Clean room arrangement

Claim 2

A clean room arrangement, comprising: a clean room having an upper portion and a lower portion, clean air being introduced into the clean room from the upper portion thereof, flowing downward and expelled from the clean room from the lower portion thereof; an air recirculation passage for recirculating the air of the lower portion of the clean room into the upper portion of the clean room; and convection air current generating means for generating an ascending flow of air current in the air recirculating passage, wherein the entire flow of recirculating air in the air recirculation passage is solely due to natural convection.

Claim 3

The arrangement of claim 1, wherein the clean room includes a filter provided in the upper portion of the clean room and a grating provided in the lower portion of the clean room, and the filter serves as a ceiling of the clean room and the grating serves as a floor of the clean room.

Claim 4

The arrangement of claim 2, wherein an air feed chamber is defined above the filter in the upper portion of the clean room, a air recirculation chamber is defined below the grating in the lower portion of the clean room, the air recirculation passage includes a duct connecting the air feed chamber with the air recirculation chamber and the warm heat source includes a heat exchanger mounted on the duct.

Claim 5

The arrangement of claim 3, wherein a warm water feed device is connected to the heat exchanger.

Claim 6

The arrangement of claim 4, wherein the warm water feed device includes a flow rate control valve for adjusting the flow rate of a heating medium introduced into the heat exchanger in order to change the speed of the ascending air in the duct.

Claim 7

The arrangement of claim 5, wherein an external air feed line is connected to the duct upstream of the heat exchanger such that external air may be added to the recirculating air.

Claim 8

The arrangment of claim 1, wherein the convection air current generating means includes a heat source.

Claim 9

A clean room arrangement, comprising: a clean room having an upper portion and a lower portion, air being introduced into the clean room from the upper portion thereof, flowing downward and expelled from the clean room from the lower portion thereof; a filter mounted in the upper portion of the clean room, air above the filter being introduced into the clean room after it is cleansed by the filter, the filter serving as a ceiling of the clean room; a grating mounted in the lower portion of the clean room, the air in the clean room flowing into the lower portion through the grating, the grating serving as a floor of the clean room; an air recirculation passage formed next to the clean room for recirculating the air of the lower portion of the clean room into the upper portion of the clean room; and convection air current generating means located in the air recirculation passage for generating an ascending flow of air current in the air recirculation passage, wherein the entire flow of recirculating air in the air recirculation passage is solely due to natural convection.

Claim 10

A clean room arrangement, comprising: a clean room having an upper portion and a lower portion, air being introduced into the clean room from the upper portion thereof, flowing downward and expelled from the clean room from the lower portion thereof; a filter mounted in the upper portion of the clean room, air above the filter being introduced into the clean room after it is cleansed by the filter, the filter serving as a ceiling of the clean room; a grating mounted in the lower portion of the clean room, the air in the clean room flowing into the lower portion through the grating, the grating serving as a floor of the clean room; an air recirculation passage formed next to the clean room for recirculating the air of the lower portion of the clean room into the upper portion of the clean room; and convection air current generating means located in the air recirculation passage for generating an ascending flow of air current in the air recirculation passage, wherein the entire flow of recirculating air in the air recirculation passage is solely due to natural convection.

Claim 11

The arrangement of claim 8, wherein the heat source includes a heat exchanger, the heat exchanger is provided with a heating medium feeding device for supplying a heating medium into the heat exchanger and the heating medium feeding device has means for controlling a flow rate of the heating medium.

Claim 12

The arrangement of claim 8, wherein the convection air current generating means includes a heat source.

Claim 13

A clean room arrangement, comprising: a clean room having an upper portion and a lower portion, air being introduced into the clean room from the upper portion thereof, flowing downward and expelled from the clean room from the lower portion thereof; a filter mounted in the upper portion of the clean room, air above the filter being introduced into the clean room after it is cleansed by the filter, the filter serving as a ceiling of the clean room; a grating mounted in the lower portion of the clean room, the air in the clean room flowing into the lower portion through the grating, the grating serving as a floor of the clean room; an air recirculation passage for connecting the lower portion of the clean room with the upper portion of the clean room; convection air current generating means located in the air recirculation passage for generating an ascending flow of air current in the air recirculation passage, wherein the entire flow of recirculating air in the air recirculation passage is solely due to natural convection; and a cooler heat source located in the air feed changer for assisting a formation of descending flow of air introduced into the clean room from the air feed chamber.

