Thermal electric cooling system and method

Claim 2

In a thermal electric cooling system for a liquid, a horizontally disposed tank for containing the liquid, a horizontal cooling plate secured to the tank and forming a section of the bottom of the tank, said cooling plate being formed of a heat conductive material and having a first inwardly facing surface and a second downwardly facing surface and having the first upward facing surface in contact with the liquid in the tank, a plurality of thermal electric modules in contact with the second downwardly facing surface of the cooling plate, a cooling manifold having liquid flow passage therein secured to the cooling plate and in engagement with the thermal electric cooling devices and serving to sandwich the thermal electric cooling modules between the cooling plate and the cooling manifold and means for supplying a liquid coolant to the liquid flow passages of the cooling manifold to withdraw heat from the cooling manifold.

Claim 3

A system as in claim 1 together with a plurality of horizontally spaced apart vertically disposed parallel fins extending inwardly into the tank and in contact with the liquid and being in contact with the first surface of the cooling plate.

Claim 4

A system as in claim 1 wherein the cooling manifold is secured to the cooling plate by a plurality of screws.

Claim 5

A system as in claim 1 wherein said cooling plate forms the bottom wall of said tank and forms a liquid tight seal therewith.

Claim 6

A system as in claim 1 together with a wafer chuck and means for supplying a liquid from within the tank to the wafer chuck for maintaining the wafer chuck at a predetermined temperature.

Claim 7

A system as in claim 1 together with piping having a liquid therein to be cooled, means disposed in the vicinity of the piping for conveying a liquid from and to the tank and in contact with the piping so that energy is transferred from the liquid in the piping to the liquid conveyed to and from the tank.

Claim 8

A system as in claim 1 wherein said tank is provided with a removable fill cap together with a liquid level sensor disposed within the tank.

Claim 9

In a thermal electric cooling system for a liquid, a tank for containing the liquid, a cooling plate secured to the tank and forming a section of the bottom of the tank, said cooling plate being formed of a heat conductive material and having first and second surfaces and having the first surface in contact with the liquid in the tank, a plurality of thermal electric modules in contact with the second surface of the cooling plate, a cooling manifold secured to the cooling plate and in engagement with the thermal electric cooling devices and serving to sandwich the thermal electric cooling modules between the cooling plate and the cooling manifold and means for supplying a liquid coolant to the cooling manifold to withdraw heat from the cooling manifold, contact means connected to said thermal electric cooling devices for operating said thermal electric cooling devices continuously in a cooling mode and an electric heater mounted within the tank for supplying heat to the liquid in the tank when the liquid coolant drops below a predetermined temperature.

Claim 10

In a thermal electric cooling system for a liquid, a tank for containing the liquid, a cooling plate secured to the tank and forming a section of the bottom of the tank, said cooling plate being formed of a heat conductive material and having first and second surfaces and having the first surface in contact with the liquid in the tank, a plurality of thermal electric modules in contact with the second surface of the cooling plate, a cooling manifold secured to the cooling plate and in engagement with the thermal electric cooling devices and serving to sandwich the thermal electric cooling modules between the cooling plate and the cooling manifold and means for supplying a liquid coolant to the cooling manifold to withdraw heat from the cooling manifold, contact means connected to said thermal electric cooling devices for operating said thermal electric cooling devices continuously in a cooling mode and an electric heater mounted within the tank for supplying heat to the liquid in the tank when the liquid coolant drops below a predetermined temperature.

Claim 11

A system as in claim 8 together with a temperature sensor disposed within the tank controlling the operation of the electric heater.