US5151135A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for cleaning surfaces using UV lasers
Assignee: Lambda Physik AG
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Filing: 1989-09-15
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Granted: 1992-09-29
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Expires: 2009-09-15
Abstract
Abstract The invention relates to a new method for cleaning chemical, metallic and particulate contaminants from solid surfaces. The new method comprises irradiating the surface with essentially ultraviolet laser radiation whose parameters are selected to avoid causing substantial chemical or physical change at the surface.
Inventors
- 👤 Thomas J. Magee
- 👤 Charles S. Leung
- 👤 Richard L. Press
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 17:58
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/12; B; B08; B08B; B08B7/00; B08B7/0035; B08B7/0042; H10P50/00; H10P50/20; H10P52/00; H10P95/00; H10P95/70; Y; Y10; Y10S; Y10S148/00; Y10S148/017; Y10S438/00; Y10S438/906
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
101 words
A method for treating a solid surface which surface is a member of the group of an essentially single crystalline material, an amorphous material and materials intermediate thereto, said method comprising irradiating said surface with one or more pulses of laser radiation wherein said radiation is essentially ultraviolet and wherein said pulses have a peak-power density that is sufficiently low and a pulse duration that is sufficiently short so that said pulses do not cause substantial chemical or physical change to said surface, and wherein said peak-power density and pulse duration are effective to result in substantial cleaning of said surface.
Claim 2
Independent Claim
101 words
A method for treating a solid surface which surface is a member of the group of an essentially single crystalline material, an amorphous material and materials intermediate thereto, said method comprising irradiating said surface with one or more pulses of laser radiation wherein said radiation is essentially ultraviolet and wherein said pulses have a peak-power density that is sufficiently low and a pulse duration that is sufficiently short so that said pulses do not cause substantial chemical or physical change to said surface, and wherein said peak-power density and pulse duration are effective to result in substantial cleaning of said surface.
Claim 3
Dependent Claim
19 words
The method of claim 1 wherein the peak-power density of said pulses is uniform to at least about ±10%.
Claim 4
Dependent Claim
17 words
The method of claim 1 wherein the duration of said pulse is about 80 nanoseconds or less.
Claim 5
Dependent Claim
19 words
The method of claim 1 wherein the peak-power density of said pulses is uniform to at least about ±5%.
Claim 6
Independent Claim
117 words
A method for treating a solid surface which surface is a member of the group of an essentially single crystalline material, an amorphous material and materials intermediate thereto, said method comprising irradiating said surface with one or more pulses of laser radiation wherein the wavelength of said radiation is in the range of from about 180 nm to about 435 nm and wherein said pulses have peak-power density that is sufficiently low and a pulse duration that is sufficiently short so that said pulses do not cause substantial chemical or physical change to said surface, and wherein said peak-power density and pulse duration are effective to result in substantial removal of particulates and impurities from said surface
Claim 7
Independent Claim
117 words
A method for treating a solid surface which surface is a member of the group of an essentially single crystalline material, an amorphous material and materials intermediate thereto, said method comprising irradiating said surface with one or more pulses of laser radiation wherein the wavelength of said radiation is in the range of from about 180 nm to about 435 nm and wherein said pulses have peak-power density that is sufficiently low and a pulse duration that is sufficiently short so that said pulses do not cause substantial chemical or physical change to said surface, and wherein said peak-power density and pulse duration are effective to result in substantial removal of particulates and impurities from said surface
Claim 8
Dependent Claim
19 words
The method of claim 5 wherein the peak-power density of said pulses is uniform to at least about ±10%.
Claim 9
Dependent Claim
17 words
The method of claim 5 wherein the duration of said pulses is about 80 nanoseconds or less.
Claim 10
Dependent Claim
19 words
The method of claim 5 wherein the peak-power density of said pulses is uniform to at least about ±5%.
Claim 11
Dependent Claim
15 words
The method of claim 2 wherein said solid surface is an essentially single crystalline material.
Claim 12
Dependent Claim
14 words
The method of claim 2 wherein said solid surface is an essentially amorphous material.
Claim 13
Dependent Claim
22 words
The method of claim 2 wherein said solid surface is intermediate to an essentially single crystalline material and an essentially amorphous material.
Claim 14
Dependent Claim
24 words
The method of claim 1 wherein said irradiation is adminstered to said surface in the absence of a gas flowing constantly across said surface.
Claim 15
Dependent Claim
21 words
The method of claim 1 wherein said irradiation is administered to said surface while said surface is subjected to vacuum conditions.
Claim 16
Dependent Claim
24 words
The method of claim 5 wherein said irradiation is adminstered to said surface in the absence of a gas flowing constantly across said surface.
Claim 17
Dependent Claim
31 words
The method of claim 14 wherein the duration of said pulses is about 80 nanoseconds or less and the peak-power density of said pulses is uniform to at least about ±10%.
Claim 18
Dependent Claim
21 words
The method of claim 5 wherein said irradiation is administered to said surface while said surface is subjected to vacuum conditions.
Claim 19
Dependent Claim
31 words
The method of claim 16 wherein the duration of said pulses is about 80 nanoseconds or less and the peak-power density of said pulses is uniform to at least about ±10%.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-09-29 | 1996-03-30 | 1996-09-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-09-29 | 2000-03-30 | 2000-09-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-09-29 | 2004-03-30 | 2004-09-29 | $7700.00 | Window Closed / Lapsed |