US5167452A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Transmission method to determine and control the temperature of wafers or thin layers with special application to semiconductors
Assignee: ITT Inc
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Filing: 1989-08-28
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Granted: 1992-12-01
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Expires: 2009-08-28
Abstract
Abstract A method of accurately determining the temperature of a thin layer of bandgap material without requiring contact to the layer involves the use of optical radiation through the layer and the detection of optical absorption by the layer. The relationship between the temperature varying bandgap energy and the resulting optical absorption characteristics provides an indication of temperature independent of ambient temperature. Apparatus for performing high quality temperature detection and control is also provided.
Inventors
- 👤 Avraham Amith
- 👤 Charles Naselli
- 👤 C. Scott Nevin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 23:51
CPC Classifications
G; G01; G01K; G01K11/00; G01K11/12
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
92 words
A method employed in a system for detection of the temperature of a bandgap material having a temperature dependent bandgap in a given energy range comprising the steps of: providing optical energy having a photon energy slightly higher than the top of said given energy range such that said optical energy passes through said bandgap material; receiving said optical energy after passage through said bandgap material and as a function of the absorption by said bandgap material of said optical energy, providing an output indicative of the temperature of said bandgap material.
Claim 2
Independent Claim
92 words
A method employed in a system for detection of the temperature of a bandgap material having a temperature dependent bandgap in a given energy range comprising the steps of: providing optical energy having a photon energy slightly higher than the top of said given energy range such that said optical energy passes through said bandgap material; receiving said optical energy after passage through said bandgap material and as a function of the absorption by said bandgap material of said optical energy, providing an output indicative of the temperature of said bandgap material.
Claim 3
Dependent Claim
25 words
The method according to claim 1 wherein said step of providing optical energy includes the provision of thermal radiation operative to heat said bandgap material.
Claim 4
Dependent Claim
47 words
The method according to claim 1 wherein said step of providing optical energy includes the provision of optical energy having a color spectrum; and wherein said step of receiving said optical energy employs a detector array located to receive optical energy reflected from a holographic blazed grating.
Claim 5
Dependent Claim
99 words
The method according to claim 1 wherein said step of providing an output as a function of the absorption by said bandgap material of said optical energy includes the additional steps of: providing a portion of said optical energy having a photon energy slightly higher than the top of said given energy range in a direction such that said portion of said optical energy does not reach said bandgap material; and receiving said portion of said optical energy and generating a reference signal for use in determining the extent of absorption by said bandgap material of said optical energy.
Claim 6
Independent Claim
70 words
A method of indicating the temperature of a layer of bandgap material having a temperature dependent bandgap in a given energy range comprising the steps of: passing optical energy through said layer, said optical energy having a photon energy slightly higher than the top of said given energy range. detecting the energy level of light absorbed by said layer and generating a signal indicative of the temperature of said layer.
Claim 7
Independent Claim
70 words
A method of indicating the temperature of a layer of bandgap material having a temperature dependent bandgap in a given energy range comprising the steps of: passing optical energy through said layer, said optical energy having a photon energy slightly higher than the top of said given energy range. detecting the energy level of light absorbed by said layer and generating a signal indicative of the temperature of said layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-12-01 | 1996-06-01 | 1996-12-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-12-01 | 2000-06-01 | 2000-12-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-12-01 | 2004-06-01 | 2004-12-01 | $7700.00 | Window Closed / Lapsed |