passage and between the process units.
Claim 2
Dependent Claim
59 words
A resist process system comprising; conveying means for conveying a wafer; a passage along which the conveying means is movable; a plurality of process units arranged beside the passage; and at least one waiting unit for temporarily keeping the wafer which is to be processed; wherein said waiting unit is arranged beside the passage and between the process units.
Claim 3
Dependent Claim
18 words
The resist process system according to claim 1, wherein said waiting unit includes plural compartments partitioned in it.
Claim 4
Dependent Claim
23 words
The resist process system according to claim 2, wherein the wafer stage is housed in the most upper compartment in the waiting unit.
Claim 5
Dependent Claim
19 words
The resist process system according to claim 1, wherein at least two conveying means are provided in the passage.
Claim 6
Dependent Claim
31 words
The resist process system according to claim 4, wherein said passage is separated in front of the waiting unit and each of the separated passages includes at least one conveying means.
Claim 7
Dependent Claim
32 words
The resist process system according to claim 5, wherein an arm of each conveying means is extended oblique to the passage to transfer the wafer into and out of the waiting unit.
Claim 8
Dependent Claim
49 words
The resist process system according to claim 5, further comprising a waiting unit provided with a single wafer stage and travel means for moving the single wafer stage itself in the waiting unit between a position where the wafer is received and a position where the wafer is sent.
Claim 9
Dependent Claim
32 words
The resist process system according to claim 4, wherein an arm of each conveying means is extended perpendicular to the passage to transfer the wafer into and out of the waiting unit.
Claim 10
Dependent Claim
20 words
The resist process system according to claim 8, wherein said passage is continuous even in front of the waiting unit.
Claim 11
Dependent Claim
28 words
The resist process system according to claim 4, wherein said waiting unit has two wafer stages and handling means for transferring the wafer between the two wafer stages.
Claim 12
Dependent Claim
20 words
The resist process system according to claim 1, wherein said waiting units are arranged on both sides of the passage.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-04-12 | 1996-10-12 | 1997-04-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-04-12 | 2000-10-12 | 2001-04-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-04-12 | 2004-10-12 | 2005-04-13 | $7700.00 | Window Closed / Lapsed |