US5156995A
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Method for reducing or eliminating interface defects in mismatched semiconductor epilayers
Assignee: Cornell Research Foundation Inc
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Filing: 1991-04-12
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Granted: 1992-10-20
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Expires: 2011-04-12
Abstract
Abstract The present invention and process relates to crystal lattice mismatched semiconductor composite having a first semiconductor layer and a second semiconductor growth layer deposited thereon to form an interface wherein the growth layer can be deposited at thicknesses in excess of the critical thickness, even up to about 10× critical thickness. Such composite has an interface which is substantially free of interface defects. For example, the size of the growth areas in a mismatched In 0 .05 Ga 0 .95 As/(001)GaAs interface was controlled by fabricating 2-μm high pillars of various lateral geometries and lateral dimensions before the epitaxial deposition of 3500Å of In 0 .05 Ga 0 .95 As. The linear dislocation density at the interface was reduced from >5000 dislocations/cm to about zero for 25-μm lateral dimensions and to less than 800 dislocations/cm for lateral dimensions as large as 100 μm. The fabricated pillars control the lateral dimensions of the growth layer and block the glide of misfit dislocations with the resultant decrease in dislocation density.
Inventors
- 👤 Eugene A. Fitzgerald, Jr.
- 👤 Dieter G. Ast
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 16:31
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/80; H10D62/82; H10D62/824; H10D62/826; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/2907; H10P14/2911; H10P14/2924; H10P14/2925; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3221; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P14/3414; H10P14/3421; H10P14/3424; H10P14/3431; H10P14/36; Y; Y10; Y10S; Y10S438/00; Y10S438/933; Y10S438/938
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
207 words
A process for eliminating or substantially reducing the defect density at the interface of a mismatched crystal lattice semiconductor material structure comprising a first semiconductor material layer and a second semiconductor material layer deposited on said first semiconductor material and forming an interface therewith, said process comprising: a) forming a first semiconductor layer; b) patterning the first semiconductor layer to form a multiplicity of pillars and adjacent wells prior to deposit of the second layer thereon, said pillar, well and said second layer having a lateral dimension from about 2 μm to about 5000 μm; the height of said pillar and said well being sufficient to accept the second layer deposits in a thickness in excess of the critical thickness; c) depositioning discontinuously a second semiconductor layer on said pillars and wells to form a discontinuous layer having a lateral dimension from about 2 μm to about 5000 μm and a thickness in excess of the critical thickness in the range of from about 10Å to about 500 μm to provide a mismatched semiconductor composite having an interface substantially free of interface defects; wherein said mismatched semiconductor composite comprises In x Ga 1-x As/(001)GaAs or its inverse and wherein x has a value from 0 to 1.
Claim 2
Dependent Claim
207 words
A process for eliminating or substantially reducing the defect density at the interface of a mismatched crystal lattice semiconductor material structure comprising a first semiconductor material layer and a second semiconductor material layer deposited on said first semiconductor material and forming an interface therewith, said process comprising: a) forming a first semiconductor layer; b) patterning the first semiconductor layer to form a multiplicity of pillars and adjacent wells prior to deposit of the second layer thereon, said pillar, well and said second layer having a lateral dimension from about 2 μm to about 5000 μm; the height of said pillar and said well being sufficient to accept the second layer deposits in a thickness in excess of the critical thickness; c) depositioning discontinuously a second semiconductor layer on said pillars and wells to form a discontinuous layer having a lateral dimension from about 2 μm to about 5000 μm and a thickness in excess of the critical thickness in the range of from about 10Å to about 500 μm to provide a mismatched semiconductor composite having an interface substantially free of interface defects; wherein said mismatched semiconductor composite comprises In x Ga 1-x As/(001)GaAs or its inverse and wherein x has a value from 0 to 1.
Claim 3
Dependent Claim
19 words
The process of claim 1 where the composite comprises In 0 .05 Ga 0 .95 As/GaAs or its inverse.
Claim 4
Dependent Claim
195 words
A process for eliminating or substantially reducing the defect density at the interface of a mismatched crystal lattice semiconductor material structure comprising a first semiconductor material layer and a second semiconductor material layer deposited on said first semiconductor material and forming an interface therewith, said process comprising: a) forming a first semiconductor layer; b) patterning the first semiconductor layer to form a multiplicity of pillars and adjacent wells prior to deposit of the second layer thereon, said pillar, well and said second layer having a lateral dimension from about 2 μm to about 5000 μm; the height of said pillar and said well being sufficient to accept the second layer deposit in a thickness in excess of the critical thickness; c) depositing discontinuously a second semiconductor layer on said pillars and wells to form a discontinuous layer having a lateral dimension from about 2 μm to about 5000 μm and a thickness in excess of the critical thickness in the range of from about 10Å to about 500 μm to provide a mismatched semiconductor composite having an interface substantially free of interface defects; wherein said mismatched semiconductor composite comprises GaAs on Si or its inverse.
