Step scanning technique for interferometer

Claim 2

Apparatus for stepping a relative position from a first to a second reference value, comprising: actuator means for effecting changes in the relative position; servo means, coupled to said actuator means and responsive to the relative position, for centering the relative position on the nearest reference value; sequencing means for defining a control cycle and a step direction, including (a) first means, operable in a first portion of the control cycle, for causing said actuator means to change the relative position in said step direction by an amount approximately equal to the separation between the first and second reference values in a manner that said servo means is unable to respond to the change while the change is occurring, and (b) second means, operable in a second portion of the control cycle, for allowing said servo means to control said actuator means and thereby center the relative position on the second reference value; whereupon the relative position is stepped from the first reference value to the second reference value.

Claim 3

The apparatus of claim 1 wherein said sequencing means includes means for defining a sequence of control cycles with alternating step directions, whereby the relative position is stepped back and forth between the first and second reference positions.

Claim 4

The apparatus of claim 1 wherein said sequencing means includes means for defining a sequence of control cycles, all with the same step direction, whereby the relative position is stepped to a series of reference values.

Claim 5

The apparatus of claim 1 wherein said first means includes means for uncoupling said servo means from said actuator means during said first portion of the given control cycle.

Claim 6

The apparatus of claim 1 wherein said actuator means comprises: a first actuator; and a second actuator; said first and second actuators being controllable such that the relative position is changed by an amount equal to the superposition of the motions imparted by said first and second actuators.

Claim 7

The apparatus of claim 5 wherein: said first actuator has a range of motion generally commensurate with the relative position range; said second actuator has a range of motion at least commensurate with the separation between adjacent reference values.

Claim 8

The apparatus of claim 5 wherein: the relative position is a relative position of first and second movable elements; said first actuator is coupled to said first element; and said second actuator is coupled to said second element.

Claim 9

Apparatus for stepping a relative position in a given direction to a series of equally spaced reference values over a range of relative positions that includes a plurality of such reference values, comprising: actuator means for effecting changes in the relative position; servo means, coupled to said actuator means and responsive to the relative position, for centering the relative position on the nearest reference value; sequencing means for defining a sequence of control cycles, including (a) first means, operable in a first portion of a given control cycle, for causing said actuator means to change the relative position in the given direction by an amount approximately equal to the separation between adjacent reference values in a manner that said servo means is unable to respond to the change while the change is occurring, and (b) second means, operable in a second portion of the given control cycle, for allowing said servo means to control said actuator means and thereby center the relative position on the closest reference value; whereupon the relative position is repetitively stepped from one reference value to the next in the series.

Claim 10

Apparatus for stepping a relative position in a given direction to a series of equally spaced reference values over a range of relative positions that includes a plurality of such reference values, comprising: actuator means for effecting changes in the relative position; servo means, coupled to said actuator means and responsive to the relative position, for centering the relative position on the nearest reference value; sequencing means for defining a sequence of control cycles, including (a) first means, operable in a first portion of a given control cycle, for causing said actuator means to change the relative position in the given direction by an amount approximately equal to the separation between adjacent reference values in a manner that said servo means is unable to respond to the change while the change is occurring, and (b) second means, operable in a second portion of the given control cycle, for allowing said servo means to control said actuator means and thereby center the relative position on the closest reference value; whereupon the relative position is repetitively stepped from one reference value to the next in the series.

Claim 11

The apparatus of claim 8 wherein said first means includes means for uncoupling said servo means from said actuator means during said first portion of the given control cycle.

Claim 12

The apparatus of claim 8 wherein said actuator means comprises: a first actuator; and a second actuator; said first and second actuators being controllable such that the relative position is changed by an amount equal to the superposition of the motions imparted by said first and second actuators.

Claim 13

The apparatus of claim 10 wherein: said first actuator has a range of motion generally commensurate with the relative position range; said second actuator has a range of motion at least commensurate with the separation between adjacent reference values.

Claim 14

The apparatus of claim 10 wherein: the relative position is a relative position of first and second movable elements; said first actuator is coupled to said first element; and said second actuator is coupled to said second element.

