US5187347A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Susceptor electrode and method for making same
Assignee: NXP USA Inc
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Filing: 1991-01-28
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Granted: 1993-02-16
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Expires: 2011-01-28
Abstract
Abstract A composite electrode (10) that is used for conducting a modulated voltage in a plasma reactor. An electrically conductive non-oxidizing surface and an electrically conductive metal surface are electrically and mechanically joined together by threads (12 and 13) to form a composite electrode (10). The composite electrode (10) is used to make contact between a wafer holder and the plasma reactor when the wafer holder is at rest in a chamber of the reactor.
Inventors
- 👤 Anatoly Leef
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 15:37
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H05; H05H; H05H1/00; H05H1/24
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
117 words
A composite electrode for conducting a modulated voltage to a susceptor to generate a plasma discharge in a plasma reactor comprising: an electrically conductive non-oxidizing threaded shaft having a button contact on one end of the threaded shaft; and an electrically conductive metallic shaft with a first and a second end, the first end having screw threads, and the second end having an opening axially aligned to the center of the shaft, with the screw threads on walls of the opening, wherein the non-oxidizing threaded shaft and the screw threads on walls of the opening are joined by the screw threads, and wherein the first end of the electrically conductive metallic shaft is joined to the susceptor.
Claim 2
Dependent Claim
117 words
A composite electrode for conducting a modulated voltage to a susceptor to generate a plasma discharge in a plasma reactor comprising: an electrically conductive non-oxidizing threaded shaft having a button contact on one end of the threaded shaft; and an electrically conductive metallic shaft with a first and a second end, the first end having screw threads, and the second end having an opening axially aligned to the center of the shaft, with the screw threads on walls of the opening, wherein the non-oxidizing threaded shaft and the screw threads on walls of the opening are joined by the screw threads, and wherein the first end of the electrically conductive metallic shaft is joined to the susceptor.
Claim 3
Dependent Claim
46 words
A composite electrode for conducting a modulated voltage to a susceptor as claimed in claim 1 wherein the electrically conductive non-oxidizing threaded shaft having a button contact on one end of the threaded shaft is graphite and the metallic electrically conductive surface is a nickel alloy.
Claim 4
Dependent Claim
47 words
A composite electrode for conducting a modulated voltage to a susceptor as claimed in claim 1 wherein the electrically conductive non-oxidizing threaded shaft having a button contact on one end of the threaded shaft is silicon carbide and the metallic electrically conductive surface is a nickel alloy.
Claim 5
Dependent Claim
122 words
A composite susceptor electrode for conducting a modulated voltage from a chamber button contact to the susceptor electrode comprising: a metal shaft with a first and a second end, the first end having screw threads, the second end having an opening axially aligned to the center of the shaft, with screw threads on walls of the opening; a conductive non-oxidizing portion having a threaded shaft and a contact button, wherein the threaded shaft screws into the threaded opening of the metal shaft forming a composite susceptor electrode; and a chamber button contact, where the joined composite susceptor electrode having a susceptor attached contacts the chamber button contact for conducting a modulated voltage from the chamber button contact to the composite susceptor contact.
Claim 6
Dependent Claim
122 words
A composite susceptor electrode for conducting a modulated voltage from a chamber button contact to the susceptor electrode comprising: a metal shaft with a first and a second end, the first end having screw threads, the second end having an opening axially aligned to the center of the shaft, with screw threads on walls of the opening; a conductive non-oxidizing portion having a threaded shaft and a contact button, wherein the threaded shaft screws into the threaded opening of the metal shaft forming a composite susceptor electrode; and a chamber button contact, where the joined composite susceptor electrode having a susceptor attached contacts the chamber button contact for conducting a modulated voltage from the chamber button contact to the composite susceptor contact.
Claim 7
Dependent Claim
47 words
A composite susceptor electrode for conducting a modulated voltage from a chamber button contact to the susceptor electrode as claimed in claim 4 wherein the conductive non-oxidizing portion having a threaded shaft and a contact button is silicon carbide and the metal shaft is a nickel alloy.
Claim 8
Dependent Claim
44 words
A composite susceptor electrode for conducting a modulated voltage from a chamber button contact to the susceptor electrode as claimed in claim 4 wherein the conductive non-oxidizing portion having a threaded shaft and a contact button is graphite and the metal shaft nickel alloy.
Claim 9
Independent Claim
133 words
A method for improving contact efficiency of a radio frequency electrode: providing an electrically conductive metallic shaft with a first and second end, the first end having screw threads and the second end having an opening axially aligned to the center of the shaft, with screw threads on the opening's walls; providing an electrically conductive non-oxidizing shaft having a threaded shaft and a contact button; threading the metallic shaft and non-oxidizing shaft together so that a good mechanical and electrical contact is made between the electrically conductive metallic shaft and electrically conductive non-oxidizing materials providing a susceptor; and threading the first end of the electrically conductive metallic shaft into the susceptor, thereby securing an electrical and mechanical connection between the electrically conductive metal shaft with the electrically conductive non-oxidizing shaft to the susceptor.
Claim 10
Independent Claim
133 words
A method for improving contact efficiency of a radio frequency electrode: providing an electrically conductive metallic shaft with a first and second end, the first end having screw threads and the second end having an opening axially aligned to the center of the shaft, with screw threads on the opening's walls; providing an electrically conductive non-oxidizing shaft having a threaded shaft and a contact button; threading the metallic shaft and non-oxidizing shaft together so that a good mechanical and electrical contact is made between the electrically conductive metallic shaft and electrically conductive non-oxidizing materials providing a susceptor; and threading the first end of the electrically conductive metallic shaft into the susceptor, thereby securing an electrical and mechanical connection between the electrically conductive metal shaft with the electrically conductive non-oxidizing shaft to the susceptor.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-02-16 | 1996-08-17 | 1997-02-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-02-16 | 2000-08-17 | 2001-02-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-02-16 | 2004-08-17 | 2005-02-16 | $7700.00 | Window Closed / Lapsed |