US5200970A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Methods and compositions for protecting laser excitation gases from contamination
Assignee: Summit Technology Inc
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Filing: 1990-12-03
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Granted: 1993-04-06
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Expires: 2010-12-03
Abstract
Abstract Plastic or polymeric materials can be rendered substantially more practical for use in gas laser systems, and the problem of gas contamination due to outgassing of volatile materials can be significantly reduced by coating the polymeric elements with a thin dielectric film.
Inventors
- 👤 Peter J. Klopotek
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 06:33
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/02; H01S3/03; H01S3/0305; H01S3/036; H01S3/09; H01S3/097; H01S3/0971; H01S3/14; H01S3/22; H01S3/223; H01S3/225
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
73 words
In a gas laser apparatus having a gaseous laser medium and excitation elements enclosed and supported with a chamber by structural elements, the improvement comprising: at least one structural element fabricated of a polymeric material and having a thin dielectric film covering all exposed surfaces of said polymeric element within said chamber, said film serving as a protective coating to retard outgassing of volatile organic molecules into said chamber from said polymeric material.
Claim 2
Dependent Claim
73 words
In a gas laser apparatus having a gaseous laser medium and excitation elements enclosed and supported with a chamber by structural elements, the improvement comprising: at least one structural element fabricated of a polymeric material and having a thin dielectric film covering all exposed surfaces of said polymeric element within said chamber, said film serving as a protective coating to retard outgassing of volatile organic molecules into said chamber from said polymeric material.
Claim 3
Dependent Claim
14 words
The apparatus of claim 1 wherein said gas laser apparatus is a TEA laser.
Claim 4
Dependent Claim
13 words
The apparatus of claim 1 wherein said gas laser is an excimer laser.
Claim 5
Dependent Claim
15 words
The apparatus of claim 1 wherein said gas laser is a molecular F 2 laser.
Claim 6
Dependent Claim
11 words
The apparatus of claim 1 wherein said thin film is non-hygroscopic.
Claim 7
Dependent Claim
19 words
The apparatus of claim 1 wherein said thin film can withstand thermal and mechanical expansions of said polymeric element.
Claim 8
Dependent Claim
85 words
Apparatus of claim 1 wherein said thin film comprises a material selected from the group consisting of Alumina (Al 2 O 3 ), Titania (TiO 2 ), Magnesium Chloride (MgCl 2 ), Hafnium Oxide (Hf 2 O 3 ), Magnesium Fluoride (MgF 2 ), Calcium Fluoride (CaF 2 ), Yitrium Fluoride (YF 3 ), Cadmium Fluoride (CdF 2 ), Lead Fluoride (PbF 2 ), Hafnium Fluoride (HfF 4 ), Strontium Fluoride (SrF 2 ), Thorium Fluoride (ThF 2 ), or Barium Fluoride (BaF 2 ).
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-04-05 | 1996-10-05 | 1997-04-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-04-05 | 2000-10-05 | 2001-04-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-04-05 | 2004-10-05 | 2005-04-06 | $7700.00 | Window Closed / Lapsed |