US5193289A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for measuring the thickness of thin layers
Assignee: Individual
•
Filing: 1992-04-23
•
Granted: 1993-03-16
•
Expires: 2012-04-23
Abstract
Abstract A long arm bears a probe at its end and is arranged in such a way that it can swivel by small angular amounts. This low-mass and slowly movable system is protected by a protective device from which it emerges only partly during the measuring operation. A lowering device which both decouples and entrains, interacts with a damping element. An article to be measured is pushed onto the protective device, an actuating device is pressed and the probe slowly emerges from the protective device and ultimately rests in a defined manner and with adequately low force on a layer of the article.
Inventors
- 👤 Helmut Fischer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 10:03
CPC Classifications
G; G01; G01B; G01B3/00; G01B3/002; G01B3/008; G01B5/00; G01B5/02; G01B5/06; G01B5/066
Claims Analysis
Total Claims: 64
Claim 1
Independent Claim
143 words
Apparatus for measuring the thickness of thin layers comprising: a probe, guide means for gently setting down said probe perpendicularly on a layer, an electric line connected to said probe, a flexurally rigid base, fastening means fixedly connected to said base, said fastening means bearing a long protective means having an inside with a protective space, resting means between said protective means and said base, an intermediate space being provided between said protective means and said resting means, a balance beam having at least a first arm that runs at least partially in said protective means and bears said probe, a balance beam bearing that bears said first arm, lowering means operably connected to said balance beam for slowly lowering said probe out of said protective space, and damping means operably connected to said balance beam for damping movement of said balance beam.
Claim 2
Dependent Claim
143 words
Apparatus for measuring the thickness of thin layers comprising: a probe, guide means for gently setting down said probe perpendicularly on a layer, an electric line connected to said probe, a flexurally rigid base, fastening means fixedly connected to said base, said fastening means bearing a long protective means having an inside with a protective space, resting means between said protective means and said base, an intermediate space being provided between said protective means and said resting means, a balance beam having at least a first arm that runs at least partially in said protective means and bears said probe, a balance beam bearing that bears said first arm, lowering means operably connected to said balance beam for slowly lowering said probe out of said protective space, and damping means operably connected to said balance beam for damping movement of said balance beam.
Claim 3
Dependent Claim
19 words
The apparatus as claimed in claim 1, wherein said base comprises a metal containing at least a little iron.
Claim 4
Dependent Claim
15 words
The apparatus as claimed in claim 1, wherein said base comprises a light metal alloy.
Claim 5
Dependent Claim
23 words
The apparatus as claimed in claim 1, wherein said base is an extruded metal tube having an oblong plane on its upper side.
Claim 6
Dependent Claim
15 words
The apparatus as claimed in claim 4, wherein said metal tube is a rectangular tube.
Claim 7
Dependent Claim
23 words
The apparatus as claimed in claim 1, wherein said fastening means is at least partly a rigid wall fixedly connected to said base.
Claim 8
Dependent Claim
24 words
The apparatus as claimed in claim 1, wherein said protective means is held in said fastening means over a relatively long extent without backlash.
Claim 9
Dependent Claim
18 words
The apparatus as claimed in claim 1, wherein said protective means is held removably in said fastening means.
Claim 10
Dependent Claim
29 words
The apparatus as claimed in claim 6, wherein said wall holds said protective means and said wall is at least partly as thick as the protective means holding length.
Claim 11
Dependent Claim
18 words
The apparatus as claimed in claim 1, wherein said protective means is releasably secured in said fastening means.
Claim 12
Dependent Claim
25 words
The apparatus as claimed in claim 1, wherein said protective means can be drawn out of said fastening means in the direction of said probe.
Claim 13
Dependent Claim
27 words
The apparatus as claimed in claim 1, wherein said fastening means has a slit through which said arm can pass, at least with said protective means removed.
Claim 14
Dependent Claim
15 words
The apparatus as claimed in claim 1, wherein said protective means has a hollow profile.
Claim 15
Dependent Claim
14 words
The apparatus as claimed in claim 13, wherein said hollow profile is a channel.
