Controllable integrated optical directional coupler

Claim 2

A controllable integrated optical directional coupler, comprising: a substrate of semiconductor material; first and second strip waveguides of a defined width integrated on the substrate and defined by waveguiding layers at the substrate; said first and second strip waveguides proceeding within a coupling section side-by-side to one another at a spacing which is sufficiently small such that an optical wave guided in the waveguiding layer of one of the strip waveguides can couple over into the waveguiding layer of the other strip waveguide; within the coupling section at least one of said strip waveguides having a rib of semiconductor material arranged over its waveguiding layer and which defines a width of the at least one strip waveguide where the rib is present; a semiconductor junction which is electrically controllable via contacts is integrated within said coupling section in a region of said rib of said at least one strip waveguide such that a transition from p-doped material of said rib to undoped or n-doped material is arranged at a specified distance from the waveguiding layer, and wherein the rib of p-doped material is situated at a side of this transition facing away from the waveguiding layer; the section of the strip waveguide within the coupling section which is adjacent the semiconductor junction comprising an electrically controllable strip waveguide section; and sections of the strip waveguides situated outside of the electrically controllable strip waveguide section forming passive strip waveguides which are free of semiconductor junctions.

Claim 3

A directional coupler according to claim 1 wherein the strip waveguide sections which are free of pn- or pin-junctions comprises a strip-shaped waveguiding layer whose width defines a width of the passive strip waveguide and wherein this strip-shaped waveguiding layer is surrounded by the substrate.

Claim 4

A directional coupler according to claim 1 wherein a spacer layer is provided between said rib and said waveguiding layer, and wherein the spacer layer has a refractive index lower than a refractive index of the adjacent waveguiding layer.

Claim 5

A directional coupler according to claim 1 wherein a spacer layer is provided between said rib and said waveguiding layer, and wherein the spacer layer comprises undoped material.

Claim 6

A directional coupler according to claim 1 wherein a spacer layer is provided between said rib and said waveguiding layer, and wherein the spacer layer comprises n-doped material.

Claim 7

A directional coupler according to claim 1 wherein the semiconductor junction comprises a pn-junction.

Claim 8

A directional coupler according to claim 1 wherein the semiconductor junction comprises a pin-junction.

Claim 9

A directional coupler according to claim 1 wherein the waveguiding layer of the substrate comprises undoped semiconductor material.

Claim 10

A directional coupler according to claim 1 wherein the waveguiding layer of the substrate comprises n-doped semiconductor material.

Claim 11

A directional coupler according to claim 1 wherein said passive strip waveguide sections which are free of pn- and pin-junctions comprise a strip-shaped waveguiding layer whose width defines a width of the passive strip waveguide, and wherein this strip-shaped waveguiding layer is contacted by the substrate as a uniform material at one side and another uniform material at the other side.

Claim 12

A directional coupler according to claim 10 wherein said another uniform material at the other side is a material which is the same as the uniform material of the substrate.

Claim 13

A controllable integrated optical directional coupler, comprising: a substrate of semiconductor material; first and second strip waveguides of a defined width integrated on the substrate and defined by waveguiding layers at the substrate; said first and second strip waveguides proceeding within a coupling section side-by-side to one another at a spacing which is sufficiently small such that an optical wave guided in the waveguiding layer of one of the strip waveguides can couple over into the waveguiding layer of the other strip waveguide; within the coupling section at least one of said strip waveguides having a rib of semiconductor material arranged over its waveguiding layer and which defines a width of the at least one strip waveguide where the rib is present; a semiconductor junction which is electrically controllable via contacts is integrated within said coupling section in a region of said rib of said at least one strip waveguide such that a transition from p-doped material of said rib to undoped or n-doped material is arranged at a specified distance from the waveguiding layer, and wherein the rib of p-doped material is situated at a side of this transition facing away from the waveguiding layer; the section of the strip waveguide within the coupling section which is adjacent the semiconductor junction comprising an electrically controllable strip waveguide section; sections of the strip waveguides situated outside of the electrically controllable strip waveguide section forming passive strip waveguides which are free of semiconductor junctions; and the controllable waveguide section lying within a phase shifting section which in turn lies within the coupling section.