Claim 5
Dependent Claim
195 words
A process for eliminating or substantially reducing the defect density at the interface of a mismatched crystal lattice semiconductor material structure comprising a first semiconductor material layer and a second semiconductor material layer deposited on said first semiconductor material and forming an interface therewith, said process comprising: a) forming a first semiconductor layer; b) patterning the first semiconductor layer to form a multiplicity of pillars and adjacent wells prior to deposit of the second layer thereon, said pillar, well and said second layer having a lateral dimension from about 2 μm to about 5000 μm; the height of said pillar and said well being sufficient to accept the second layer deposit in a thickness in excess of the critical thickness; c) depositing discontinuously a second semiconductor layer on said pillars and wells to form a discontinuous layer having a lateral dimension from about 2 μm to about 5000 μm and a thickness in excess of the critical thickness in the range of from about 10Å to about 500 μm to provide a mismatched semiconductor composite having an interface substantially free of interface defects; wherein said mismatched semiconductor composite comprises GaAs on Si or its inverse.
Claim 6
Dependent Claim
219 words
A process for eliminating or substantially reducing the defect density at the interface of a mismatched crystal lattice semiconductor material structure comprising a first semiconductor material layer and a second semiconductor material layer deposited on said first semiconductor material and forming an interface therewith, said process comprising: a) forming a first semiconductor layer; b) patterning the first semiconductor layer to form a multiplicity of pillars and adjacent wells prior to deposit of the second layer thereon, said pillar, well and said second layer having a lateral dimension from about 2 μm to about 5000 μm; the height of said pillar and said well being sufficient to accept the second layer deposit in a thickness in excess of the critical thickness; c) depositing discontinuously a second semiconductor layer on said pillars and wells to form a discontinuous layer having a lateral dimension from about 2 μm to about 5000 μm and a thickness in excess of the critical thickness in the range of from about 10Å to about 500 μm to provide a mismatched semiconductor composite having an interface substantially free of interface defects; wherein said mismatched semiconductor composite comprises In x Ga 1-x As on In y GA 1-y As and wherein x and y have a value from 0 to 1 and x is not equal to y.
Claim 7
Dependent Claim
219 words
A process for eliminating or substantially reducing the defect density at the interface of a mismatched crystal lattice semiconductor material structure comprising a first semiconductor material layer and a second semiconductor material layer deposited on said first semiconductor material and forming an interface therewith, said process comprising: a) forming a first semiconductor layer; b) patterning the first semiconductor layer to form a multiplicity of pillars and adjacent wells prior to deposit of the second layer thereon, said pillar, well and said second layer having a lateral dimension from about 2 μm to about 5000 μm; the height of said pillar and said well being sufficient to accept the second layer deposit in a thickness in excess of the critical thickness; c) depositing discontinuously a second semiconductor layer on said pillars and wells to form a discontinuous layer having a lateral dimension from about 2 μm to about 5000 μm and a thickness in excess of the critical thickness in the range of from about 10Å to about 500 μm to provide a mismatched semiconductor composite having an interface substantially free of interface defects; wherein said mismatched semiconductor composite comprises In x Ga 1-x As on In y GA 1-y As and wherein x and y have a value from 0 to 1 and x is not equal to y.
Claim 8
Dependent Claim
208 words
A process for eliminating or substantially reducing the defect density at the interface of a mismatched crystal lattice semiconductor material structure comprising a first semiconductor material layer and a second semiconductor material layer deposited on said first semiconductor material and forming an interface therewith, said process comprising: a) forming a first semiconductor layer; b) patterning the first semiconductor layer to form a multiplicity of pillars and adjacent wells prior to deposit of the second layer thereon, said pillar, well and said second layer having a lateral dimension from about 2 μm to about 5000 μm; the height of said pillar and said well being sufficient to accept the second layer deposit in a thickness in excess of the critical thickness; c) depositing discontinuously a second semiconductor layer on said pillars and wells to form a discontinuous layer having a lateral dimension from about 2 μm to about 5000 μm and a thickness in excess of the critical thickness in the range of from about 10Å to about 500 μm to provide a mismatched semiconductor composite having an interface substantially free of interface defects; wherein said mismatched semiconductor composite comprises Si x Ge 1-x on Si or its inverse and wherein x has a value between 0 and 1.
