US5176756A
Expired / Lapsed
US
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Method for fabricating a semiconductor device including a step for cleaning a semiconductor substrate
Assignee: Fujitsu VLSI Ltd
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Filing: 1991-08-28
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Granted: 1993-01-05
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Expires: 2011-08-28
Abstract
Abstract A method for fabricating a semiconductor device comprises the steps of cleaning a semiconductor substrate in a cleaning liquid essentially consisted of a mixture of an ammonia water having a composition of 29 percent by weight, a hydrogen peroxide aqueous solution having a composition of 31 percent by weight and a deionized water. The cleaning liquid contains the ammonia water and the hydrogen peroxide aqueous solution with respective volume parts such that the volume part of the ammonia is set equal to or smaller than 30 parts with respect to the deionized water of 1000 parts, the volume part of the ammonia water is set equal to or smaller than the volume part of the hydrogen peroxide aqueous solution, and the volume part of the hydrogen peroxide aqueous solution is set equal to or smaller than 100 parts with respect to the deionized water of 1000 parts. The volume part of the hydrogen peroxide aqueous solution is further set equal to or smaller than a boundary composition Y2 represented as Y.sub.2 =0.25 X.sub.3 -2.75 X.sub.2 +13.5 X-10, where X represents the volume part of the ammonia water in 1000 parts of the deionized water.
Inventors
- 👤 Kazushi Nakashima
- 👤 Masanori Kobayashi
- 👤 Tsutomu Ogawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 14:35
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/20; H10P70/23; H10P70/10; H10P70/15
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
208 words
A method for fabricating a semiconductor device, comprising the steps of: cleaning a semiconductor substrate in a cleaning liquid essentially consisted of a mixture of an ammonia water having a composition of 29 percent by weight, a hydrogen peroxide aqueous solution having a composition of 31 percent by weight and a deionized water, said cleaning liquid containing the ammonia water and the hydrogen peroxide aqueous solution with respective volume parts such that the volume part of the ammonia water is set equal to or smaller than 30 parts with respect to the deionized water of 1000 parts, said volume part of the ammonia water being set equal to or smaller than the volume part of the hydrogen peroxide aqueous solution, said volume part of the hydrogen peroxide aqueous solution being set equal to or smaller than 100 parts with respect to the deionized water of 1000 parts, said volume part of the hydrogen peroxide aqueous solution being further set equal to or smaller than a boundary composition Y2 represented as Y.sub.2 =0.25X.sup.3 -2.75X.sup.2 +13.5X-10, where X represents the volume part of the ammonia water in 1000 parts of said deionized water; rinsing the semiconductor substrate that has been cleaned in the cleaning liquid; and drying the semiconductor substrate.
Claim 2
Independent Claim
208 words
A method for fabricating a semiconductor device, comprising the steps of: cleaning a semiconductor substrate in a cleaning liquid essentially consisted of a mixture of an ammonia water having a composition of 29 percent by weight, a hydrogen peroxide aqueous solution having a composition of 31 percent by weight and a deionized water, said cleaning liquid containing the ammonia water and the hydrogen peroxide aqueous solution with respective volume parts such that the volume part of the ammonia water is set equal to or smaller than 30 parts with respect to the deionized water of 1000 parts, said volume part of the ammonia water being set equal to or smaller than the volume part of the hydrogen peroxide aqueous solution, said volume part of the hydrogen peroxide aqueous solution being set equal to or smaller than 100 parts with respect to the deionized water of 1000 parts, said volume part of the hydrogen peroxide aqueous solution being further set equal to or smaller than a boundary composition Y2 represented as Y.sub.2 =0.25X.sup.3 -2.75X.sup.2 +13.5X-10, where X represents the volume part of the ammonia water in 1000 parts of said deionized water; rinsing the semiconductor substrate that has been cleaned in the cleaning liquid; and drying the semiconductor substrate.
Claim 3
Dependent Claim
36 words
A method as claimed in claim 1 in which said volume part of the hydrogen peroxide aqueous solution is set equal to or larger than 3 parts with respect to the deionized water of 1000 parts.
Claim 4
Dependent Claim
34 words
A method as claimed in claim 1 in which said volume part of the ammonia water is set equal to or larger than 1 part with respect to the deionized water of 1000 parts.
Claim 5
Dependent Claim
55 words
A method as claimed in claim 1 in which said volume part of the hydrogen peroxide aqueous solution is set equal to or larger than a boundary composition Y1 represented as Y1=4.64×10.sup.-3 X.sup.3 -6.22×10.sup.-2 X.sup.2 +1.52X+4.37 where X represents the volume part of the ammonia water with respect to the deionized water of 1000 parts.
Claim 6
Dependent Claim
29 words
A method as claimed in claim 1 in which said cleaning liquid is held at a temperature higher than 60° C. in the step of cleaning the semiconductor substrate.
Claim 7
Dependent Claim
32 words
A method as claimed in claim 1 in which said semiconductor substrate has a surface of crystal silicon, said cleaning liquid cleaning the surface of crystal silicon in said step of cleaning.
Claim 8
Dependent Claim
14 words
A method as claimed in claim 6 in which said semiconductor substrate comprises silicon.
Claim 9
Dependent Claim
32 words
A method as claimed in claim 1 in which said semiconductor substrate has a surface of silicon oxide, said cleaning liquid cleaning the surface of silicon oxide in said step of cleaning.
References Cited (Backward Citations)
JPS62139335A
Cited
JPH02307277A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-01-05 | 1996-07-06 | 1997-01-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-01-05 | 2000-07-06 | 2001-01-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-01-05 | 2004-07-06 | 2005-01-05 | $7700.00 | Window Closed / Lapsed |