US5155359A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Atomic scale calibration system
Assignee: Metrologix Inc
•
Filing: 1991-04-05
•
Granted: 1992-10-13
•
Expires: 2011-04-05
Abstract
Abstract A scanning electron microscope is calibrated using an atomic scale microscope, such as a scanning tunneling microscope or atomic force microscope to permit accurate and precise deflection of the scanning electron beam.
Inventors
- 👤 Kevin M. Monahan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 20:02
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/26; H01J37/28; B; B82; B82Y; B82Y35/00; H01J2237/00; H01J2237/26; H01J2237/282; H01J2237/2826; H01J2237/30; H01J2237/304; H01J2237/30433
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
60 words
Apparatus for imaging a surface comprising: means for generating a sensing beam having a field of view which is scanned over a material to be imaged; means for deflecting said sensing beam; and means for calibrating said deflecting means, said calibrating means further including means for counting atomic particles on a reference material surface placed within said field of view.
Claim 2
Dependent Claim
60 words
Apparatus for imaging a surface comprising: means for generating a sensing beam having a field of view which is scanned over a material to be imaged; means for deflecting said sensing beam; and means for calibrating said deflecting means, said calibrating means further including means for counting atomic particles on a reference material surface placed within said field of view.
Claim 3
Dependent Claim
13 words
Apparatus according to claim 1, wherein said sensing beam is an electron beam.
Claim 4
Dependent Claim
13 words
Apparatus according to claim 1, wherein said sensing beam is an proton beam.
Claim 5
Dependent Claim
13 words
Apparatus according to claim 1, wherein said sensing beam is an ion beam.
Claim 6
Dependent Claim
13 words
Apparatus according to claim 1, wherein said sensing beam is an x-ray beam.
Claim 7
Dependent Claim
14 words
Apparatus according to claim 1, wherein said calibrating means is a scanning tunneling microscope.
Claim 8
Dependent Claim
14 words
Apparatus according to claim 1, wherein said calibrating means is an atomic force microscope.
Claim 9
Dependent Claim
15 words
Apparatus according to claim 6, wherein said calibrating means further includes an atomic force microscope.
Claim 10
Dependent Claim
21 words
Apparatus according to claim 1, wherein said material to be imaged is a semiconductor wafer, and said reference material is mica.
Claim 11
Dependent Claim
21 words
Apparatus according to claim 1, wherein said material to be imaged is a semiconductor wafer, and said reference material is graphite.
Claim 12
Dependent Claim
21 words
Apparatus according to claim 1, wherein said deflecting means electrostatically deflects said sensing beam to scan the material to be imaged.
Claim 13
Dependent Claim
21 words
Apparatus according to claim 1, further comprising a movable stage for supporting said material to be imaged and said calibrating means.
Claim 14
Dependent Claim
41 words
Apparatus according to claim 1, wherein said calibration means further includes: a probe for sensing atomic particles of said reference material; and, a focusing means for locating said probe in a vicinity of said reference material without contacting the reference material.
Claim 15
Dependent Claim
97 words
Apparatus for imaging a surface comprising: means for generating a sensing beam having a field of view which is scanned over a material to be imaged; means for deflecting said sensing beam; means for calibrating said deflecting means, said calibration means further including means for counting atomic particles on a reference material surface placed within said field of view; means for supporting the material to be imaged; and, means for calibrating a position of said supporting means, said supporting means calibrating means detecting misalignment of said supporting means in a plane parallel to the field of view.
Claim 16
Dependent Claim
97 words
Apparatus for imaging a surface comprising: means for generating a sensing beam having a field of view which is scanned over a material to be imaged; means for deflecting said sensing beam; means for calibrating said deflecting means, said calibration means further including means for counting atomic particles on a reference material surface placed within said field of view; means for supporting the material to be imaged; and, means for calibrating a position of said supporting means, said supporting means calibrating means detecting misalignment of said supporting means in a plane parallel to the field of view.
Claim 17
Dependent Claim
55 words
Method for imaging a surface comprising the steps of: generating a sensing beam having a field of view which is scanned over a material to be imaged; deflecting said sensing beam; and calibrating said deflection, said step of calibrating further including counting atomic particles on a reference material surface placed within said field of view.
Claim 18
Dependent Claim
55 words
Method for imaging a surface comprising the steps of: generating a sensing beam having a field of view which is scanned over a material to be imaged; deflecting said sensing beam; and calibrating said deflection, said step of calibrating further including counting atomic particles on a reference material surface placed within said field of view.
References Cited (Backward Citations)
US4112295A
Cited
US4442361A
Cited
US4766311A
Cited
US4885472A
Cited
US4948971A
Cited
US5049745A
Cited
US4977328A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-10-13 | 1996-04-13 | 1996-10-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-10-13 | 2000-04-13 | 2000-10-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-10-13 | 2004-04-13 | 2004-10-13 | $7700.00 | Window Closed / Lapsed |