US5162296A
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Plasma-enhanced CVD of oxide superconducting films by utilizing a magnetic field
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1990-06-08
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Granted: 1992-11-10
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Expires: 2010-06-08
Abstract
Abstract A method for forming a superconducting oxide material including introducing oxygen or an oxidizing gas and a reactive gas or reactive minute particles into a plasma generating chamber; applying a magnetic field to the plasma generating chamber; supplying microwaves to the plasma generating chamber where the direction of the magnetic field and the propagation direction of the microwave are parallel such that the oxygen or the oxidizing gas and the reactive gas or reactive minute particles are converting into plasma; and the formation of a superconducting oxide material on a film forming surface positioned in the plasma generating chamber during application of the magnetic field.
Inventors
- 👤 Shunpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 02:53
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0436; H10N60/0464; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/408; C23C16/44; C23C16/50; C23C16/511; H10N60/0576; H10N60/0661; H10N60/0716; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/727; Y10S505/734; Y10S505/737
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
174 words
A method for forming a copper oxide superconductor material on a substrate comprising the steps of: placing a substrate in a reaction chamber; inputting oxygen or an oxidizing gas and a reactive gas or reactive minute particles including precursor materials for forming a copper oxide superconducting material into said reaction chamber wherein said reactive gas or reactive minute particles is selected from: (a) alkylated or halogenated compounds including a rare earth, alkaline earth, Bi, Sb, As and copper elements of the superconducting oxide material; (b) ammonia-neutralized salt products including the rare earth, alkaline earth, Bi, Sb, As and copper elements; and (c) a finely powdered composition containing elements from Groups IIa and IIIa of the Periodic Table and copper; inputting an electromagnetic energy into said reaction chamber in order to activate said reactive gas or particles; and forming said copper oxide superconducting material on said substrate, wherein a magnetic field is applied to said substrate in a predetermined direction in order to align a crystalline structure of said material in accordance with said direction.
Claim 2
Independent Claim
174 words
A method for forming a copper oxide superconductor material on a substrate comprising the steps of: placing a substrate in a reaction chamber; inputting oxygen or an oxidizing gas and a reactive gas or reactive minute particles including precursor materials for forming a copper oxide superconducting material into said reaction chamber wherein said reactive gas or reactive minute particles is selected from: (a) alkylated or halogenated compounds including a rare earth, alkaline earth, Bi, Sb, As and copper elements of the superconducting oxide material; (b) ammonia-neutralized salt products including the rare earth, alkaline earth, Bi, Sb, As and copper elements; and (c) a finely powdered composition containing elements from Groups IIa and IIIa of the Periodic Table and copper; inputting an electromagnetic energy into said reaction chamber in order to activate said reactive gas or particles; and forming said copper oxide superconducting material on said substrate, wherein a magnetic field is applied to said substrate in a predetermined direction in order to align a crystalline structure of said material in accordance with said direction.
Claim 3
Dependent Claim
68 words
A method as in claim 1 wherein the superconducting material is represented by a general formula: (A.sub.1-x B.sub.x).sub.y Cu.sub.z O.sub.w, where 0.1<x<1, 2.0<y<4.0, 1.0<z<4.0 and 4.0<w<10.0; A is one or more elements selected from the group consisting of Y, Gd, Yb, Eu, Tb, Dy, Ho, Er,, Tm, Lu, Sc, and other lanthanoids; B is one or more elements selected from the group consisting of Ba, Sr, and Ca.
Claim 4
Dependent Claim
64 words
A method as in claim 1 wherein the superconducting material is represented by a general formula: (A.sub.1-x B.sub.x).sub.y Cu.sub.z O.sub.w, where A is one or more elements selected from the group consisting of N, P, As, Sb and Bi; B is one or more elements selected from the group consisting of Be, Mg, Ca, Sr, Ba and Ra; and 0.3<x<1, 2.0<y<4.0, 1.0<z<4.0 and 4.0<w<10.0.
Claim 5
Dependent Claim
56 words
A method as in claim 1 wherein the superconducting material is represented by a general formula: (A.sub.1-x B.sub.x).sub.y Cu.sub.z O.sub.w, where A is one or more elements selected from the group consisting of As, Sb and Bi; B is one or more elements selected from the group consisting of Be, Mg, Ca, Sr, and Ba; and
Claim 6
Dependent Claim
5 words
3<x<1, 2.0<y<4.0, 1.0<z<4.0 and 4.0<w<10.0.
Claim 7
Dependent Claim
5 words
3<x<1, 2.0<y<4.0, 1.0<z<4.0 and 4.0<w<10.0.
Claim 8
Dependent Claim
22 words
A method as in claim 1 wherein the magnetic field is applied perpendicular to or parallel to a surface of said substrate.
Claim 9
Dependent Claim
18 words
A method as in claim 1 where the strength of said magnetic field is at least 0.1 Tesla.
Claim 10
Dependent Claim
13 words
A method as in claim 1 where said electromagnetic energy is a microwave.
Claim 11
Independent Claim
160 words
A method for forming a copper oxide superconducting material on a substrate comprising the steps of: placing a substrate in a reaction chamber; inputting oxygen or an oxidizing gas and a reactive solution for forming a copper oxide superconducting material into said chamber, wherein said reactive solution incorporates one of: (a) alkylated or halogenated compounds including a rare earth, alkaline earth, Bi, Sb, As and copper elements of the superconducting oxide material; (b) ammonianeutralized salt products including the rare earth, alkaline earth, Bi, Sb, As and copper elements; and (c) a finely powdered composition containing elements from Groups IIa and IIIa of the Periodic Table and copper; inputting an electromagnetic energy into said reaction chamber in order to activate said reactive gas; and forming said copper oxide superconducting material on said substrate, wherein a magnetic field is applied to said substrate in a predetermined direction in order to align a crystalline structure of said material in accordance with said direction.
Claim 12
Independent Claim
160 words
A method for forming a copper oxide superconducting material on a substrate comprising the steps of: placing a substrate in a reaction chamber; inputting oxygen or an oxidizing gas and a reactive solution for forming a copper oxide superconducting material into said chamber, wherein said reactive solution incorporates one of: (a) alkylated or halogenated compounds including a rare earth, alkaline earth, Bi, Sb, As and copper elements of the superconducting oxide material; (b) ammonianeutralized salt products including the rare earth, alkaline earth, Bi, Sb, As and copper elements; and (c) a finely powdered composition containing elements from Groups IIa and IIIa of the Periodic Table and copper; inputting an electromagnetic energy into said reaction chamber in order to activate said reactive gas; and forming said copper oxide superconducting material on said substrate, wherein a magnetic field is applied to said substrate in a predetermined direction in order to align a crystalline structure of said material in accordance with said direction.
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