US5179993A
Expired / Lapsed
US
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Method of fabricating anisometric metal needles and birefringent suspension thereof in dielectric fluid
Assignee: Raytheon Co
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Filing: 1991-03-26
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Granted: 1993-01-19
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Expires: 2011-03-26
Abstract
Abstract A grating (22) of narrow parallel ridges (24) is formed in the surface (26) of a substrate (20) made of a hard material such as silicon dioxide. Metal (40) is deposited onto the grating (22) perpendicular to the ridges (24) at an angle of approximately 45° to the surface (26) of the grating such that the metal (40) is deposited onto the top (24a) and one of the sides (24b) of the each of the ridges (24) to form generally L-shaped metal strips (12') thereon. The metal strips (12') are cut at periodic intervals along the ridges (24) to produce anisometric metal needles (12). The substrate (20) is immersed in a dielectric fluid (14), and ultrasonic energy is applied to cause the needles (12) to release from the substrate (20) into suspension in the fluid (14). The L-shape of the needles (12) makes them resistant to bending. The suspension ( 10) has birefringent properties similar to liquid crystals, but may be electrically switched at much higher speed. The index of refraction of the suspension (10) varies in accordance with the alignment of the needles (12), thereby enabling the direction and phase of an electromagnetic wave propagating through the suspension (10) to be controlled by varying the magnitude of the applied electric field.
Inventors
- 👤 Chan S. Bak
- 👤 Leroy J. Miller
- 👤 Camille I. Van Ast
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 14:36
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/225; C23C14/0005; C23C14/04; G; G02; G02F; G02F1/00; G02F1/01; G02F1/17; G02F1/172; Y; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12014; Y10T428/12021; Y10T428/12424; Y10T428/12431; Y10T428/12438; Y10T428/12458; Y10T428/12465; Y10T428/12493
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
90 words
A method of fabricating anisometric needles, comprising the steps of: (a) providing a substrate having a grating of parallel ridges formed in a surface thereof, each ridge having a top and first and second opposite sides; (b) depositing metal onto the grating at an angle selected such that said metal is deposited onto the tops and first sides of the ridges to form generally L-shaped metal strips; (c) cutting the metal strips at periodic intervals along the ridges to form said needles; and (d) removing said needles from the grating.
Claim 2
Independent Claim
90 words
A method of fabricating anisometric needles, comprising the steps of: (a) providing a substrate having a grating of parallel ridges formed in a surface thereof, each ridge having a top and first and second opposite sides; (b) depositing metal onto the grating at an angle selected such that said metal is deposited onto the tops and first sides of the ridges to form generally L-shaped metal strips; (c) cutting the metal strips at periodic intervals along the ridges to form said needles; and (d) removing said needles from the grating.
Claim 3
Dependent Claim
90 words
A method as in claim 1, in which step (a) comprises the substeps of: (e) providing the substrate as having said surface initially flat; (f) forming a layer of photoresist on said surface; (g) exposing the photoresist with an optical pattern corresponding to the grating; (h) developing the exposed photoresist to form a photoresist pattern corresponding to the grating; (i) etching said surface in areas of the photoresist pattern which were removed by development in step (h) to form the grating; and (j) removing the photoresist pattern from the grating.
Claim 4
Dependent Claim
16 words
A method as in claim 2, in which step (g) comprises generating the optical pattern holographically.
Claim 5
Dependent Claim
24 words
A method as in claim 2, in which step (e) comprises providing the substrate having the surface thereof formed of an oxide of silicon.
Claim 6
Dependent Claim
30 words
A method as in claim 1, in which said angle in step (b) is approximately 90° relative to the ridges and approximately 45° relative to the surface of the substrate.
Claim 7
Dependent Claim
21 words
A method as in claim 1, in which step (b) comprises depositing said metal onto the grating using electron beam evaporation.
Claim 8
Dependent Claim
43 words
A method as in claim 1, in which step (b) comprises depositing said metal onto the grating by depositing a first metal layer onto the tops and first sides of the ridges, and depositing a second metal layer onto the first metal layer.
Claim 9
Dependent Claim
28 words
A method as in claim 7, in which step (b) comprises depositing the first metal layer as including copper, and depositing the second metal layer as including aluminum.
Claim 10
Dependent Claim
38 words
A method as in claim 8, in which step (b) comprises depositing the first metal layer to a thickness of between approximately 10-100 Angstroms, and depositing the second metal layer to a thickness of between approximately 100-3,000 Angstroms.
Claim 11
Dependent Claim
121 words
A method as in claim 1, in which step (c) comprises the substeps of: (e) forming a layer of photoresist over the metal strips and exposed areas of the grating; (f) exposing the photoresist with an optical pattern of parallel lines which extend perpendicular to the ridges of the grating and are spaced from each other by said periodic intervals; (g) developing the exposed photoresist to form a photoresist pattern corresponding to said parallel lines; (h) etching through the metal strips in areas of the photoresist pattern which were removed by development in step (g) to thereby cut the metal strips and form said needles; and (i) removing the photoresist pattern from the metal strips and exposed areas of the grating.
Claim 12
Dependent Claim
25 words
A method as in claim 1, in which (d) comprises immersing the substrate in a solvent and applying ultrasonic energy to the solvent and substrate.
Claim 13
Independent Claim
111 words
A method of producing a suspension of anisometric needles in a dielectric fluid, comprising the steps of: (a) providing a substrate having a grating of parallel ridges formed in a surface thereof, each ridge having a top and first and second opposite sides; (b) depositing metal onto the grating at an angle selected such that said metal is deposited onto the tops and first sides of the ridges to form generally L-shaped metal strips; (c) cutting the metal strips at periodic intervals along the ridges to form said needles; (d) immersing the substrate in said fluid; and (e) causing said needles to release from the grating into suspension in said fluid.
Claim 14
Independent Claim
111 words
A method of producing a suspension of anisometric needles in a dielectric fluid, comprising the steps of: (a) providing a substrate having a grating of parallel ridges formed in a surface thereof, each ridge having a top and first and second opposite sides; (b) depositing metal onto the grating at an angle selected such that said metal is deposited onto the tops and first sides of the ridges to form generally L-shaped metal strips; (c) cutting the metal strips at periodic intervals along the ridges to form said needles; (d) immersing the substrate in said fluid; and (e) causing said needles to release from the grating into suspension in said fluid.
Claim 15
Dependent Claim
19 words
A method as in claim 12, in which (e) comprises applying ultrasonic energy to said fluid and the substrate.
Claim 16
Dependent Claim
38 words
A method as in claim 12, in which step (d) comprises providing said fluid as including a material selected from the group consisting of ketones, alcohols, esters, aliphatic and aromatic hydrocarbons, aliphatic and aromatic halocarbons, aldehydes, and amines.
Claim 17
Dependent Claim
24 words
A method as in claim 12, in which step (d) comprises providing said fluid as including an organic material having substantially no permanent dipole.
Claim 18
Dependent Claim
30 words
A method as in claim 15, in which step (b) comprises selecting said organic material from the group consisting of aliphatic hydrocarbons, aliphatic perfluorocarbons, and symmetrically substituted organic molecular materials.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-01-19 | 1996-07-20 | 1997-01-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-01-19 | 2000-07-20 | 2001-01-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-01-19 | 2004-07-20 | 2005-01-19 | $7700.00 | Window Closed / Lapsed |