US5155778A
Expired / Lapsed
US
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Optical switch using spatial light modulators
Assignee: Texas Instruments Inc
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Filing: 1991-06-28
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Granted: 1992-10-13
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Expires: 2011-06-28
Abstract
Abstract A structure for optical interconnection is disclosed along with methods of manufacture and operation. In one embodiment, the structure consists of optical fibers connected to an array of microlenses, either through integrated waveguides or not, that direct light onto a mirror formed in a substrate, which reflects light to a spatial light modulator. The spatial light modulator in turn reflects the light back to another mirror, which reflects the light through another microlens array, through integrated waveguides or not, and out another optical fiber. The structure is manufactured by forming the mirrors out of the substrate, forming waveguides if desired, forming troughs for the fibers and the microlenses, attaching external pieces such as the fibers, the lenses, and the spatial light modulator package, and packaging the device to maintain alignment.
Inventors
- 👤 Gregory A. Magel
- 👤 T. Gus McDonald
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 00:17
CPC Classifications
G; G02; G02B; G02B26/00; G02B26/08; G02B6/00; G02B6/24; G02B6/26; G02B6/35; G02B6/3596; G02B6/351; G02B6/3512; G02B6/354; G02B6/3544; G02B6/3546; G02B6/3564; G02B6/3582
Claims Analysis
Total Claims: 40
Claim 1
Independent Claim
129 words
A method of manufacturing an optical switch comprising: a. supplying at least one mirror on a first surface of a substrate such that said mirror is positioned to reflect light out of the plane of a substrate to a second plane, and wherein said first surface is substantially parallel to a second surface of said substrate; b. coupling said substrate with at least one optical fiber for transmission of light to and/or from said mirror; c. providing for at least one microlens array for focusing said light, arranged between said fiber and said mirror; d. arranging a spatial light modulator in said second plane adjacent said substrate for reflecting said light reflected from said mirror; and e. sealing said spatial light modulator to said substrate to form said switch.
Claim 2
Independent Claim
129 words
A method of manufacturing an optical switch comprising: a. supplying at least one mirror on a first surface of a substrate such that said mirror is positioned to reflect light out of the plane of a substrate to a second plane, and wherein said first surface is substantially parallel to a second surface of said substrate; b. coupling said substrate with at least one optical fiber for transmission of light to and/or from said mirror; c. providing for at least one microlens array for focusing said light, arranged between said fiber and said mirror; d. arranging a spatial light modulator in said second plane adjacent said substrate for reflecting said light reflected from said mirror; and e. sealing said spatial light modulator to said substrate to form said switch.
Claim 3
Dependent Claim
16 words
The method of claim 1 wherein said supplying step comprises orientation dependent etching of the substrate.
Claim 4
Dependent Claim
24 words
The method of claim 1 wherein said coupling step comprises etching the substrate to form alignment features for said fibers and attaching said fibers.
Claim 5
Dependent Claim
23 words
The method of claim 1 wherein said coupling step comprises attaching external pieces with pre-fabricated alignment structures for fibers in said external pieces.
Claim 6
Dependent Claim
20 words
The method of claim 1 wherein said providing step comprises etching the substrate to form troughs and attching said microlenses.
Claim 7
Dependent Claim
20 words
The method of claim 1 wherein said providing step comprises sawing the substrate to form troughs and attaching said microlenses.
Claim 8
Dependent Claim
22 words
The method of claim 1 wherein said arranging step comprises arranging said spatial light modulator adjacent said first surface of said substrate.
Claim 9
Dependent Claim
22 words
The method of claim 1 wherein said arranging step comprises arranging said spatial light modulator adjacent said second surface of said substrate.
Claim 10
Dependent Claim
22 words
The method of claim 1 wherein said arranging step comprises forming said spatial light modulator on said second surface of said substrate.
