US5175755A
Expired / Lapsed
US
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Use of a kumakhov lens for x-ray lithography
Assignee: X-Ray Optical Systems Inc
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Filing: 1991-04-01
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Granted: 1992-12-29
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Expires: 2011-04-01
Abstract
Abstract An X-ray lithography device which utilizes a Kumakhov lens is disclosed. This device is capable of using both small area sources and synchrotron sources. This device provides improved X-ray control, precision and accuracy. Also provided is a method of X-ray lithograph which incorporates a Kumakhov lens.
Inventors
- 👤 Muradin A. Kumakhov
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 19:29
CPC Classifications
G; G21; G21K; G21K1/00; B; B82; B82Y; B82Y10/00; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/7015; G03F7/70166; G03F7/70216; G03F7/70308; G21K1/06; G21K2201/00; G21K2201/06; G21K2201/068
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
8 words
An X-ray lithographic system comprising a Kumakhov lens.
Claim 2
Dependent Claim
8 words
An X-ray lithographic system comprising a Kumakhov lens.
Claim 3
Dependent Claim
18 words
A system of claim 1, wherein the Kumakhov lens is located between an X-ray source and a mask.
Claim 4
Dependent Claim
13 words
A system of claim 2, wherein the X-ray source is a point source.
Claim 5
Dependent Claim
13 words
A system of claim 2, wherein the X-ray source is a non-point source.
Claim 6
Dependent Claim
17 words
A system of claim 4, wherein the X-ray source is a synchrotron providing a horizontally divergent beam.
Claim 7
Dependent Claim
25 words
A system of claim 3, wherein the Kumakhov lens captures a divergent beam produced by the X-ray source and focuses it into a quasi-parallel beam.
Claim 8
Dependent Claim
35 words
A system of claim 3, wherein the Kumakhov lens has channeling elements of compound curvature which capture a divergent beam produced by the X-ray source and focus it into a quasi-parallel beam of higher intensity.
Claim 9
Dependent Claim
15 words
A system of claim 1, wherein the Kumakhov lens comprises a plurality of bent tubes.
Claim 10
Dependent Claim
16 words
A system of claim 8, wherein at least one bent tube is a bundle of capillaries.
Claim 11
Dependent Claim
30 words
A system of claim 2, where the lens to mask distance is sufficient to homogenize any difference in beam intensity caused by the discrete pattern of the tubes and capillaries.
Claim 12
Dependent Claim
26 words
A system of claim 2, wherein the X-ray source produces a beam and a filter is used to control the beam intensity across the beam cross-section.
Claim 13
Dependent Claim
21 words
A system of claim 5, wherein the Kumakhov lens collects the horizontally divergent beam and focuses it into a quasi-parallel beam.
Claim 14
Dependent Claim
13 words
A system of claim 1, wherein the Kumakhov lens performs energy band selection.
Claim 15
Dependent Claim
15 words
A system of claim 13, wherein the energy band selection is accomplished by selective absorption.
Claim 16
Dependent Claim
15 words
A system of claim 13, wherein the energy band selection is accomplished by selective transmission.
Claim 17
Dependent Claim
20 words
A system of claim 2, wherein the Kumakhov lens modifies the cross-section of a beam produced by the X-ray source.
Claim 18
Dependent Claim
20 words
A system of claim 2, wherein the Kumakhov lens changes the direction of a beam produced by the X-ray source.
Claim 19
Dependent Claim
17 words
A system of claim 2, wherein the Kumakhov lens splits a beam produced by the X-ray source.
Claim 20
Dependent Claim
17 words
A system of claim 1, where the Kumakhov lens is located between a mask and a resist.
Claim 21
Dependent Claim
15 words
A system of claim 19, wherein the Kumakhov lens reduces the cross-section of a beam.
Claim 22
Dependent Claim
38 words
A system of claim 19 further comprising a point source, a Kumakhov lens capable of capturing a divergent beam emitted by the point source, means for holding the mask, and a Kumakhov lens capable of reducing beam cross-section.
Claim 23
Dependent Claim
17 words
A system of claim 19, wherein the mask is incorporated into a Kumakhov lens in the system.
Claim 24
Independent Claim
30 words
A method for X-ray lithography, which comprises: providing a source of radiation; focusing the radiation from the source through a Kumakhov lens; and passing the focused radiation through a mask.
Claim 25
Independent Claim
30 words
A method for X-ray lithography, which comprises: providing a source of radiation; focusing the radiation from the source through a Kumakhov lens; and passing the focused radiation through a mask.
Claim 26
Dependent Claim
33 words
A method of claim 23 further comprising passing the radiation exiting the mask through a filter and through a second Kumakhov lens to narrow the beam, then contacting the radiation with a resist.
Claim 27
Independent Claim
54 words
A method for X-ray lithography, which comprises: providing a source of radiation; focusing the radiation from the source through a Kumakhov lens to form a quasi-parallel beam; focusing the quasi-parallel beam through a second Kumakhov lens to form a beam having an energy within a preselected band; and passing the beam through a mask.
Claim 28
Independent Claim
54 words
A method for X-ray lithography, which comprises: providing a source of radiation; focusing the radiation from the source through a Kumakhov lens to form a quasi-parallel beam; focusing the quasi-parallel beam through a second Kumakhov lens to form a beam having an energy within a preselected band; and passing the beam through a mask.
Claim 29
Dependent Claim
39 words
A method of claim 25 further comprising focusing the beam having an energy that is within a preselected band through a third Kumakhov lens to produce a beam having preselected shape prior to passing the beam through a mask.
References Cited (Backward Citations)
US5016267A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-12-29 | 1996-06-29 | 1996-12-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-12-29 | 2000-06-29 | 2000-12-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-12-29 | 2004-06-29 | 2004-12-29 | $7700.00 | Window Closed / Lapsed |