Claim 14

A controllable integrated optical directional coupler, comprising: a substrate of semiconductor material; first and second strip waveguides of a defined width integrated on the substrate and defined by waveguiding layers at the substrate; said first and second strip waveguides proceeding within a coupling section side-by-side to one another at a spacing which is sufficiently small such that an optical wave guided in the waveguiding layer of one of the strip waveguides can couple over into the waveguiding layer of the other strip waveguide; within the coupling section at least one of said strip waveguides having a rib of semiconductor material arranged over its waveguiding layer and which defines a width of the at least one strip waveguide where the rib is present; a semiconductor junction which is electrically controllable via contacts is integrated within said coupling section in a region of said rib of said at least one strip waveguide such that a transition from p-doped material of said rib to undoped or n-doped material is arranged at a specified distance from the waveguiding layer, and wherein the rib of p-doped material is situated at a side of this transition facing away from the waveguiding layer; the section of the strip waveguide within the coupling section which is adjacent the semiconductor junction comprising an electrically controllable strip waveguide section; sections of the strip waveguides situated outside of the electrically controllable strip waveguide section forming passive strip waveguides which are free of semiconductor junctions; and the controllable waveguide section lying within a phase shifting section which in turn lies within the coupling section.

Claim 15

A controllable integrated optical directional coupler, comprising: a substrate of semiconductor material; first and second strip waveguides of a defined width integrated on the substrate and defined by waveguiding layers at the substrate; said first and second strip waveguides proceeding within a coupling section side-by-side to one another at a spacing which is sufficiently small such that an optical wave guided in the waveguiding layer of one of the strip waveguides can couple over into the waveguiding layer of the other strip waveguide; within the coupling section at least one of said strip waveguides having a rib of semiconductor material arranged over its waveguiding layer and which defines a width of the at least one strip waveguide where the rib is present; a semiconductor junction which is electrically controllable via contacts is integrated within said coupling section in a region of said rib of said at least one strip waveguide such that a transition from p-doped material of said rib to undoped or n-doped material is arranged at a specified distance from the waveguiding layer, and wherein the rib of p-doped material is situated at a side of this transition facing away from the waveguiding layer; the section of the strip waveguide within the coupling section which is adjacent the semiconductor junction comprising an electrically controllable strip waveguide section; sections of the strip waveguides situated outside of the electrically controllable strip waveguide section forming passive strip waveguides which are free of semiconductor junctions; and the controllable waveguide section lying within a phase shifting section which in turn lies within the coupling section.

Claim 16

A controllable integrated optical directional coupler, comprising: a substrate of semiconductor material; first and second strip waveguides of a defined width integrated on the substrate and defined by waveguiding layers at the substrate; said first and second strip waveguides proceeding within a coupling section side-by-side to one another at a spacing which is sufficiently small such that an optical wave guided in the waveguiding layer of one of the strip waveguides can couple over into the waveguiding layer of the other strip waveguide; within the coupling section at least one of said strip waveguides having a rib of semiconductor material arranged over its waveguiding layer and which defines a width of the at least one strip waveguide where the rib is present; a semiconductor junction which is electrically controllable via contacts is integrated within said coupling section in a region of said rib of said at least one strip waveguide such that a transition from p-doped material of said rib to undoped or n-doped material is arranged at a specified distance from the waveguiding layer, and wherein the rib of p-doped material is situated at a side of this transition facing away from the waveguiding layer; the section of the strip waveguide within the coupling section which is adjacent the semiconductor junction comprising an electrically controllable strip waveguide section; sections of the strip waveguides situated outside of the electrically controllable strip waveguide section forming passive strip waveguides which are free of semiconductor junctions; and the controllable waveguide section lying within a phase shifting section which in turn lies within the coupling section.

Claim 17

A directional coupler according to claim 13 wherein the uniform material comprises air.

