US5200112A
Expired / Lapsed
US
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Electrically conductive polymeric materials and uses thereof
Assignee: GlobalFoundries Inc
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Filing: 1991-06-20
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Granted: 1993-04-06
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Expires: 2011-06-20
Abstract
Abstract Structures containing conducting polymers and methods of fabrication thereof. Electrical conductivity can be induced in polymers selected from the group of substituted and unsubstituted polyanilines, polyparaphenylenvinyles, substituted and unsubstituted polythiophenes substituted and unsubstituted poly-p-phenylene sulfides, substituted polyfuranes, substituted polypyrroles, substituted polyselenophene, polyacetylines formed from soluble precursors, combinations thereof and blends thereof with other polymers. The polymer contains a doping precursor, selected from the group of onium salts, iodonium salts, triflate salts, borate salts and tosylate salts and sulfonoxylimides. Conductivity can be selectively induced in the polymer by selectivly doping upon selective exposure to a source of energy such as electromagnetic radiation, an electron beam and heat. The electrically conductive polymers of the present invention are useful as electron discharge layers for electron beam applications, such as, SEM observations, as electromagnetic interference coatings on dielectric surfaces and as electron beam resist which acts as a discharge layer.
Inventors
- 👤 Marie Angelopoulos
- 👤 Wu-Song Huang
- 👤 Richard D. Kaplan
- 👤 Marie-Annick Le Corre
- 👤 Stanley E. Perreault
- 👤 Jane M. Shaw
- 👤 Michel R. Tissier
- 👤 George F. Walker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 16:27
CPC Classifications
H; H05; H05K; H05K9/00; H05K9/0073; H05K9/0079; C; C08; C08G; C08G61/00; C08G61/12; H01; H01B; H01B1/00; H01B1/06; H01B1/12; H01B1/124; H01B1/125; H01B1/127; H01B1/128; H01J; H01J29/00; H01J29/86; H01J29/867; H01J29/868; H05K9/0081; H10; H10W; H10W42/00; H10W42/60; H10W70/00; H10W70/60; H10W70/67; H10W70/69
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
131 words
A method comprising: forming a solid solution containing a doping precursor and a polymer selected from the group consisting of substituted or unsubstituted polyparaphenylenevinylenes, polyanilines, polyazines, polythiophenes, poly-p-phenylene sulfides, polyfuranes, polypyrroles, polyselenophene, polyacetylenes formed from soluble precursors and combinations thereof; and selectively exposing regions of said solid solution to a source of energy for a sufficient time to cause said dopant precursor to transform to a dopant capable of inducing electrical conductivity within said polymer within said selectively exposed regions; the concentrations of said polymer and said dopant precursor being sufficient for said selectively exposed regions to be electrically conductive; and exposing said solid solution to a solvent to dissolve those regions not exposed to said source of energy, said regions exposed to said source of energy substantially not being dissolved.
Claim 2
Independent Claim
131 words
A method comprising: forming a solid solution containing a doping precursor and a polymer selected from the group consisting of substituted or unsubstituted polyparaphenylenevinylenes, polyanilines, polyazines, polythiophenes, poly-p-phenylene sulfides, polyfuranes, polypyrroles, polyselenophene, polyacetylenes formed from soluble precursors and combinations thereof; and selectively exposing regions of said solid solution to a source of energy for a sufficient time to cause said dopant precursor to transform to a dopant capable of inducing electrical conductivity within said polymer within said selectively exposed regions; the concentrations of said polymer and said dopant precursor being sufficient for said selectively exposed regions to be electrically conductive; and exposing said solid solution to a solvent to dissolve those regions not exposed to said source of energy, said regions exposed to said source of energy substantially not being dissolved.
Claim 3
Dependent Claim
12 words
The method of claim 1, wherein said source of energy is heat.
Claim 4
Dependent Claim
26 words
The method of claim 1 wherein said doping precursor is selected from the group consisting of onium salts, triflate salts, borate salts, tosylate salts and sulfonyloxyimides.