Claim 15

Apparatus for stepping a relative position in a first direction to a series of equally spaced reference values over a range of relative positions that includes a plurality of such reference values, comprising: a first actuator operable to change the relative position over a range at generally commensurate with the range of relative positions; a second actuator operable to change the relative position over a range at least commensurate with the separation between adjacent reference values; servo means, responsive to said relative position and coupled to at least one of said actuators, for centering the relative position on the nearest reference point; means for causing said second actuator (a) to move in the first direction by a particular distance so as to change the relative position in the first direction by an amount generally equal to the separation between adjacent reference values in a manner that said servo means does not respond to the movement in the first direction, and then (b) to move in a second direction opposite the first direction by a distance generally equal to said particular distance in a manner that said servo means responds to the movement in the second direction.

Claim 16

Apparatus for stepping a relative position in a first direction to a series of equally spaced reference values over a range of relative positions that includes a plurality of such reference values, comprising: a first actuator operable to change the relative position over a range at generally commensurate with the range of relative positions; a second actuator operable to change the relative position over a range at least commensurate with the separation between adjacent reference values; servo means, responsive to said relative position and coupled to at least one of said actuators, for centering the relative position on the nearest reference point; means for causing said second actuator (a) to move in the first direction by a particular distance so as to change the relative position in the first direction by an amount generally equal to the separation between adjacent reference values in a manner that said servo means does not respond to the movement in the first direction, and then (b) to move in a second direction opposite the first direction by a distance generally equal to said particular distance in a manner that said servo means responds to the movement in the second direction.

Claim 17

The apparatus of claim 13 wherein said means for causing includes means for uncoupling said servo from said second actuator during said first mentioned movement.

Claim 18

The apparatus of claim 13 wherein: said first actuator is characterized by a velocity that varies linearly with input voltage; and said second actuator is characterized by a position that varies linearly with input voltage.

Claim 19

The apparatus of claim 13 wherein: said first actuator is a solenoid coil linear motor; and said second actuator is a piezoelectric transducer.

Claim 20

The apparatus of claim 13, and further comprising: means, coupled to said first actuator, for imposing a dither on the relative position.

Claim 21

An interferometer comprising: a beam splitter; first and second mirrors; means for providing a reference signal representing the optical path difference between said mirrors' respective optical path lengths from the beam splitter, said reference signal being characterized by a reference interval and exhibiting a particular characteristic when said path difference assumes one of a number of reference values, equally spaced by the reference interval; actuator means, coupled to at least one of said mirrors, for effecting changes in said path difference; servo means, responsive to said reference signal, for causing said actuator means to maintain said path difference at the nearest reference value; and sequencing means for defining a control cycle and a step direction, including (a) first means, operable in a first portion of said control cycle, for causing said actuator means to change said path difference in said step direction by an amount approximately equal to the reference intervals in a manner that said servo means is unable to respond to the change while the change is occurring, and (b) second means, operable in a second portion of said control cycle, for allowing said servo means to control said actuator means and thereby center said path difference on the closest reference value; whereupon said path difference is stepped by the reference interval.

Claim 22

An interferometer comprising: a beam splitter; first and second mirrors; means for providing a reference signal representing the optical path difference between said mirrors' respective optical path lengths from the beam splitter, said reference signal being characterized by a reference interval and exhibiting a particular characteristic when said path difference assumes one of a number of reference values, equally spaced by the reference interval; actuator means, coupled to at least one of said mirrors, for effecting changes in said path difference; servo means, responsive to said reference signal, for causing said actuator means to maintain said path difference at the nearest reference value; and sequencing means for defining a control cycle and a step direction, including (a) first means, operable in a first portion of said control cycle, for causing said actuator means to change said path difference in said step direction by an amount approximately equal to the reference intervals in a manner that said servo means is unable to respond to the change while the change is occurring, and (b) second means, operable in a second portion of said control cycle, for allowing said servo means to control said actuator means and thereby center said path difference on the closest reference value; whereupon said path difference is stepped by the reference interval.

Claim 23

The apparatus of claim 18 wherein said sequencing means includes means for defining a sequence of control cycles with alternating step directions, whereby the relative position is stepped back and forth between the first and second reference positions.

Claim 24

The apparatus of claim 18 wherein said sequencing means includes means for defining a sequence of control cycles, all with the same step direction, whereby the relative position is stepped to a series of reference values.

Claim 25

The apparatus of claim 18 wherein: said first actuator is a coil driven linear motor; and said second actuator is a piezoelectric transducer.

Claim 26

The apparatus of claim 18, and further comprising: means, coupled to said second actuator, for imposing a dither motion on said second mirror to allow said servo means to determine the extent to which the path difference differs from the nearest reference value.