Claim 16
Dependent Claim
14 words
The apparatus as claimed in claim 13, wherein said hollow profile is a tube.
Claim 17
Dependent Claim
15 words
The apparatus as claimed in claim 13, wherein said hollow profile is a round tube.
Claim 18
Dependent Claim
16 words
The apparatus as claimed in claim 16, wherein said hollow profile is a circular round tube.
Claim 19
Dependent Claim
16 words
The apparatus as claimed in claim 1, wherein said protective means protrudes beyond said first arm.
Claim 20
Dependent Claim
25 words
The apparatus as claimed in claim 1, wherein said protective means has an opening that can be at least partly crossed through by said probe.
Claim 21
Dependent Claim
18 words
The apparatus as claimed in claim 19, wherein only one opening is provided for passage of said probe.
Claim 22
Dependent Claim
21 words
The apparatus as claimed in claim 1, wherein said protective means is comprised at least predominantly of a non ferrous metal.
Claim 23
Dependent Claim
18 words
The apparatus as claimed in claim 21, wherein said protective means is comprised at least predominantly of brass.
Claim 24
Dependent Claim
20 words
The apparatus as claimed in claim 21, wherein said protective means is comprised at least predominantly of a light metal.
Claim 25
Dependent Claim
40 words
The apparatus as claimed in claim 1, wherein said protective means is comprised in the region of said probe, at least predominantly of an electrically nonconductive material and has an opening in said nonconductive material for passage of said probe.
Claim 26
Dependent Claim
12 words
The apparatus as claimed in claim 24, wherein said material is plastic.
Claim 27
Dependent Claim
22 words
The apparatus as claimed in claim 1, wherein said protective means has an end region having at least partly a contrasting color.
Claim 28
Dependent Claim
25 words
The apparatus as claimed in claim 1, wherein said balance beam comprises a second arm, and said first arm is longer than said second arm.
Claim 29
Dependent Claim
22 words
The apparatus as claimed in claim 1, wherein said balance beams comprises said first arm and a second arm in one piece.
Claim 30
Dependent Claim
24 words
The apparatus as claimed in claim 1, wherein said first arm is at least partly hollow and bears said electric line for said probe.
Claim 31
Dependent Claim
15 words
The apparatus as claimed in claim 1, wherein said first arm is a capillary tube.
Claim 32
Dependent Claim
21 words
The apparatus as claimed in claim 1, wherein said first arm is comprised at least predominantly of an electrically nonconductive material.
Claim 33
Dependent Claim
18 words
The apparatus as claimed in claim 31, wherein said first arm is comprised at least predominantly of brass.
Claim 34
Dependent Claim
20 words
The apparatus as claimed in claim 31, wherein said first arm is comprised at least predominantly of a light metal.
Claim 35
Dependent Claim
16 words
The apparatus as claimed in claim 1, wherein said first arm is longer than 10 cm.
Claim 36
Dependent Claim
16 words
The apparatus as claimed in claim 1, wherein said first arm is 25 cm.±10 cm. long.
Claim 37
Dependent Claim
24 words
The apparatus as claimed in claim 1, wherein said electric line connects with said balance beam in the region of said balance beam bearing.
Claim 38
Dependent Claim
19 words
The apparatus as claimed in claim 1, wherein said balance beam bearing is fixedly connected to said balance beam.
Claim 39
Dependent Claim
34 words
The apparatus as claimed in claim 1, wherein said balance beam bearing has two bearing points that are perpendicular with respect to said balance beam and are spaced approximately the width of said base.
Claim 40
Dependent Claim
23 words
The apparatus as claimed in claim 1, wherein said balance beam bearing has at least two clamping portions for clamping said balance beam.
Claim 41
Dependent Claim
34 words
The apparatus as claimed in claim 1, wherein in the middle of said balance beam bearing, a hole is provided in said first arm through which hole said electric line enters said first arm.
Claim 42
Dependent Claim
24 words
The apparatus as claimed in claim 1, wherein said lowering means lowers said probe in the range of 5 to 0.5 degrees of angle.