Claim 5
Dependent Claim
28 words
The method of claim 1, wherein said solvent is selected from the group consisting of NMP, DMSO, DMF, CHCl 3 , CH 2 Cl 2 and aqueous base.
Claim 6
Dependent Claim
13 words
The method of claim 1, wherein said source of energy is electromagnetic radiation.
Claim 7
Dependent Claim
14 words
The method of claim 1, wherein said source of energy is an electron beam.
Claim 8
Independent Claim
129 words
A method comprising: forming a solid solution containing a doping precursor and a polymer selected from the group consisting of substituted and unsubstituted polyparaphenylenevinylenes, polyanilines, polyazines, polythiophenes, poly-p-phenylene sulfides, polyfuranes, polypyrroles, polyselenophene, polyacetylenes formed from soluble precursors and combinations thereof; and selectively exposing regions of said solid solution to a source of energy for a sufficient time to cause said dopant precursor to transform to a dopant capable of inducing electrical conductivity within said polymer within said selectively exposed regions; the concentrations of said polymer and said dopant precursor being sufficient for said selectively exposed regions to be electrically conductive; said solid solution is disposed on a workpiece which is exposed to electron beam radiation, said solid solution acts as an electrical discharge layer for said electron beam irradiation.
Claim 9
Independent Claim
129 words
A method comprising: forming a solid solution containing a doping precursor and a polymer selected from the group consisting of substituted and unsubstituted polyparaphenylenevinylenes, polyanilines, polyazines, polythiophenes, poly-p-phenylene sulfides, polyfuranes, polypyrroles, polyselenophene, polyacetylenes formed from soluble precursors and combinations thereof; and selectively exposing regions of said solid solution to a source of energy for a sufficient time to cause said dopant precursor to transform to a dopant capable of inducing electrical conductivity within said polymer within said selectively exposed regions; the concentrations of said polymer and said dopant precursor being sufficient for said selectively exposed regions to be electrically conductive; said solid solution is disposed on a workpiece which is exposed to electron beam radiation, said solid solution acts as an electrical discharge layer for said electron beam irradiation.
Claim 10
Dependent Claim
16 words
The method of claim 7, wherein said electron beam is provided by a scanning electron microscope.
Claim 11
Dependent Claim
20 words
The method of claim 7, wherein said solution has a surface conductivity greater than about 10 -6 OHM -1 .
Claim 12
Independent Claim
60 words
A method comprising: providing a mixture of a triflate salt as a dopant precursor and a polyaniline; and heating said mixture for a sufficient time to generate a dopant from said precursor to induce electrical conductivity in said polyaniline; the concentration of said triflate salt and said polyaniline being sufficient for said polyaniline to become electrically conductive after said heating.
Claim 13
Independent Claim
60 words
A method comprising: providing a mixture of a triflate salt as a dopant precursor and a polyaniline; and heating said mixture for a sufficient time to generate a dopant from said precursor to induce electrical conductivity in said polyaniline; the concentration of said triflate salt and said polyaniline being sufficient for said polyaniline to become electrically conductive after said heating.
Claim 14
Independent Claim
137 words
A method comprising: providing a mixture of a polymer selected from the group consisting of a polythiophene and a polyparaphenylenevinylene and a dopant precursor material selected from the group consisting of an onium salts and sulfonyloxyimides; and selectively exposing said mixture to a source of energy selected from the group consisting of electromagnetic radiation and an electron beam for a sufficient time to cause said dopant precursor to transform to a dopant to induce electrical conductivity in said polymer; the concentration of said polymer and said precursor being sufficient for said polymer to become electrically conductive after said step of exposing to a source of energy; and exposing said solid solution to a solvent to dissolve those regions not exposed to said source of energy, said regions exposed to said source of energy substantially not being dissolved.