Claim 27

An interferometer comprising: a beam splitter; first and second mirrors; means for providing a reference signal representing the optical path difference between said mirrors' respective optical path lengths from the beam splitter, said reference signal being characterized by a reference interval and exhibiting a particular characteristic when said path difference assumes one of a number of reference values, equally spaced by the reference interval; actuator means, coupled to at least one of said mirrors, for effecting changes in said path difference; servo means, responsive to said reference signal, for causing said actuator means to maintain said path difference at the nearest reference value; and sequencing means for defining a sequence of control cycles, including (a) first means, operable in a first portion of a given control cycle, for causing said actuator means to change said path difference in a given direction by an amount approximately equal to the separation between adjacent reference values in a manner that said servo means is unable to respond to the change while the change is occurring, and (b) second means, operable in a second portion of the given control cycle, for allowing said servo means to control said actuator means and thereby center said path difference on the closest reference value; whereupon said path difference is repetitively stepped from one reference value to the next in the series.

Claim 28

An interferometer comprising: a beam splitter; first and second mirrors; means for providing a reference signal representing the optical path difference between said mirrors' respective optical path lengths from the beam splitter, said reference signal being characterized by a reference interval and exhibiting a particular characteristic when said path difference assumes one of a number of reference values, equally spaced by the reference interval; actuator means, coupled to at least one of said mirrors, for effecting changes in said path difference; servo means, responsive to said reference signal, for causing said actuator means to maintain said path difference at the nearest reference value; and sequencing means for defining a sequence of control cycles, including (a) first means, operable in a first portion of a given control cycle, for causing said actuator means to change said path difference in a given direction by an amount approximately equal to the separation between adjacent reference values in a manner that said servo means is unable to respond to the change while the change is occurring, and (b) second means, operable in a second portion of the given control cycle, for allowing said servo means to control said actuator means and thereby center said path difference on the closest reference value; whereupon said path difference is repetitively stepped from one reference value to the next in the series.

Claim 29

The apparatus of claim 23 wherein: said first actuator is a coil driven linear motor; and said second actuator is a piezoelectric transducer.

Claim 30

The apparatus of claim 23, and further comprising: means, coupled to said second actuator, for imposing a dither motion on said second mirror to allow said servo means to determine the extent to which the path difference differs from the nearest reference value.

Claim 31

An interferometer comprising: a beam splitter; first and second mirrors; means for providing a reference signal representing the optical path difference between said mirrors' respective optical path lengths from the beam splitter, said reference signal being characterized by a reference interval and exhibiting a particular characteristic when the optical path difference assumes one of a number of reference values, equally spaced by the reference interval; a first actuator for moving said first mirror over a range of many reference intervals; a second actuator for moving said second mirror over a range of at most a small number of reference intervals; servo means, responsive to said reference signal, for causing said first and second actuators to maintain the path difference at the nearest reference value; and means for controlling said second actuator to cause said second mirror to undergo a sequence of first and second movements; said first movement being a particular distance in a first direction relative to said beam splitter to effect a change in the path difference generally equal to the reference increment in a manner that prevents said servo means from controlling said second actuator to prevent said first movement; said second movement being said particular distance in a second direction relative to said beam splitter opposite said first direction in a manner that allows said servo means to control said second actuator to prevent the path difference from changing; whereupon the path difference changes by a reference interval during said first movement and remains constant during said second movement.

Claim 32

An interferometer comprising: a beam splitter; first and second mirrors; means for providing a reference signal representing the optical path difference between said mirrors' respective optical path lengths from the beam splitter, said reference signal being characterized by a reference interval and exhibiting a particular characteristic when the optical path difference assumes one of a number of reference values, equally spaced by the reference interval; a first actuator for moving said first mirror over a range of many reference intervals; a second actuator for moving said second mirror over a range of at most a small number of reference intervals; servo means, responsive to said reference signal, for causing said first and second actuators to maintain the path difference at the nearest reference value; and means for controlling said second actuator to cause said second mirror to undergo a sequence of first and second movements; said first movement being a particular distance in a first direction relative to said beam splitter to effect a change in the path difference generally equal to the reference increment in a manner that prevents said servo means from controlling said second actuator to prevent said first movement; said second movement being said particular distance in a second direction relative to said beam splitter opposite said first direction in a manner that allows said servo means to control said second actuator to prevent the path difference from changing; whereupon the path difference changes by a reference interval during said first movement and remains constant during said second movement.