Claim 43
Dependent Claim
24 words
The apparatus as claimed in claim 41, wherein said lowering means lowers said probe in the range of 1°, +2°, -0.5 degrees of angle.
Claim 44
Dependent Claim
24 words
The apparatus as claimed in claim 1, comprising a force generating means acting on said balance beam at least for lowering said balance beam.
Claim 45
Dependent Claim
15 words
The apparatus as claimed in claim 43, wherein said force generating means uses magnetic force.
Claim 46
Dependent Claim
17 words
The apparatus as claimed in claim 44, wherein said magnetic force is the force of permanent magnets.
Claim 47
Dependent Claim
19 words
The apparatus as claimed in claim 45, wherein said magnetic force is the magnetic gravitational force of permanent magnets.
Claim 48
Dependent Claim
28 words
The apparatus as claimed in claim 1, comprising a force generating means that acts on said balance beam at least essentially symmetrically with respect to said balance beam.
Claim 49
Dependent Claim
55 words
The apparatus as claimed in claim 46, wherein at least a first magnet and a counterpart can move in the range of attraction of said first magnet relative to each other essentially parallel with respect to swivelling movement of said balance beam, one of said magnet and said counterpart being fastened to said balance beam.
Claim 50
Dependent Claim
22 words
The apparatus as claimed in claim 48, wherein said counterpart is a second magnet that is polarized in the direction of attraction.
Claim 51
Dependent Claim
48 words
The apparatus as claimed in claim 48, further comprising a fork that can move up and down and having prongs that are movable at least essentially parallel with respect to swivelling movement of said balance beam, wherein two magnets are provided on said balance beam and said fork.
Claim 52
Dependent Claim
20 words
The apparatus as claimed in claim 48, wherein said counterpart is within a predetermined range of distance from said magnet.
Claim 53
Dependent Claim
14 words
The apparatus according to claim 51, wherein said distance is 1 to 15 mm.
Claim 54
Dependent Claim
14 words
The apparatus as claimed in claim 52, wherein said distance is 4 mm+60% 40%.
Claim 55
Dependent Claim
13 words
The apparatus as claimed in claim 45, wherein said magnets are ferrite magnets.
Claim 56
Dependent Claim
52 words
The apparatus as claimed in claim 50, wherein said prongs are seated on an axle that can swivel arbitrarily by an angular amount that is greater than the lowering swivelling movement of said balance beam but never allows the force required for setting said probe down on said layer to break away.
Claim 57
Dependent Claim
44 words
The apparatus as claimed in claim 55, wherein said axle is connected to a manually operable actuating lever, and a first stop prevents movement of said prongs at least in the lowering direction of said first arm beyond the breaking away of said force.
Claim 58
Dependent Claim
19 words
The apparatus as claimed in claim 55, wherein a second stop determines the maximum raising of said first arm.
Claim 59
Dependent Claim
16 words
The apparatus as claimed in claim 55, wherein said axle is situated underneath said balance beam.
Claim 60
Dependent Claim
16 words
The apparatus as claimed in claim 1, wherein said lowering means acts on said first arm.
Claim 61
Dependent Claim
16 words
The apparatus as claimed in claim 1, wherein said damping means comprises a pneumatic damping element.
Claim 62
Dependent Claim
17 words
The apparatus as claimed in claim 60, wherein said pneumatic damping element comprises a piston and cylinder.
Claim 63
Dependent Claim
28 words
The apparatus as claimed in claim 1, wherein said balance beam comprises said first arm and a second arm, and said damping means acts on said second arm.
Claim 64
Dependent Claim
28 words
The apparatus as claimed in claim 1, wherein said balance beam comprises said first arm and a second arm, and a counterweight is fastened to said second arm.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-03-15 | 1996-09-14 | 1997-03-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-03-15 | 2000-09-14 | 2001-03-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-03-15 | 2004-09-14 | 2005-03-16 | $7700.00 | Window Closed / Lapsed |