Claim 15
Independent Claim
137 words
A method comprising: providing a mixture of a polymer selected from the group consisting of a polythiophene and a polyparaphenylenevinylene and a dopant precursor material selected from the group consisting of an onium salts and sulfonyloxyimides; and selectively exposing said mixture to a source of energy selected from the group consisting of electromagnetic radiation and an electron beam for a sufficient time to cause said dopant precursor to transform to a dopant to induce electrical conductivity in said polymer; the concentration of said polymer and said precursor being sufficient for said polymer to become electrically conductive after said step of exposing to a source of energy; and exposing said solid solution to a solvent to dissolve those regions not exposed to said source of energy, said regions exposed to said source of energy substantially not being dissolved.
Claim 16
Independent Claim
138 words
A method comprising: providing a solution of a solvent, a polyaniline and a dopant precursor material selected from the group consisting of onium salts and sulfonyloxyimides; removing said solvent to form a solid solution of said polyaniline and said material; selectively exposing said solid solution to a source of energy selected from the group consisting of electromagnetic radiation and an electron beam for a sufficient time to generate a dopant from said precursor to induce electrical conductivity in said polyanilne; the concentration of said polyaniline and said precursor being sufficient for said polyaniline to become electrically conductive after said step of exposing to a source of energy; and exposing said solid solution to a solvent to dissolve those regions not exposed to said source of energy, said regions exposed to said source of energy substantially not being dissolved.
Claim 17
Independent Claim
138 words
A method comprising: providing a solution of a solvent, a polyaniline and a dopant precursor material selected from the group consisting of onium salts and sulfonyloxyimides; removing said solvent to form a solid solution of said polyaniline and said material; selectively exposing said solid solution to a source of energy selected from the group consisting of electromagnetic radiation and an electron beam for a sufficient time to generate a dopant from said precursor to induce electrical conductivity in said polyanilne; the concentration of said polyaniline and said precursor being sufficient for said polyaniline to become electrically conductive after said step of exposing to a source of energy; and exposing said solid solution to a solvent to dissolve those regions not exposed to said source of energy, said regions exposed to said source of energy substantially not being dissolved.
Claim 18
Independent Claim
109 words
A method comprising: providing a polymer having a partially conjugated π system, said polymer being a dielectric; providing a solution of a solvent, said polymer and a material providing a doping precursor; removing said solvent to form a solid solution of said polymer and said material; exposing said solid solution to a source of energy sufficient to cause said doping precursor to generate a dopant to extend the π conjugated system to induce electrical conductivity in said polymer; and exposing said solid solution to a solvent to dissolve those regions not exposed to said source of energy, said regions exposed to said source of energy substantially not being dissolved.
Claim 19
Independent Claim
109 words
A method comprising: providing a polymer having a partially conjugated π system, said polymer being a dielectric; providing a solution of a solvent, said polymer and a material providing a doping precursor; removing said solvent to form a solid solution of said polymer and said material; exposing said solid solution to a source of energy sufficient to cause said doping precursor to generate a dopant to extend the π conjugated system to induce electrical conductivity in said polymer; and exposing said solid solution to a solvent to dissolve those regions not exposed to said source of energy, said regions exposed to said source of energy substantially not being dissolved.
Claim 20
Independent Claim
53 words
A method comprising: providing a surface at least a part of which is a dielectric; disposing on at least a part of said surface a nonmetallic electrically conductive material; and exposing said surface with said nonmetallic conductive material thereon to an electron beam, said nonmetallic material substantially preventing charge accumulation on said surface.
Claim 21
Independent Claim
53 words
A method comprising: providing a surface at least a part of which is a dielectric; disposing on at least a part of said surface a nonmetallic electrically conductive material; and exposing said surface with said nonmetallic conductive material thereon to an electron beam, said nonmetallic material substantially preventing charge accumulation on said surface.
Claim 22
Dependent Claim
13 words
The method of claim 14, wherein said nonmetallic material is a polymeric material.
Claim 23
Dependent Claim
20 words
The method of claim 14, wherein the conductivity of said material is greater than about 10 -6 OHM -1 .