Claim 11
Independent Claim
118 words
A method of manufacturing an optical switch comprising: a. forming at least one mirror in a first surface of a substrate, wherein said first surface is substantially parallel to a second surface of said substrate; b. depositing waveguides upon said substrate for directing light to and/or from said mirror; c. coupling said waveguides with at least one optical fiber for transmission of light to and/or from said waveguides; d. providing for at least one microlens array for focusing said light, arranged between said waveguides and said mirror; e. arranging a spatial light modulator adjacent said substrate for reflecting said light reflected from said mirror; and f. sealing said spatial light modulator to said substrate to form said switch.
Claim 12
Independent Claim
118 words
A method of manufacturing an optical switch comprising: a. forming at least one mirror in a first surface of a substrate, wherein said first surface is substantially parallel to a second surface of said substrate; b. depositing waveguides upon said substrate for directing light to and/or from said mirror; c. coupling said waveguides with at least one optical fiber for transmission of light to and/or from said waveguides; d. providing for at least one microlens array for focusing said light, arranged between said waveguides and said mirror; e. arranging a spatial light modulator adjacent said substrate for reflecting said light reflected from said mirror; and f. sealing said spatial light modulator to said substrate to form said switch.
Claim 13
Dependent Claim
16 words
The method of claim 10 wherein said forming step comprises orientation dependent etching of the substrate.
Claim 14
Dependent Claim
24 words
The method of claim 10 wherein said coupling step comprises etching the substrate to form alignment features for said fibers and attaching said fibers.
Claim 15
Dependent Claim
23 words
The method of claim 10 wherein said coupling step comprises attaching external pieces with pre-fabricated alignment structures for fibers in said external pieces.
Claim 16
Dependent Claim
20 words
The method of claim 10 wherein said providing step comprises etching the substrate to form troughs and attching said microlenses.
Claim 17
Dependent Claim
20 words
The method of claim 10 wherein said providing step comprises sawing the substrate to form troughs and attaching said microlenes.
Claim 18
Dependent Claim
22 words
The method of claim 10 wherein said arranging step comprises arranging said spatial light modulator adjacent said first surface of said substrate.
Claim 19
Dependent Claim
22 words
The method of claim 10 wherein said arranging step comprises arranging said spatial light modulator adjacent said second surface of said substrate.
Claim 20
Dependent Claim
22 words
The method of claim 10 wherein said arranging step comprises forming said spatial light modulator on said second surface of said substrate.
Claim 21
Dependent Claim
109 words
An optical switch comprising: a. a first structure comprising: i. a substrate; ii. at least one mirror formed on said substrate such that said mirror reflects light out of the plane of the substrate to a second plane; iii. at least one optical fiber attached to said substrate for directing light to and/or from said mirror; iv. at least one microlens array attached to said substrate, between said mirror and said optical fiber, for focusing said light; and b. a second structure comprising a spatial light modulator, for reflecting light reflected from said mirror, wherein said second structure is arranged opposite to said first structure in said second plane.
Claim 22
Dependent Claim
109 words
An optical switch comprising: a. a first structure comprising: i. a substrate; ii. at least one mirror formed on said substrate such that said mirror reflects light out of the plane of the substrate to a second plane; iii. at least one optical fiber attached to said substrate for directing light to and/or from said mirror; iv. at least one microlens array attached to said substrate, between said mirror and said optical fiber, for focusing said light; and b. a second structure comprising a spatial light modulator, for reflecting light reflected from said mirror, wherein said second structure is arranged opposite to said first structure in said second plane.
Claim 23
Dependent Claim
11 words
The switch as in claim 19 wherein said substrate is silicon.
Claim 24
Dependent Claim
12 words
The switch as in claim 19 wherein said substrate is gallium arsenide.
Claim 25
Dependent Claim
12 words
The switch as in claim 19 wherein said substrate is indium phosphide.
Claim 26
Dependent Claim
14 words
The switch as in claim 19 wherein said mirror has a nonzero offset angle.
Claim 27
Dependent Claim
19 words
The switch as in claim 19 wherein said spatial light modulator comprises an array of individually deflectable mirror elements.
Claim 28
Dependent Claim
18 words
The switch as in claim 19 wherein said spatial light modulator comprises an array of liquid crystal devices.