Claim 33

The apparatus of claim 26 wherein: said first actuator is a coil driven linear motor; and said second actuator is a piezoelectric transducer.

Claim 34

The apparatus of claim 26, and further comprising: means, coupled to said second actuator, for imposing a dither motion on said second mirror to allow said servo means to determine the extent to which the path difference differs from the nearest reference value.

Claim 35

In a system having an actuator for effecting changes in a relative position and a servo, coupled to the actuator and responsive to the relative position, for centering the relative position on the nearest of a set of reference values, a method for stepping the relative position from a first to a second reference value comprising the steps of: defining a control cycle and a step direction; in a first portion of the control cycle, causing the actuator to change the relative position in the step direction by an amount approximately equal to the separation between the first and second reference values in a manner that the servo is unable to respond to the change while the change is occurring; and in a second portion of the control cycle, allowing the servo to control the actuator and thereby center the relative position on the second reference value; whereupon the relative position is stepped from the first reference value to the second reference value.

Claim 36

In a system having an actuator for effecting changes in a relative position and a servo, coupled to the actuator and responsive to the relative position, for centering the relative position on the nearest of a set of reference values, a method for stepping the relative position from a first to a second reference value comprising the steps of: defining a control cycle and a step direction; in a first portion of the control cycle, causing the actuator to change the relative position in the step direction by an amount approximately equal to the separation between the first and second reference values in a manner that the servo is unable to respond to the change while the change is occurring; and in a second portion of the control cycle, allowing the servo to control the actuator and thereby center the relative position on the second reference value; whereupon the relative position is stepped from the first reference value to the second reference value.

Claim 39

The method of claim 30 wherein said steps (a) and (c) are performed at least partly outside servo control.

Claim 40

The method of claim 30 wherein the servo control is characterized by a frequency that differs from the frequency with which said steps (a)-(d) are repeated.

Claim 41

Apparatus for performing phase modulation in an interferometer, comprising: an actuator operable to change the retardation value; a servo operable to maintain the retardation at a reference value; and means, coupled to said actuator and said servo, for defining a sequence of phase modulation cycles, including means, operable in a first portion of a given cycle, for changing the retardation from a selected first reference value to a selected second reference value, means, operable in a second portion of the given cycle, for maintaining the retardation at the second reference value under servo control for a given duration, means, operable in a third portion of the given cycle, for changing the retardation from the second reference value to the first reference value, and means, operable in a fourth portion of the given cycle, for maintaining the retardation at the first reference value under servo control for the given duration.

Claim 42

Apparatus for performing phase modulation in an interferometer, comprising: an actuator operable to change the retardation value; a servo operable to maintain the retardation at a reference value; and means, coupled to said actuator and said servo, for defining a sequence of phase modulation cycles, including means, operable in a first portion of a given cycle, for changing the retardation from a selected first reference value to a selected second reference value, means, operable in a second portion of the given cycle, for maintaining the retardation at the second reference value under servo control for a given duration, means, operable in a third portion of the given cycle, for changing the retardation from the second reference value to the first reference value, and means, operable in a fourth portion of the given cycle, for maintaining the retardation at the first reference value under servo control for the given duration.

Claim 43

The apparatus of claim 33 wherein each of said means for changing includes means for uncoupling the servo from the actuator.

Claim 44

The method of claim 33 wherein the servo is characterized by a frequency that differs from the frequency with which said phase modulation cycles occur.

Claim 45

A servo for an interferometer having a detector that provides a detector signal representative of retardation and an actuator for effecting changes in retardation, comprising: first means, responsive to the detector signal, for generating a first error signal component representing the high frequency content of the detector signal; second means, responsive to the detector signal, for generating a second error signal component representing the direct coupled low frequency content of the detector signal; and means for combining said first and second error signal components and applying the result to the actuator so as to minimize the result.

Claim 46

A servo for an interferometer having a detector that provides a detector signal representative of retardation and an actuator for effecting changes in retardation, comprising: first means, responsive to the detector signal, for generating a first error signal component representing the high frequency content of the detector signal; second means, responsive to the detector signal, for generating a second error signal component representing the direct coupled low frequency content of the detector signal; and means for combining said first and second error signal components and applying the result to the actuator so as to minimize the result.

Claim 47

The servo of claim 36 wherein said second means includes means for synchronously demodulating the detector signal.