Claim 24
Dependent Claim
57 words
The method of claim 14, wherein said nonmetallic electrically conductive material is selected from the group consisting of substituted and unsubstituted polyparaphenylenevinylenes, polythiophenes, poly-p-phenylene sulfides, polyfixiones, polypyrroles, polyselenophene, polyacetylenes formed from soluble precursors, combinations thereof and containing a dissociated doping precursor selected from the group consisting of onium salts, triflate salts, borate salts, tosylate salts and sulfonyloxyimides.
Claim 25
Independent Claim
151 words
A method comprising: forming a solid solution containing a doping precursor and a polymer selected from the group consisting of substituted or unsubstituted polyparaphenylenevinylenes, polyanilines, polyazines, polythiophenes, poly-p-phenylene sulfides, polyfuranes, polypyrroles, polyselenophene, polyacetylenes formed from soluble precursors and combinations thereof; said doping precursor being selected from the group consisting of onium salts, triflate salts, borate salts, tosylate salts and sulfonyloxyimides; selectively exposing said solid solution to a source of energy for a sufficient time and of sufficient energy to cause said dopant precursor to transform to a dopant capable of inducing electrical conductivity within said polymer within said selectively exposed regions; the concentration of said polymer and said dopant precursor being sufficient for said exposed regions to be electrically conductive; and exposing said solid solution to a solvent to dissolve those regions not exposed to said source of energy, said regions exposed to said source of energy substantially not being dissolved.
Claim 26
Independent Claim
151 words
A method comprising: forming a solid solution containing a doping precursor and a polymer selected from the group consisting of substituted or unsubstituted polyparaphenylenevinylenes, polyanilines, polyazines, polythiophenes, poly-p-phenylene sulfides, polyfuranes, polypyrroles, polyselenophene, polyacetylenes formed from soluble precursors and combinations thereof; said doping precursor being selected from the group consisting of onium salts, triflate salts, borate salts, tosylate salts and sulfonyloxyimides; selectively exposing said solid solution to a source of energy for a sufficient time and of sufficient energy to cause said dopant precursor to transform to a dopant capable of inducing electrical conductivity within said polymer within said selectively exposed regions; the concentration of said polymer and said dopant precursor being sufficient for said exposed regions to be electrically conductive; and exposing said solid solution to a solvent to dissolve those regions not exposed to said source of energy, said regions exposed to said source of energy substantially not being dissolved.
Claim 27
Independent Claim
100 words
A method comprising: providing a surface at least a part of which is a dielectric; disposing on at least a part of said surface a polymeric nonmetallic electrically conductive material selected from the group consisting of substituted and unsubstituted polyparaphenylenevinylenes, polythiophenes, poly-p-phenylene sulfides, polyfuranes, polypyrroles, polyselenophene, polyacetylenes formed from soluble precursors and combinations thereof and containing a dissociated doping precursor selected from the group consisting of onium salts, triflate salts, borate salts, tosylate salts and sulfonyloxyimides; and exposing said surface with said nonmetallic conductive material thereon to an electron beam, said nonmetallic material substantially preventing charge accumulation on said surface.
Claim 28
Independent Claim
100 words
A method comprising: providing a surface at least a part of which is a dielectric; disposing on at least a part of said surface a polymeric nonmetallic electrically conductive material selected from the group consisting of substituted and unsubstituted polyparaphenylenevinylenes, polythiophenes, poly-p-phenylene sulfides, polyfuranes, polypyrroles, polyselenophene, polyacetylenes formed from soluble precursors and combinations thereof and containing a dissociated doping precursor selected from the group consisting of onium salts, triflate salts, borate salts, tosylate salts and sulfonyloxyimides; and exposing said surface with said nonmetallic conductive material thereon to an electron beam, said nonmetallic material substantially preventing charge accumulation on said surface.
References Cited (Backward Citations)
EP0261286A1
Cited
US5004560A
Cited
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