Claim 29
Dependent Claim
104 words
An optical switch comprising: a. a first structure comprising: i. a substrate; ii. at least one waveguide; iii. at least one mirror formed in said substrate; iv. at least one optical fiber attached to said substrate for directing light to and/or from said waveguide; v. at least one microlens array attached to said substrate, between said mirror and said optical fiber, for focusing said light, such that said waveguide is positioned between said fiber and said microlens; and b. a second structure comprising a spatial light modulator, for reflecting light reflected from said mirror, wherein said second structure is arranged opposite said first structure.
Claim 30
Dependent Claim
104 words
An optical switch comprising: a. a first structure comprising: i. a substrate; ii. at least one waveguide; iii. at least one mirror formed in said substrate; iv. at least one optical fiber attached to said substrate for directing light to and/or from said waveguide; v. at least one microlens array attached to said substrate, between said mirror and said optical fiber, for focusing said light, such that said waveguide is positioned between said fiber and said microlens; and b. a second structure comprising a spatial light modulator, for reflecting light reflected from said mirror, wherein said second structure is arranged opposite said first structure.
Claim 31
Dependent Claim
11 words
The switch as in claim 26 wherein said substrate is silicon.
Claim 32
Dependent Claim
12 words
The switch as in claim 26 wherein said substrate is gallium arsenide.
Claim 33
Dependent Claim
12 words
The switch as in claim 26 wherein said substrate is indium phosphide.
Claim 34
Dependent Claim
14 words
The switch as in claim 26 wherein said mirror has a nonzero offset angle.
Claim 35
Dependent Claim
19 words
The switch as in claim 26 wherein said spatial light modulator comprises an array of individually deflectable mirror elements.
Claim 36
Dependent Claim
18 words
The switch as in claim 26 wherein said spatial light modulator comprises an array of liquid crystal devices.
Claim 37
Independent Claim
87 words
A method of optical interconnection comprising: a. transmitting light through an optical fiber in a first plane; b. focusing said light with a lens; c. reflecting said light off a mirror out of said first plane to a second plane which contains a spatial light modulator; d. using said spatial light modulator to reflect light out of said second plane to a mirror in said first plane; and e. focusing a portion of any light reflected from said mirror in said first plane into an optical fiber.
Claim 38
Independent Claim
87 words
A method of optical interconnection comprising: a. transmitting light through an optical fiber in a first plane; b. focusing said light with a lens; c. reflecting said light off a mirror out of said first plane to a second plane which contains a spatial light modulator; d. using said spatial light modulator to reflect light out of said second plane to a mirror in said first plane; and e. focusing a portion of any light reflected from said mirror in said first plane into an optical fiber.
Claim 39
Independent Claim
112 words
A method of optical interconnection comprising: a. transmitting light through an optical fiber in a first plane; b. receiving light from said optical fiber into a waveguide for further transmission of light; c. focusing said light with a lens; d. reflecting said light off of a mirror out of said first plane to a second plane which contains a spatial light modulator; e. using said spatial light modulator to reflect light out of said second plane to a mirror in said first plane; f. focusing a portion of any light reflected from said mirror in said first plane into a waveguide: and g. transmitting light from said waveguide to an optical fiber.
Claim 40
Independent Claim
112 words
A method of optical interconnection comprising: a. transmitting light through an optical fiber in a first plane; b. receiving light from said optical fiber into a waveguide for further transmission of light; c. focusing said light with a lens; d. reflecting said light off of a mirror out of said first plane to a second plane which contains a spatial light modulator; e. using said spatial light modulator to reflect light out of said second plane to a mirror in said first plane; f. focusing a portion of any light reflected from said mirror in said first plane into a waveguide: and g. transmitting light from said waveguide to an optical fiber.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-10-13 | 1996-04-13 | 1996-10-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-10-13 | 2000-04-13 | 2000-10-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-10-13 | 2004-04-13 | 2004-10-13 | $7700.00 | Window Closed / Lapsed |