Claim 14

A clean room arrangement, comprising: a clean room having an upper portion and a lower portion, air being introduced into the clean room from the upper portion thereof, flowing downward and expelled from the clean room from the lower portion thereof; a filter mounted in the upper portion of the clean room, air above the filter being introduced into the clean room after it is cleansed by the filter, the filter serving as a ceiling of the clean room; a grating mounted in the lower portion of the clean room, the air in the clean room flowing into the lower portion through the grating, the grating serving as a floor of the clean room; an air recirculation passage for connecting the lower portion of the clean room with the upper portion of the clean room; convection air current generating means located in the air recirculation passage for generating an ascending flow of air current in the air recirculation passage, wherein the entire flow of recirculating air in the air recirculation passage is solely due to natural convection; and a cooler heat source located in the air feed changer for assisting a formation of descending flow of air introduced into the clean room from the air feed chamber.

Claim 15

The arrangement of claim 10, wherein the warm heat source includes a heat exchanger, the heat exchanger is provided with a heating medium feeding device for supplying a heating medium into the heat exchanger and the heating medium feeding device has means for controlling a flow rate of the heating medium.

Claim 16

The arrangement of claim 10, wherein the cooler heat source includes a cooling heat exchanger extending along the filter, the cooling heat exchanger is provided with a cooling medium feeding device for supplying a cooling medium into the heat exchanger and the cooling medium feeding device has means for controlling the flow rate of the cooling medium.

Claim 17

The arrangement of claim 11, wherein the convection current generating means includes a heat source.

Claim 18

A clean room arrangement, comprising: a clean room having an upper portion and a lower portion, air being introduced into the clean room from the upper portion thereof, flowing downward and expelled from the clean room from the lower portion thereof; a filter mounted in the upper portion of the clean room, air above the filter being introduced into the clean room after it is cleansed by the filter, the filter serving as a ceiling of the clean room; a grating mounted in the lower portion of the clean room, the air in the clean room flowing into the lower portion through the grating, the grating serving as a floor of the clean room; an air recirculation passage for connecting the lower portion of the clean room with the upper portion of the clean room; convection air current generating means located in the air recirculation passage for generating an ascending flow of air current in the air recirculation passage, wherein the entire flow of recirculating air in the air recirculation passage is solely due to natural convection; and a cooler heat source located in the air feed changer for assisting a formation of descending flow of air introduced into the clean room from the air feed chamber.

Claim 19

A clean room arrangement, comprising: a clean room having an upper portion and a lower portion, air being introduced into the clean room from the upper portion thereof, flowing downward and expelled from the clean room from the lower portion thereof; a filter mounted in the upper portion of the clean room, air above the filter being introduced into the clean room after it is cleansed by the filter, the filter serving as a ceiling of the clean room; a grating mounted in the lower portion of the clean room, the air in the clean room flowing into the lower portion through the grating, the grating serving as a floor of the clean room; an air recirculation passage for connecting the lower portion of the clean room with the upper portion of the clean room; convection air current generating means located in the air recirculation passage for generating an ascending flow of air current in the air recirculation passage, wherein the entire flow of recirculating air in the air recirculation passage is solely due to natural convection; and a cooler heat source located in the air feed changer for assisting a formation of descending flow of air introduced into the clean room from the air feed chamber.

Claim 20

The arrangement of claim 15, wherein the warm heat source includes a heat exchanger, the heat exchanger is provided with a heating medium feeding device for supplying a heating medium into the heat exchanger and the heating medium feeding device has means for controlling a flow rate of the heating medium.

Claim 21

The arrangement of claim 16, wherein the cooler heat source includes a cooling heat exchanger extending along the filter, the cooling heat exchanger is provided with a cooling medium feeding device for supplying a cooling medium into the cooling heat exchanger and the cooling medium feeding device has means for controlling the flow rate of the cooling medium.

Claim 22

The arrangement of claim 15, wherein the convection air current generating means includes a warm heat source.