Claim 18

A controllable integrated optical directional coupler, comprising: a substrate of semiconductor material; first and second strip waveguides of a defined width integrated on the substrate and defined by waveguiding layers at the substrate; said first and second strip waveguides proceeding within a coupling section side-by-side to one another at a spacing which is sufficiently small such that an optical wave guided in the waveguiding layer of one of the strip waveguides can couple over into the waveguiding layer of the other strip waveguide; within the coupling section at least one of said strip waveguides having a rib of semiconductor material arranged over its waveguiding layer and which defines a width of the at least one strip waveguide where the rib is present; a semiconductor junction which is electrically controllable via contacts is integrated within said coupling section in a region of said rib of said at least one strip waveguide such that a transition from p-doped material of said rib to undoped or n-doped material is arranged at a specified distance from the waveguiding layer, and wherein the rib of p-doped material is situated at a side of this transition facing away from the waveguiding layer; the section of the strip waveguide within the coupling section which is adjacent the semiconductor junction comprising an electrically controllable strip waveguide section; sections of the strip waveguides situated outside of the electrically controllable strip waveguide section forming passive strip waveguides which are free of semiconductor junctions; and said passive strip waveguide sections which are free of pn- or pin-junctions comprising a rib forming a thicker region of the waveguiding layer, a width of said rib defining a width of the passive strip waveguide, and wherein on a side facing away from the substrate the surface of the waveguiding layer with the rib is in direct contact with a uniform material.

Claim 19

A controllable integrated optical directional coupler, comprising: a substrate of semiconductor material; first and second strip waveguides of a defined width integrated on the substrate and defined by waveguiding layers at the substrate; said first and second strip waveguides proceeding within a coupling section side-by-side to one another at a spacing which is sufficiently small such that an optical wave guided in the waveguiding layer of one of the strip waveguides can couple over into the waveguiding layer of the other strip waveguide; within the coupling section at least one of said strip waveguides having a rib of semiconductor material arranged over its waveguiding layer and which defines a width of the at least one strip waveguide where the rib is present; a semiconductor junction which is electrically controllable via contacts is integrated within said coupling section in a region of said rib of said at least one strip waveguide such that a transition from p-doped material of said rib to undoped or n-doped material is arranged at a specified distance from the waveguiding layer, and wherein the rib of p-doped material is situated at a side of this transition facing away from the waveguiding layer; the section of the strip waveguide within the coupling section which is adjacent the semiconductor junction comprising an electrically controllable strip waveguide section; sections of the strip waveguides situated outside of the electrically controllable strip waveguide section forming passive strip waveguides which are free of semiconductor junctions; and said passive strip waveguide sections which are free of pn- or pin-junctions comprising a rib forming a thicker region of the waveguiding layer, a width of said rib defining a width of the passive strip waveguide, and wherein on a side facing away from the substrate the surface of the waveguiding layer with the rib is in direct contact with a uniform material.

Claim 20

A directional coupler according to claim 15 wherein the uniform material adjacent the further layer surface facing away from the waveguiding layer comprises air.

Claim 21

A controllable integrated optical directional coupler, comprising: a substrate of semiconductor material; first and second strip waveguides of a defined width integrated on the substrate and defined by waveguiding layers at the substrate; said first and second strip waveguides proceeding within a coupling section side-by-side to one another at a spacing which is sufficiently small such that an optical wave guided in the waveguiding layer of one of the strip waveguides can couple over into the waveguiding layer of the other strip waveguide; within the coupling section at least one of said strip waveguides having a rib of semiconductor material arranged over its waveguiding layer; a semiconductor junction which is electrically controllable via contacts is provided within said coupling section in a region of said rib of said at least one strip waveguide; the section of the strip waveguide within the coupling section which is adjacent the semiconductor junction comprising an electrically controllable strip waveguide section; and sections of the strip waveguides situated outside of the electrically controllable strip waveguide section forming passive strip waveguides which are free of semiconductor junctions.

Claim 22

A controllable integrated optical directional coupler, comprising: a substrate of semiconductor material; first and second strip waveguides of a defined width integrated on the substrate and defined by waveguiding layers at the substrate; said first and second strip waveguides proceeding within a coupling section side-by-side to one another at a spacing which is sufficiently small such that an optical wave guided in the waveguiding layer of one of the strip waveguides can couple over into the waveguiding layer of the other strip waveguide; within the coupling section at least one of said strip waveguides having a rib of semiconductor material arranged over its waveguiding layer; a semiconductor junction which is electrically controllable via contacts is provided within said coupling section in a region of said rib of said at least one strip waveguide; the section of the strip waveguide within the coupling section which is adjacent the semiconductor junction comprising an electrically controllable strip waveguide section; and sections of the strip waveguides situated outside of the electrically controllable strip waveguide section forming passive strip waveguides which are free of semiconductor junctions.