Method and apparatus for surface roughness measurement using laser diffraction pattern

Claim 2

In a non-contact method for analyzing surface roughness utilizing a vision system, the steps comprising: (a) directing onto the surface of a workpiece at a specific angle of incidence a beam of collimated monochromatic light and thereby producing a diffraction pattern in the light reflected from said surface; (b) capturing the image of the reflected diffraction pattern in the reflected light on a mirror and reflecting it onto a display screen; (c) converting the diffraction pattern image displayed on said screen into analog signals; (d) converting said analog signals into digital data; (e) determining the intensity of the captured image from said digital data; (f) comparing the data on the determined intensity of the captured image with data on intensity from calibrated standards of surface roughness; and (g) determining the surface roughness of said workpiece from said comparison.

Claim 3

The non-contact method for analyzing surface roughness in accordance with claim 1 wherein said analog signals are converted into digital data by determination of pixels per unit length of the workpiece surface.

Claim 4

The non-contact method for analyzing surface roughness in accordance with claim 2 wherein the pixels utilized in said determination are only those above a predetermined brightness threshhold value.

Claim 5

The non-contact method for analyzing surface roughness in accordance with claim 1 wherein said conversion of said analog signals is effected by apparatus including a rasterizing graphics adapter.

Claim 6

The non-contact method for analyzing surface roughness in accordance with claim 1 wherein said conversion into analog signals is effected by a video camera.

Claim 7

The non-contact method for analyzing surface roughness in accordance with claim 1 wherein said workpiece is moved a finite distance relative to said mirror and the source of said beam of collimated monochromatic light, and the surface roughness at multiple locations is determined.

Claim 8

The non-contact method for analyzing surface roughness in accordance with claim 6 wherein said surface roughness determined at multiple locations is averaged.

Claim 9

The non-contact method for analyzing surface roughness in accordance with claim 6 wherein said workpiece is moved in a direction perpendicular to the axis of said beam of collimated monochromatic light beam.

Claim 10

The non-contact method for analyzing surface roughness in accordance with claim 1 wherein said workpiece has an engineering surface and said light beam is directed onto said workpiece perpendicular to the lay of the engineering surface.

Claim 11

The non-contact method for analyzing surface roughness in accordance with claim 1 wherein said workpiece has an engineering surface and said light beam is directed onto said workpiece tangential to the lay of the engineering surface.

Claim 12

The non-contact method for analyzing surface roughness in accordance with claim 10 wherein said comparison is made with standards calibrated perpendicular to the lay and the data are modified by a mathematical formula.

Claim 13

The non-contact method for analyzing surface roughness in accordance with claim 11 wherein said mathematical formula is ##EQU3## where K=A/2[1+cos[2θ+180]] A=constant θ=angle between incident beam and the lay of workpiece B 1 =highest calibrated surface roughness B 2 =lowest calibrated surface roughness Y 1 =frequency intensity of B 1 Y 2 =frequency intensity of B 2 Y 3 =frequency intensity of the measured workpiece

Claim 14

The non-contact method for analyzing surface roughness in accordance with claim 1 wherein the source of said beam of collimated monochromatic light produces a multiplicity of discrete laser beams impinging upon the surface of said workpiece at spaced points, and each producing a spaced diffraction pattern image upon said mirror and said screen, and the data from the multiple images is averaged and compared with the calibrated standards.

Claim 15

The non-contact method for analyzing surface roughness in accordance with claim 13 wherein said multiplicity of laser beams is provided by fiberoptic cables.

Claim 16

The non-contact method for analyzing surface roughness in accordance with claim 1 wherein the source of said beam of collimated monochromatic light includes a fiberoptic cable probe.

Claim 17

The non-contact method for analyzing surface roughness in accordance with claim 15 wherein said workpiece has a non-planar surface adjacent which the end of said probe is positioned to direct the laser beam onto portions of said surface.

Claim 18

In apparatus for non-contact analysis of surface roughness utilizing a vision system, the combination comprising: (a) a housing providing an inspection chamber with a workpiece support therein; (b) a laser beam generator for directing a beam of collimated monochromatic light onto the surface of an associated workpiece placed on said support at a specific angle of incidence, and thereby producing a diffraction pattern in the light reflected from the workpiece surface; (c) a mirror for capturing the image of the reflected diffraction pattern in the reflected light beam and reflecting said image; (d) a display screen for receiving the image of the reflected pattern from said mirror and displaying it; (e) a video camera focused on said screen for converting the diffraction pattern image displayed on said screen into analog signals; (f) means for converting said analog signals into digital data; (g) computer means for determining the intensity of the captured image from the digital data, for comparing the data on the determined intensity of the captured image with data on intensity from calibrated standards of surface roughness, and for determining the surface roughness of the workpiece from said comparison; and (h) means for displaying the results of such determination.

Claim 19

In apparatus for non-contact analysis of surface roughness utilizing a vision system, the combination comprising: (a) a housing providing an inspection chamber with a workpiece support therein; (b) a laser beam generator for directing a beam of collimated monochromatic light onto the surface of an associated workpiece placed on said support at a specific angle of incidence, and thereby producing a diffraction pattern in the light reflected from the workpiece surface; (c) a mirror for capturing the image of the reflected diffraction pattern in the reflected light beam and reflecting said image; (d) a display screen for receiving the image of the reflected pattern from said mirror and displaying it; (e) a video camera focused on said screen for converting the diffraction pattern image displayed on said screen into analog signals; (f) means for converting said analog signals into digital data; (g) computer means for determining the intensity of the captured image from the digital data, for comparing the data on the determined intensity of the captured image with data on intensity from calibrated standards of surface roughness, and for determining the surface roughness of the workpiece from said comparison; and (h) means for displaying the results of such determination.

Claim 20

The analyzing apparatus in accordance with claim 17 wherein said analog signal converting means determines pixels per unit length of the workpiece surface.

Claim 21

The analyzing apparatus in accordance with claim 18 wherein said converting means utilized in said determination converts only those pixels above a predetermined brightness threshhold value.

Claim 22

The analyzing apparatus in accordance with claim 17 wherein said means for conversion of said analog signals includes a rasterizing graphics adapter.