Claim 9
Dependent Claim
208 words
A process for eliminating or substantially reducing the defect density at the interface of a mismatched crystal lattice semiconductor material structure comprising a first semiconductor material layer and a second semiconductor material layer deposited on said first semiconductor material and forming an interface therewith, said process comprising: a) forming a first semiconductor layer; b) patterning the first semiconductor layer to form a multiplicity of pillars and adjacent wells prior to deposit of the second layer thereon, said pillar, well and said second layer having a lateral dimension from about 2 μm to about 5000 μm; the height of said pillar and said well being sufficient to accept the second layer deposit in a thickness in excess of the critical thickness; c) depositing discontinuously a second semiconductor layer on said pillars and wells to form a discontinuous layer having a lateral dimension from about 2 μm to about 5000 μm and a thickness in excess of the critical thickness in the range of from about 10Å to about 500 μm to provide a mismatched semiconductor composite having an interface substantially free of interface defects; wherein said mismatched semiconductor composite comprises Si x Ge 1-x on Si or its inverse and wherein x has a value between 0 and 1.
Claim 10
Dependent Claim
207 words
A process for eliminating or substantially reducing the defect density at the interface of a mismatched crystal lattice semiconductor material structure comprising a first semiconductor material layer and a second semiconductor material layer deposited on said first semiconductor material and forming an interface therewith, said process comprising: a) forming a first semiconductor layer; b) patterning the first semiconductor layer to form a multiplicity of pillars and adjacent wells prior to deposit of the second layer thereon, said pillar, well and said second layer having a lateral dimension from about 2 μm to about 5000 μm; the height of said pillar and said well being sufficient to accept the second layer deposit in a thickness in excess of the critical thickness; c) depositing discontinuously a second semiconductor layer on said pillars and wells to form a discontinuous layer having a lateral dimension from about 2 μm to about 5000 μm and a thickness in excess of the critical thickness in the range of from about 10Å to about 500 μm to provide a mismatched semiconductor composite having an interface substantially free of interface defects; wherein said mismatched semiconductor composite comprises GaAs on Si x Ge 1-x or its inverse, wherein x has a value between 0 and 1.
Claim 11
Dependent Claim
207 words
A process for eliminating or substantially reducing the defect density at the interface of a mismatched crystal lattice semiconductor material structure comprising a first semiconductor material layer and a second semiconductor material layer deposited on said first semiconductor material and forming an interface therewith, said process comprising: a) forming a first semiconductor layer; b) patterning the first semiconductor layer to form a multiplicity of pillars and adjacent wells prior to deposit of the second layer thereon, said pillar, well and said second layer having a lateral dimension from about 2 μm to about 5000 μm; the height of said pillar and said well being sufficient to accept the second layer deposit in a thickness in excess of the critical thickness; c) depositing discontinuously a second semiconductor layer on said pillars and wells to form a discontinuous layer having a lateral dimension from about 2 μm to about 5000 μm and a thickness in excess of the critical thickness in the range of from about 10Å to about 500 μm to provide a mismatched semiconductor composite having an interface substantially free of interface defects; wherein said mismatched semiconductor composite comprises GaAs on Si x Ge 1-x or its inverse, wherein x has a value between 0 and 1.
Claim 12
Dependent Claim
194 words
A process for eliminating or substantially reducing the defect density at the interface of a mismatched crystal lattice semiconductor material structure comprising a first semiconductor material layer and a second semiconductor material layer deposited on said first semiconductor material and forming an interface therewith, said process comprising: a) forming a first semiconductor layer; b) patterning the first semiconductor layer to form a multiplicity of pillars and adjacent wells prior to deposit of the second layer thereon, said pillar, well and said second layer having a lateral dimension from about 2 μm to about 5000 μm; the height of said pillar and said well being sufficient to accept the second layer deposit in a thickness in excess of the critical thickness; c) depositing discontinuously a second semiconductor layer on said pillars and wells to form a discontinuous layer having a lateral dimension from about 2 μm to about 5000 μm and a thickness in excess of the critical thickness in the range of from about 10Å to about 500 μm to provide a mismatched semiconductor composite having an interface substantially free of interface defects; wherein said mismatched semiconductor composite comprises layers of ZnSe and GaAs.
Claim 13
Dependent Claim
194 words
A process for eliminating or substantially reducing the defect density at the interface of a mismatched crystal lattice semiconductor material structure comprising a first semiconductor material layer and a second semiconductor material layer deposited on said first semiconductor material and forming an interface therewith, said process comprising: a) forming a first semiconductor layer; b) patterning the first semiconductor layer to form a multiplicity of pillars and adjacent wells prior to deposit of the second layer thereon, said pillar, well and said second layer having a lateral dimension from about 2 μm to about 5000 μm; the height of said pillar and said well being sufficient to accept the second layer deposit in a thickness in excess of the critical thickness; c) depositing discontinuously a second semiconductor layer on said pillars and wells to form a discontinuous layer having a lateral dimension from about 2 μm to about 5000 μm and a thickness in excess of the critical thickness in the range of from about 10Å to about 500 μm to provide a mismatched semiconductor composite having an interface substantially free of interface defects; wherein said mismatched semiconductor composite comprises layers of ZnSe and GaAs.
References Cited (Backward Citations)
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