Semiconductor memory cell having high density structure

Claim 1

A semiconductor memory device formed on a semiconductor substrate comprising: a plurality of word lines, a plurality of bit lines, and a plurality of memory cells, each coupled to one of said word lines and one of said bit lines, a transistor having a gate, a first diffusion region, and a second diffusion region formed on an active region defined on a surface of said substrate, said active region being surrounded by an isolation region defined on said substrate, wherein an insulator film is formed on said isolation region, the gate of said transistor being formed of a part of an associated one of said word lines, the first diffusion region being connected to an associated one of said bit lines, a stacked cell capacitor being formed above said associated one of said word lines and said associated one of said bit lines, and having an upper electrode and a lower electrode, and means for connecting said lower electrode of said stacked capacitor to said second diffusion region, said connecting means including a local wiring, said local wiring having a first end portion connected to said second diffusion region with a first contact, said first contact being defined above said active region, said local wiring being extended beyond said active region over said insulator film to provide a second end portion located above said insulator film, said second end portion being connected to said lower electrode with a second contact, said second contact being defined above said isolation region laterally from said first contact in a direction parallel to the surface of said substrate, said bit line crossing said gate electrode and said local wiring above said active region.